Devices and methods are provided that facilitate proximity or liveness detection of a user of a wearable device or a user interacting with a device based on ultrasonic information. In various embodiments, machine learning classifier models can be employed to generate classification predictions of a donned or a doffed state of a wearable device. In various aspects, a gated-recurrent unit (GRU) recursive neural network (RNN) can be employed as a machine learning classifier model. In other aspects, a liveness detection classifier decision tree can be employed as a machine learning classifier model. Power states or operating modes for associated devices can be selected based on the proximity or liveness of the user of the wearable device, as an example.
G01S 15/12 - Systèmes pour mesurer la distance uniquement utilisant la transmission de trains discontinus d'ondes modulées par impulsions dans lesquels la fréquence de récurrence des impulsions varie de façon à établir une relation de temps voulue entre la transmission d'une impulsion et la réception de l'écho d'une impulsion précédente
G01S 7/52 - Détails des systèmes correspondant aux groupes , , de systèmes selon le groupe
G01S 7/539 - Détails des systèmes correspondant aux groupes , , de systèmes selon le groupe utilisant l'analyse du signal d'écho pour la caractérisation de la cibleSignature de cibleSurface équivalente de cible
G06F 1/3231 - Surveillance de la présence, de l’absence ou du mouvement des utilisateurs
G06F 1/3234 - Économie d’énergie caractérisée par l'action entreprise
G06N 3/0442 - Réseaux récurrents, p. ex. réseaux de Hopfield caractérisés par la présence de mémoire ou de portes, p. ex. mémoire longue à court terme [LSTM] ou unités récurrentes à porte [GRU]
G06N 20/20 - Techniques d’ensemble en apprentissage automatique
A method includes forming a bumpstop from a first intermetal dielectric (IMD) layer and forming a via within the first IMD, wherein the first IMD is disposed over a first polysilicon layer, and wherein the first polysilicon layer is disposed over another IMD layer that is disposed over a substrate. The method further includes depositing a second polysilicon layer over the bumpstop and further over the via to connect to the first polysilicon layer. A standoff is formed over a first portion of the second polysilicon layer, and wherein a second portion of the second polysilicon layer is exposed. The method includes depositing a bond layer over the standoff.
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
3.
DRIVE AND SENSE BALANCED GYROSCOPE WITH ENHANCED VIBRATION REJECTION
A MEMS gyroscope may have first and second drive masses configured to be driven in anti-phase. The gyroscope also includes first and second out-of-plane proof masses coupled to the first and second drive masses, respectively. The first and second out-of-plane proof masses may be driven in anti-phase to each other. The first and second out-of-plane proof masses may each include a driven mass and a sense mass, and may be responsive to an angular velocity about an out-of-plane axis to cause a respective in-plane Coriolis forces perpendicular to their respective drive motions. The gyroscope also includes a coupling link between the sense masses of first and second out-of-plane proof masses, which results in rejection of undesired vibrations.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
4.
Ultrasonic Sensor Package with Decoupled Acoustic Modes
A piezoelectric micromachined ultrasound transducer (PMUT) sensor is implemented with a microelectromechanical sensor (MEMS) die including a membrane of the PMUT sensor that transmits and receives acoustic signals. A back volume within the MEMS sensor package has an acoustic resonance mode that is within an operating frequency range of the MEMS sensor. The MEMS die is located within the MEMS sensor package such that an acoustic pressure that is applied to the membrane is balanced over the membrane, such that the back volume acoustic resonance mode is decoupled from the membrane operating mode.
A piezoelectric micromachined ultrasonic transducer (“PMUT”) sensor has a membrane that includes an active region that actively transmits and receives ultrasonic acoustic signals and an inactive region that contributes to the PMUT modeshape but does not actively transmit and receive ultrasonic acoustic signals. A plurality of vent holes are distributed throughout the membrane such as in the inactive region. The number and size of the vent holes are selected to provide a necessary dissipation of pressure bursts or transients while maintaining a transmission efficiency.
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
A microelectromechanical system (MEMS) gyroscope includes a MEMS structure that outputs a capacitive signal that includes both a Coriolis signal used to determine an angular velocity and a quadrature signal 90 degrees out-of-phase with the Coriolis signal. A capacitance to voltage (C2V) amplifier receives and amplifies the capacitive signal for further processing. Quadrature cancellation circuitry processes the output of the C2V amplifier to isolate the quadrature signal and generate a signal to control variable capacitors coupled to the C2V amplifier input in a manner that removes the quadrature signal from the C2V amplifier output.
A piezoelectric micromachined ultrasonic transducer (“PMUT”) sensor has a target residual stress at one or more layers of the PMUT and also has patterning where some of the layers of the PMUT are removed. The residual stress and the patterning result in a static deflection of the PMUT. The application of the residual stress and the patterning define a vibration modeshape with desired acoustic characteristics such as improved signal-to-noise ratio (“SNR”).
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
G06F 30/17 - Conception mécanique paramétrique ou variationnelle
8.
ULTRASONIC SENSOR PACKAGE WITH DECOUPLED ACOUSTIC MODES
A piezoelectric micromachined ultrasound transducer (PMUT) sensor is implemented with a microelectromechanical sensor (MEMS) die including a membrane of the PMUT sensor that transmits and receives acoustic signals. A back volume within the MEMS sensor package has an acoustic resonance mode that is within an operating frequency range of the MEMS sensor. The MEMS die is located within the MEMS sensor package such that an acoustic pressure that is applied to the membrane is balanced over the membrane, such that the back volume acoustic resonance mode is decoupled from the membrane operating mode.
