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2024
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Invention
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Dustproof structure for laser output window of laser, and laser.
A dustproof structure for a las... |
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2023
|
Invention
|
Quick electrical-connecting structure for high-voltage high-frequency pulse environment.
A quick... |
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Invention
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Excimer laser energy model identification method and apparatus.
Disclosed in the present inventi... |
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2022
|
Invention
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Dustproof structure for light emergent window sheet of laser, and laser. Provided in the present ... |
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Invention
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High-stability excimer laser apparatus. A high-stability excimer laser apparatus, comprising a di... |
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2021
|
Invention
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Vibration isolation structure, impeller rotor system for laser, and laser. Disclosed are a vibrat... |
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Invention
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Excimer laser energy model identification method and apparatus. Disclosed in the present inventio... |
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|
Invention
|
Quick electric connection structure for high-voltage high-frequency pulse environment. Disclosed ... |
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|
Invention
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Excimer laser, and line width narrowing apparatus and method. Disclosed are an excimer laser, and... |
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Invention
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Control method and system for stablizing excimer laser pulse energy.
A control method for stabil... |
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2020
|
Invention
|
Device and method for online measuring spectrum for laser device.
Provided are a device (4) and ... |
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Invention
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Laser spectrum online measurement device and method. A laser spectrum online measurement device (... |
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Invention
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Laser wavelength measurement device and method. Disclosed are a laser wavelength measurement devi... |
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Invention
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Method for regulating output power of 213 nm laser, and apparatus thereof. Provided are a method ... |
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2019
|
Invention
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Passivating method and passivating apparatus applicable to laser discharge chamber. A passivating... |
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Invention
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Excimer laser pulse energy stability control method and system. An excimer laser pulse energy sta... |