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
09 - Appareils et instruments scientifiques et électriques
Produits et services
Sensors for navigation; sensors for determining position, heading, orientation, and absolute orientation; accelerometers; gyroscopes; magnetometers; hardware and software for sensor fusion and activity tracking
10.
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
The present invention relates to electrodes for microelectromechanical system (MEMS) microphones. In one embodiment, a MEMS sensor includes a membrane and a backplate situated parallel to the membrane and separated by a gap. The backplate includes a first region that includes a center point of the backplate and has first holes of a first hole pitch, a second region that is positioned outside the first region and has second holes of a second hole pitch that is smaller than the first hole pitch, and a transitional region that is positioned between the first region and the second region and has third holes of a third hole pitch that is between the first hole pitch and the second hole pitch. The first and second regions of the backplate and their respective holes can be of a shape (e.g., hexagonal) that differs from the shape of the backplate.
The present invention relates to a microelectromechanical system (MEMS) microphone array capsule. In one embodiment, a MEMS microphone includes a MEMS microphone die; an acoustic sensor array formed into the MEMS microphone die, the acoustic sensor array comprising a plurality of MEMS acoustic sensor elements, wherein respective ones of the plurality of MEMS acoustic sensor elements are tuned to different resonant frequencies; and an interconnect that electrically couples the acoustic sensor array to an impedance converter circuit.
A device includes a substrate and an intermetal dielectric (IMD) layer disposed over the substrate. The device also includes a first plurality of polysilicon layers disposed over the IMD layer and over a bumpstop. The device also includes a second plurality of polysilicon layers disposed within the IMD layer. The device includes a patterned actuator layer with a first side and a second side, wherein the first side of the patterned actuator layer is lined with a polysilicon layer, and wherein the first side of the patterned actuator layer faces the bumpstop. The device further includes a standoff formed over the IMD layer, a via through the standoff making electrical contact with the polysilicon layer of the actuator and a portion of the second plurality of polysilicon layers and a bond material disposed on the second side of the patterned actuator layer.
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
13.
CONTINUOUS TIME PIPELINE ANALOG-TO-DIGITAL CONVERSION
A continuous time reconfigurable integrator is dynamically reconfigurable to facilitate real time high-resolution modification of the integrator output signal. An initial output of the integrator is evaluated to generate a coarse estimate which is then used to modify capacitive inputs to the integrator, which result in the output of a residue signal. The initial and residue outputs are individually processed by an analog-to-digital converter (ADC), such as a successive-approximation-register ADC, and digitally combined.
In a microelectromechanical system (MEMS) sensor, movement of a component such as a proof mass due to a force of interest is sensed capacitively. A capacitance-to-voltage (C2V) converter receives a capacitance signal from the sensor and outputs a signal that includes an offset in addition to a signal of interest. The output signal is analyzed to identify the offset portion of the output signal and to modify values one or more variable capacitors coupled to the C2V input reduce the offset portion of the output signal.
An example embodiment includes an example embodiment includes a method performed by a processor of a user device. The method including receiving, by the processor of the user device, instructions for installing application software on the user device, and installing the application software on the user device based on the instructions. The installation including installing library code of the application software in a section of a memory device of the user device and installing timer code in the section of the memory device along with the library code. The erasure of the timer code from the memory device causes erasure of the library code from the memory device. Decrementing, by the processor of the user device, the timer code when the processor executes the library code, the timer code limiting a life duration of the user device executing the application software.
A MEMS device incorporates a first sensor and a second sensor to receive an external excitation and respectively output signals to processing circuitry. The processing circuitry combines the first and second signals to create a third signal, which includes an output from the first sensor when the external excitation is between a first and second frequency relatively close to DC and an output from the second sensor when the external excitation is between a third and fourth frequency at a higher frequency range.
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
17.
Gyroscope Drive Loop with Resonant Amplitude Sampling and PWM Drive
A MEMS gyroscope includes a mixed analog and digital drive loop. A drive sense signal from a suspended spring-mass system is received by the drive loop, rectified, and compared to a reference signal. The result of the comparison is processed and converted into a digital signal that is processed by a digital filter and a digital pulse-width modulator of the drive loop. The output of the pulse width modulator controls a high-voltage drive of the drive loop that generates a drive signal having an amplitude based on the pulse width modulator output signal and supplies the drive signal to drive the suspended spring-mass system.
A piezoelectric micromachined ultrasound transducer (PMUT) device has different transduction efficiency at different portions of the PMUT device depending on design characteristics such as materials, material thicknesses, and shape. A metal layer of the PMUT device is patterned to render certain portions of the piezoelectric layer of the PMUT device inactive. Only the active portions of the piezoelectric layer are utilized for transmission and reception of ultrasonic signals, while overall PMUT device capacitance is reduced due to the lack of an active capacitor in the inactive region(s) of the PMUT device, resulting in a PMUT design with increased sensitivity. For differential PMUT devices, the patterning may be performed to match capacitances associated with the differential piezoelectric regions.
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
H10N 39/00 - Dispositifs intégrés, ou ensembles de plusieurs dispositifs, comportant au moins un élément piézo-électrique, électrostrictif ou magnétostrictif couvert par les groupes
A piezoelectric micromachined ultrasound transducer (PMUT) device has different transduction efficiency at different portions of the PMUT device depending on design characteristics such as materials, material thicknesses, and shape. A metal layer of the PMUT device is patterned to render certain portions of the piezoelectric layer of the PMUT device inactive. Only the active portions of the piezoelectric layer are utilized for transmission and reception of ultrasonic signals, while overall PMUT device capacitance is reduced due to the lack of an active capacitor in the inactive region(s) of the PMUT device, resulting in a PMUT design with increased sensitivity. For differential PMUT devices, the patterning may be performed to match capacitances associated with the differential piezoelectric regions.
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
A61B 8/00 - Diagnostic utilisant des ondes ultrasonores, sonores ou infrasonores
20.
SELECTIVE HYDROPHOBIC LAYER REMOVAL USING UV IRRADIATION WITH NON-ALIGNED MASK
A sensing device is formed on a first side of a wafer device, forming a cavity between sensing device and the wafer device. An opening of the cavity faces away from the sensing device, positioned on a second side of the wafer device (positioned opposite to the first side). A hydrophobic layer is formed on the second side of the wafer device, on the cavity, on an interior and on an exterior of the sensing device. A mask is formed on the hydrophobic layer on the second side. The mask is perforated that maintains at least a portion of the hydrophobic layer covering the second side of the wafer device exposed. Light is applied to the second side of the wafer device that removes the at least the portion of the hydrophobic layer covering the second side of the wafer device that is exposed. The mask is removed.
H01L 31/00 - Dispositifs à semi-conducteurs sensibles aux rayons infrarouges, à la lumière, au rayonnement électromagnétique d'ondes plus courtes, ou au rayonnement corpusculaire, et spécialement adaptés, soit comme convertisseurs de l'énergie dudit rayonnement e; Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de ces dispositifs ou de leurs parties constitutives; Leurs détails
A MEMS sensor may include multiple sense electrodes located relative to respective portions of one or more proof masses of a MEMS layer of the sensor. Individual sense electrodes are capable of individual calibration within the drive and/or sense path for the sense electrode. A distance between each individual sense electrode relative to a proof mass is determined for the at-rest state of the sensor. Calibration values are determined based on these distances, and individual drive and/or sense signals associated with each sense electrode are modified to adjust for changes in distance, such as are caused by shifting, tilting, or bending of the MEMS layer or substrate.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 21/00 - Essai ou étalonnage d'appareils ou de dispositifs couverts par les autres groupes de la présente sous-classe
22.
DEFORMATION MAPPING FOR OUT-OF-PLANE ACCELEROMETER OFFSET/SENSITIVITY SELF-CALIBRATION
A microelectromechanical system (MEMS) accelerometer incorporates deformation sensing with a plurality of sense electrodes positioned to facilitate determining a deformation pattern (e.g., asymmetric or symmetric) of an underlying substrate layer relative to a MEMS layer. The deformation pattern of the substrate layer contributes to offset and/or sensitivity of the accelerometer, so the determination of the deformation pattern enables processing circuitry to compensate and improve offset and/or sensitivity stability. Tilt sense electrodes and/or comparison electrodes may be incorporated alongside the plurality of sense electrodes to monitor deformation of the substrate layer relative to a fixed portion of the MEMS layer.
B81B 3/00 - Dispositifs comportant des éléments flexibles ou déformables, p. ex. comportant des membranes ou des lamelles élastiques
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 21/00 - Essai ou étalonnage d'appareils ou de dispositifs couverts par les autres groupes de la présente sous-classe
23.
Dynamic Adaptation of Ultrasonic Detection Parameters Based on Image Classification
An object detection system includes an ultrasonic sensor and an image sensor. The ultrasonic sensor transmits an ultrasonic signal into an environment of interest and makes an initial determination regarding a potential object in the environment of interest based on received reflections of the ultrasonic signal. Based on that initial determination, the image sensor and associated processing circuitry wake up and capture one or more images of the object within the environment of interest. Those images are analyzed such as by a classifier to determine the object status, which is then compared to the object status as determined by the ultrasonic sensor. Detection parameters of the ultrasonic sensor are updated if the object status as determined ultrasonic sensor does not match the determination of the imaging system.
G01S 15/04 - Systèmes de détermination de la présence d'une cible
G01S 15/42 - Mesure simultanée de la distance et d'autres coordonnées
G06V 10/764 - Dispositions pour la reconnaissance ou la compréhension d’images ou de vidéos utilisant la reconnaissance de formes ou l’apprentissage automatique utilisant la classification, p. ex. des objets vidéo
An actuator layer of a MEMS sensor is be fabricated to include multi-level features, such as additional sense electrodes, vertical bump stops, or weighted proof masses. A sacrificial layer is deposited on the actuator layer such that locations are provided for the multi-level features to extend vertically from the actuator layer. After the multi-layer features are fabricated on the actuator layer the sacrificial layer is removed. Additional processing such as patterning of the actuator layer may be performed to provide desired functionality and electrical signals to portions of the actuator layer, including to the multi-level features.
Applying positive and negative feedback voltages to an electromechanical sensor of a microphone utilizing a voltage-to-voltage converter to facilitate an improvement in sensitivity and reduction in distortion of the microphone is presented herein. A microphone comprises an electromechanical sensor comprising a capacitive sense element comprising a first sense node and a second sense node; and a voltage-to-voltage converter comprising an input, a first output, and a second output. The voltage-to-voltage converter forms, via a first capacitive coupling to the second sense node, a negative feedback loop between the first output of the voltage-to-voltage converter and the input of the voltage-to-voltage converter. The first sense node is electrically coupled to the input of the voltage-to-voltage converter, and the voltage-to-voltage converter forms, via a second capacitive coupling to the first sense node, a positive feedback loop between the second output of the voltage-to-voltage converter and the input of the voltage-to-voltage converter.
G01P 15/00 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
A method for calibrating a micro-electro-mechanical system (MEMS) gyroscopes by determining a plurality of variates including quadrature and inphase values from output data of a first subset of the MEMS gyroscopes, determining offset temperature coefficients of the first subset of the MEMS gyroscopes over temperature variation, computing a linear regression using the quadrature and inphase values and the offset temperature coefficients to determine linear regression variate coefficients for predicting the offset temperature coefficient based on the quadrature and inphase values. The method also including determining a plurality of variates including quadrature and inphase values from output data of a second subset of the MEMS gyroscopes, determining a predicted offset temperature coefficient based on the quadrature and inphase values and the linear regression variate coefficients, and programing the second subset of the MEMS gyroscopes to use the predicted offset temperature coefficient to adjust the output data during operation.
G01C 25/00 - Fabrication, étalonnage, nettoyage ou réparation des instruments ou des dispositifs mentionnés dans les autres groupes de la présente sous-classe
G01C 19/5691 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant le décalage de phase d'un nœud ou d'un anti-nœud de vibration de vibrateurs essentiellement à trois dimensions, p. ex. vibrateurs du type cloche
G01C 19/5776 - Traitement de signal non spécifique à l'un des dispositifs couverts par les groupes
27.
METHOD AND SYSTEM FOR CROWDSOURCED CREATION OF MAGNETIC MAP
Systems and methods are disclosed for creating a magnetic map by obtaining magnetic field measurements from a plurality of platforms. A first set of poses for each platform is determined and information from the magnetic map is obtained for any existing magnetic field values for the first set. Magnetic constraints on poses of the platform are determined and used for determining a second set of poses for each platform. The magnetic field values of the magnetic map are then updated based at least in part on the second set of poses for each platform.
Systems and methods are disclosed for creating a magnetic map by obtaining magnetic field measurements from a plurality of platforms. A first set of poses for each platform is determined and information from the magnetic map is obtained for any existing magnetic field values for the first set. Magnetic constraints on poses of the platform are determined and used for determining a second set of poses for each platform. The magnetic field values of the magnetic map are then updated based at least in part on the second set of poses for each platform.
G01C 21/16 - NavigationInstruments de navigation non prévus dans les groupes en utilisant des mesures de la vitesse ou de l'accélération exécutées à bord de l'objet navigantNavigation à l'estime en intégrant l'accélération ou la vitesse, c.-à-d. navigation par inertie
G01C 21/00 - NavigationInstruments de navigation non prévus dans les groupes
G01S 19/49 - Détermination de position en combinant ou en commutant entre les solutions de position dérivées du système de positionnement par satellite à radiophares et les solutions de position dérivées d'un autre système l'autre système étant un système de position inertielle, p. ex. en hybridation lâche
09 - Appareils et instruments scientifiques et électriques
Produits et services
Measuring equipment sensors comprising an inertial
measurement unit, magnetometer, pressure sensor, microphone,
temperature sensor, ultrasonic sensor for measuring
acceleration, angle of rotation, sound, and distance ranges,
for use in sensor fusion, Internet of Things, industrial
applications and software development systems, drone
applications and software development systems, automotive
applications and software development systems; measuring
equipment comprising ultrasonic time-of-flight sensors for
measuring distances, obstacles, sounds, ultrasonic signals,
and ultrasonic range sensing; acoustic sensors; microphones;
sensors for detecting sound; sensors for recognizing sound;
sensors for analyzing sound; sensors for the determination
of location, positions, movement, change in pressure,
activity monitoring, and change in elevation, for use in
computers, laptops, tablets, smartphones, portable
electronic devices, drones, smart watches, electronic
tracking devices, and wearable electronic devices;
fingerprint sensors and scanners; ultrasonic sensors;
biometric identification apparatus; touchscreen sensors for
interpreting fingerprints, image enhancement, fingerprint
matching, user identification and user authentication;
optical sensors for interpreting fingerprints, image
enhancement, fingerprint matching, user identification, and
user authentication; sensor development kits for motion
comprised primarily of electronic sensors and software for
use in industrial applications; sensor development kits,
namely, kits comprised primarily of computer hardware and
downloadable software for use in developing and operating
sensors and electronic devices for detecting, transmitting,
recognizing, analyzing, and tracking motion, movement,
positions, distances, obstacles, sounds, change in
elevation, ultrasonic signals, and barometric pressure;
downloadable and recorded software for use with sensors for
monitoring position, movement, vibration, inclination,
distances, environmental conditions, and Internet of Things
applications; downloadable software for use with sensor
devices and sensors for detecting sound, recognizing sound,
analyzing sound, monitoring sound, and controlling sound;
downloadable software for use with sensor-enabled
microphones, headsets, wireless audio devices, smart
speakers, mobile devices, wearable mobile technologies;
downloadable software for interpreting fingerprints;
hardware for interpreting fingerprints, image enhancement,
fingerprint matching, user identification, and user
authentication; software for use with sensor-enabled
microphones, headphones, wireless audio devices, smart
speakers, mobile devices, wearable mobile technologies, and
Internet of Things devices for capturing and storing sensor
data and analytics.
30.
DUAL AXIS ACCELEROMETER WITH COMPENSATION ELECTRODES
A dual axis accelerometer with a single proof mass measures in-plane acceleration (e.g., either along an x-axis or a y-axis), out-of-plane acceleration (e.g., normal to an x-y plane), and tilt of a fixed portion of a MEMS layer (e.g., normal to the x-y plane). In response to a tilt measurement, the dual-axis accelerometer compensates any offset (e.g., variability) of the out-of-plane accelerometer in order to maintain offset stability. In some embodiments, multiple dual axis accelerometers, perpendicularly configured, may be implemented via processing circuitry to offer three axis sensitivity capability.
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
31.
Clocking scheme for reduced noise in continuous-time sigma-delta adcs preliminary class
A circuit for a feedback system incorporates a gating mechanism to reduce flicker noise (e.g., a source for bias instability within a MEMS device) at a digital output. The gating mechanism generates a gating pulse with a delay period (e.g., a common, or fixed, delay including symmetrical rising and falling edge delays) that overrides internal delays (e.g., asymmetrical rising and falling edge delays) of a phase generator to prevent propagation delay (e.g., delay affected by jitter) from reaching subsequent feedback components (e.g., a digital-to-analog converter (DAC)) and contributing to the generation of flicker noise within the system.
H03M 3/00 - Conversion de valeurs analogiques en, ou à partir d'une modulation différentielle
H03K 19/20 - Circuits logiques, c.-à-d. ayant au moins deux entrées agissant sur une sortieCircuits d'inversion caractérisés par la fonction logique, p. ex. circuits ET, OU, NI, NON
32.
MICROELECTROMECHANICAL ACOUSTIC SENSOR WITH MEMBRANE ETCH RELEASE STRUCTURES AND METHOD OF FABRICATION
Low-cost, robust, and high performance microelectromechanical systems (MEMS) acoustic sensors are described. Described MEMS acoustic sensors can comprise a set of etch release structures in the acoustic sensor membrane that facilitates rapid and/or uniform etch release of the acoustic sensor membrane. In addition, MEMS acoustic sensors can comprise a set of membrane position control structures of the acoustic sensor membrane that can reduce the bending stress of the acoustic sensor membrane. MEMS acoustic sensors can further comprise a three layer acoustic sensor membrane that provides increased robustness. Further design flexibility and improvements are described that provide increased robustness and/or cost savings, and a low cost fabrication process for MEMS acoustic sensors is provided.
G01H 11/06 - Mesure des vibrations mécaniques ou des ondes ultrasonores, sonores ou infrasonores par détection des changements dans les propriétés électriques ou magnétiques par des moyens électriques
H04R 7/10 - Membranes planes comportant plusieurs sections ou couches comportant des couches superposées en contact
Techniques are disclosed to build a map for an area around at least a route traversed by a moving platform. An integrated navigation solution for a device within the moving platform is generated using motion sensor data obtained from a sensor assembly of the device and absolute navigational information for the platform. The integrated navigation solution is then used to project radar measurements obtained from at least one radar of the platform onto the area so that the map is built using the projected radar measurements.
G01C 21/00 - NavigationInstruments de navigation non prévus dans les groupes
G01C 21/16 - NavigationInstruments de navigation non prévus dans les groupes en utilisant des mesures de la vitesse ou de l'accélération exécutées à bord de l'objet navigantNavigation à l'estime en intégrant l'accélération ou la vitesse, c.-à-d. navigation par inertie
G01C 21/28 - NavigationInstruments de navigation non prévus dans les groupes spécialement adaptés pour la navigation dans un réseau routier avec corrélation de données de plusieurs instruments de navigation
09 - Appareils et instruments scientifiques et électriques
Produits et services
(1) Measuring equipment sensors comprising an inertial measurement unit, magnetometer, pressure sensor, microphone, temperature sensor, ultrasonic sensor for measuring acceleration, angle of rotation, sound, and distance ranges, for use in sensor fusion, Internet of Things, industrial applications and software development systems, drone applications and software development systems, automotive applications and software development systems; measuring equipment comprising ultrasonic time-of-flight sensors for measuring distances, obstacles, sounds, ultrasonic signals, and ultrasonic range sensing; acoustic sensors; microphones; sensors for detecting sound; sensors for recognizing sound; sensors for analyzing sound; sensors for the determination of location, positions, movement, change in pressure, activity monitoring, and change in elevation, for use in computers, laptops, tablets, smartphones, portable electronic devices, drones, smart watches, electronic tracking devices, and wearable electronic devices; fingerprint sensors and scanners; ultrasonic sensors; biometric identification apparatus; touchscreen sensors for interpreting fingerprints, image enhancement, fingerprint matching, user identification and user authentication; optical sensors for interpreting fingerprints, image enhancement, fingerprint matching, user identification, and user authentication; sensor development kits for motion comprised primarily of electronic sensors and software for use in industrial applications; sensor development kits, namely, kits comprised primarily of computer hardware and downloadable software for use in developing and operating sensors and electronic devices for detecting, transmitting, recognizing, analyzing, and tracking motion, movement, positions, distances, obstacles, sounds, change in elevation, ultrasonic signals, and barometric pressure; downloadable and recorded software for use with sensors for monitoring position, movement, vibration, inclination, distances, environmental conditions, and Internet of Things applications; downloadable software for use with sensor devices and sensors for detecting sound, recognizing sound, analyzing sound, monitoring sound, and controlling sound; downloadable software for use with sensor-enabled microphones, headsets, wireless audio devices, smart speakers, mobile devices, wearable mobile technologies; downloadable software for interpreting fingerprints; hardware for interpreting fingerprints, image enhancement, fingerprint matching, user identification, and user authentication; software for use with sensor-enabled microphones, headphones, wireless audio devices, smart speakers, mobile devices, wearable mobile technologies, and Internet of Things devices for capturing and storing sensor data and analytics.
35.
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
A device includes a first die and a second die. The first die and the second die are stacked and form a monolithic die. A first side of the first die faces a first side of the second die. The second die comprises an electrical connection within its periphery and on a side other than the first side of the second die. The electrical connection exposes the second die to an environment outside of the monolithic die. The electrical connection is configured to facilitate electrical connection between the second die of the monolithic die and an electronic component that is external to the monolithic die.
A MEMS accelerometer package includes multiple cavities such that a change in pressure corresponding to a breach in one or more of the cavities is readily identified based on the output of a pressure-sensitive sensor such as a MEMS resonator. One or more mitigations may be initiated in response to the identification of the change in pressure.
G01P 21/00 - Essai ou étalonnage d'appareils ou de dispositifs couverts par les autres groupes de la présente sous-classe
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
G01L 19/00 - Détails ou accessoires des appareils pour la mesure de la pression permanente ou quasi permanente d'un milieu fluent dans la mesure où ces détails ou accessoires ne sont pas particuliers à des types particuliers de manomètres
A capacitive sensing charge amplifier, e.g., in a direct current (DC) feedback network, may incorporate a switching capacitor, including a first control switch and a second control switch, which receives a switching signal to charge and discharges the switching signal to a virtual ground of a sense amplifier. Noise incorporated into the output of the sense amplifier (e.g., a MEMS output signal) is filtered by a demodulation signal at a demodulator such that the period average noise at the demodulator output equals zero. The time varying nature of the switching capacitor resistance generally reshapes the system's post-demodulation noise to reduce its low frequency output noise.
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/14 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en utilisant un gyroscope
38.
TRANSVERSAL ULTRASONIC SENSING FOR CARDIOVASCULAR MONITORING
An ultrasonic sensing system including a plurality of ultrasonic transducers for placement on a human body proximate a blood vessel, a hardware controller for controlling operation of the plurality of ultrasonic transducers, and a digital processing module for processing the reflected ultrasonic signals. The plurality of ultrasonic transducers includes a first subset of ultrasonic transducers, wherein the ultrasonic transducers of the first subset are arranged linearly and a second subset of ultrasonic transducers, wherein the ultrasonic transducers of the second subset are arranged linearly, wherein the first subset of ultrasonic transducers is positioned parallel to the second subset of ultrasonic transducers at a fixed separation distance. The hardware controller configured to control transmission and receipt of reflected ultrasonic signals at the first subset of ultrasonic transducers and the second subset of ultrasonic transducers, wherein the reflected ultrasonic signals sense movement of a wall of the blood vessel.
A MEMS accelerometer package includes multiple cavities such that a change in pressure corresponding to a breach in one or more of the cavities is readily identified based on the output of a pressure-sensitive sensor such as a MEMS resonator. One or more mitigations may be initiated in response to the identification of the change in pressure.
G01P 15/12 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques par modification d'une résistance électrique
G01P 15/18 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération dans plusieurs dimensions
G01P 21/00 - Essai ou étalonnage d'appareils ou de dispositifs couverts par les autres groupes de la présente sous-classe
40.
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
The present invention relates to split electrodes for microelectromechanical system (MEMS) microphones. In one embodiment, a MEMS sensor includes a membrane, a membrane electrode formed in a portion of the membrane, and a backplate situated parallel to the membrane and separated by a gap. The backplate includes a first region of the backplate, where the first region of the backplate has first perforations of a first density, a backplate electrode is formed in a portion of the first region of the backplate, and a portion of the membrane electrode overlaps a portion of the backplate electrode in a sensing region forming a sensing capacitor, the sensing capacitor being configured to sense motion of the membrane in response to acoustic pressure. The backplate also includes a second region of the backplate having second perforations of a second density, where the second density is greater than the first density.
The present invention relates to split electrodes for microelectromechanical system (MEMS) microphones. In one embodiment, a MEMS sensor includes a membrane, a membrane electrode formed in a portion of the membrane, and a backplate situated parallel to the membrane and separated by a gap. The backplate includes a first region of the backplate, where the first region of the backplate has first perforations of a first density, a backplate electrode is formed in a portion of the first region of the backplate, and a portion of the membrane electrode overlaps a portion of the backplate electrode in a sensing region forming a sensing capacitor, the sensing capacitor being configured to sense motion of the membrane in response to acoustic pressure. The backplate also includes a second region of the backplate having second perforations of a second density, where the second density is greater than the first density.
A sensor driver providing high power supply rejection ratio is provided herein. A circuit can include a charge pump that comprises an input terminal and an output terminal, wherein the input terminal is operatively connected to a voltage supply. The charge pump further comprises circuitry that decouples an input voltage from the voltage supply from an output voltage of the charge pump and mixes defined frequency disturbances back to baseband. The circuit also includes an error amplifier configured to provide high power supply rejection ratio at baseband, wherein the output terminal of the charge pump is operatively connected to an input node of the error amplifier. Further, the circuit includes a capacitive micro-electromechanical system sensor operatively connected to an output node of the error amplifier.
Disclosed embodiments provide backpower-safe test switches, devices, systems, and methods. By maintaining high impedance on an existing communications bus integrated circuit pin, disclosed embodiments prevent backpower of integrated circuits even when the integrated circuits are powered off. In a non-limiting aspect, disclosed embodiments facilitate increased final ASIC test coverage by facilitating multiplexing analog test bus on an existing ASIC pin.
H03K 17/687 - Commutation ou ouverture de porte électronique, c.-à-d. par d'autres moyens que la fermeture et l'ouverture de contacts caractérisée par l'utilisation de composants spécifiés par l'utilisation, comme éléments actifs, de dispositifs à semi-conducteurs les dispositifs étant des transistors à effet de champ
G01R 31/28 - Test de circuits électroniques, p. ex. à l'aide d'un traceur de signaux
44.
TECHNIQUES FOR REDUCED NOISE CAPACITANCE-TO-VOLTAGE CONVERTER
A continuous time single drive capacitance-to-voltage (C2V) converter can be employed for single sensor, balanced single sensor, or differential sensor. First sensor and/or second sensor can be employed to sense a condition. A capacitive bridge can comprise a first capacitive digital-to-analog-converter (DAC) and second capacitive DAC as a differential node. First capacitive DAC can be associated with first sensor, and second capacitive DAC can be associated with a third capacitive DAC, in series with first sensor, if single sensor is implemented or the second sensor if balanced single sensor or differential sensor is implemented. Capacitive bridge can be connected to differential input of a capacitive feedback amplifier that can be a continuous time amplifier with no signal sampling and no noise folding. Capacitive feedback amplifier can comprise capacitively coupled input common mode feedback, which can remove noise from a sensor drive, and output common mode feedback.
H03M 1/08 - Compensation ou prévention continue de l'influence indésirable de paramètres physiques du bruit
G01D 5/24 - Moyens mécaniques pour le transfert de la grandeur de sortie d'un organe sensibleMoyens pour convertir la grandeur de sortie d'un organe sensible en une autre variable, lorsque la forme ou la nature de l'organe sensible n'imposent pas un moyen de conversion déterminéTransducteurs non spécialement adaptés à une variable particulière utilisant des moyens électriques ou magnétiques influençant la valeur d'un courant ou d'une tension en faisant varier la capacité
G01R 19/00 - Dispositions pour procéder aux mesures de courant ou de tension ou pour en indiquer l'existence ou le signe
G01R 19/257 - Dispositions pour procéder aux mesures de courant ou de tension ou pour en indiquer l'existence ou le signe utilisant une méthode de mesure numérique utilisant des convertisseurs analogiques/numériques du type effectuant la comparaison de différentes valeurs de référence avec la valeur de la tension ou du courant, p. ex. utilisant une méthode par approximations successives
45.
Apparatus and system for tuning the resonant frequency of a piezoelectric micromachined ultrasonic transducer
The teachings of the present disclosure enable the manufacture of one or more piezoelectric micromachined ultrasonic transducers (PMUTs) having a resonant frequency of a specific target value and/or substantially matched resonant frequencies. In accordance with the present disclosure, a flexible membrane of a PMUT is modified to impart a desired parameter profile for stiffness and/or mass to tune its resonant frequency to a target value. The desired parameter profile is achieved by locally removing or adding material to regions of one or more layers of the flexible membrane to alter its geometric dimensions and/or density. In some embodiments, material is added or removed non-uniformly across the structural layer to realize a material distribution that more strongly affects membrane stiffness than mass. In some embodiments, material having a specific residual stress is added to, and/or removed from, the membrane to define a desired modal stiffness for the membrane.
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
H10N 30/04 - Traitements afin de modifier une propriété piézo-électrique ou électrostrictive, p. ex. les caractéristiques de polarisation, de vibration ou par réglage du mode
46.
TERMINAL DEVICE, MAGNETIC ANCHOR SYSTEM, AND POSITION DETERMINATION METHOD
A terminal device that can perform positioning with high accuracy and at a low cost is provided. [Solution] A terminal device that is held by a terminal holding object includes a magnetic detection unit configured to detect magnetic field produced by a magnetic anchor made of magnet; and a position information acquisition unit configured to acquire position information that corresponds to magnetic information detected by the magnetic detection unit by referring to correspondence between magnetic information and position information prepared in advance.
G01C 21/16 - NavigationInstruments de navigation non prévus dans les groupes en utilisant des mesures de la vitesse ou de l'accélération exécutées à bord de l'objet navigantNavigation à l'estime en intégrant l'accélération ou la vitesse, c.-à-d. navigation par inertie
G01C 21/04 - NavigationInstruments de navigation non prévus dans les groupes par des moyens terrestres
47.
ASSET MANAGEMENT SYSTEM AND ASSET MANAGEMENT METHOD
[Object] An asset management system that can perform asset management with high accuracy is provided. [Solution] An asset management system that manages an asset to which a tag capable of identifying individual information is attached includes a terminal unit that is held by a terminal holding object, in which the terminal unit includes a tag communication unit that communicates with the tag to read the individual information, and a position information acquisition unit that acquires position information, the position information acquisition unit starts to acquire the position information as information on the asset to which the tag is attached when a first condition is satisfied, and ends acquisition of the position information when a second condition is satisfied, the first condition is at least one of a condition that communication between the tag communication unit and the tag is established and the distance between the tag communication unit and the tag is equal to or less than a first threshold value, and the second condition is at least one of a condition that the wireless communication is not established and the distance between the tag communication unit and the tag is more than the second threshold value.
G06Q 10/06 - Ressources, gestion de tâches, des ressources humaines ou de projetsPlanification d’entreprise ou d’organisationModélisation d’entreprise ou d’organisation
G06Q 10/08 - Logistique, p. ex. entreposage, chargement ou distributionGestion d’inventaires ou de stocks
G06Q 10/087 - Gestion d’inventaires ou de stocks, p. ex. exécution des commandes, approvisionnement ou régularisation par rapport aux commandes
G06Q 50/28 - Logistique, p.ex. stockage, chargement, distribution ou expédition
48.
MICROELECTROMECHANICAL ACOUSTIC SENSOR WITH MEMBRANE ETCH RELEASE STRUCTURES AND METHOD OF FABRICATION
Low-cost, robust, and high performance microelectromechanical systems (MEMS) acoustic sensors are described. Described MEMS acoustic sensors can comprise a set of etch release structures in the acoustic sensor membrane that facilitates rapid and/or uniform etch release of the acoustic sensor membrane. In addition, MEMS acoustic sensors can comprise a set of membrane position control structures of the acoustic sensor membrane that can reduce the bending stress of the acoustic sensor membrane. MEMS acoustic sensors can further comprise a three layer acoustic sensor membrane that provides increased robustness. Further design flexibility and improvements are described that provide increased robustness and/or cost savings, and a low cost fabrication process for MEMS acoustic sensors is provided.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Scientific, research, navigation, surveying, photographic, cinematographic, audiovisual, optical, weighing, measuring, signalling, detecting, testing, inspecting, life-saving and teaching apparatus and instruments; Apparatus and instruments for conducting, switching, transforming, accumulating, regulating or controlling the distribution or use of electricity; Apparatus and instruments for recording, transmitting, reproducing or processing sound, images or data; Recorded and downloadable media, computer software, blank digital or analogue recording and storage media; Mechanisms for coin-operated apparatus; Cash registers, calculating devices; Computers and computer peripheral devices; Diving suits, divers' masks, ear plugs for divers, nose clips for divers and swimmers, gloves for divers, breathing apparatus for underwater swimming; Fire-extinguishing apparatus; Inertial measurement unit; motion sensors; accelerometers; gyroscopes; magnetometers; pressure sensors; temperature sensors; ultrasonic sensors for measuring acceleration, angle of rotation, pressure, temperature, and distance ranges, all for use in automotive systems, autonomous car systems, advanced driver assisted systems, internet of things applications, and internet of things software development systems; measuring equipment (sensors) comprising an inertial measurement unit, magnetometer, pressure sensor, temperature sensor, ultrasonic sensor, passive components, and high-precision algorithms, all for use in sensor fusion for automotive systems, autonomous car systems, advanced driver assisted systems, internet of things applications, and internet of things software development systems; sensor development kits, namely, kits comprised primarily of computer hardware and downloadable software for use in developing and operating sensors and electronic devices for detecting, transmitting, recognizing, analyzing, and tracking motion, movement, positions, distances, obstacles, ultrasonic signals, and ultrasonic range sensing; downloadable computer software for integrating drivers for multi-sensor modules for automotive systems, autonomous car systems, advanced driver assisted systems, internet of things software development systems, and internet of things applications..
50.
FIXED-FIXED MEMBRANE FOR MICROELECTROMECHANICAL SYSTEM MICROPHONE
The present invention relates to a fixed-fixed membrane for a microelectromechanical system (MEMS) microphone. In one embodiment, a MEMS acoustic sensor includes a substrate; a membrane situated parallel to the substrate; and at least one vent formed into the membrane, wherein the at least one vent is a curved opening in the membrane, and wherein the at least one vent is disposed substantially along a length of the membrane.
H04R 7/22 - Dispositions pour monter ou pour tendre des membranes ou des cônes à la périphérie pour fixer le bord de la membrane ou du cône sur son siège
B81B 3/00 - Dispositifs comportant des éléments flexibles ou déformables, p. ex. comportant des membranes ou des lamelles élastiques
H04R 7/10 - Membranes planes comportant plusieurs sections ou couches comportant des couches superposées en contact
51.
Fixed-fixed membrane for microelectromechanical system microphone
a MEMS acoustic sensor includes a substrate; a membrane situated parallel to the substrate; and at least one vent formed into the membrane, wherein the at least one vent is a curved opening in the membrane, and wherein the at least one vent is disposed substantially along a length of the membrane.
A microelectromechanical system device is described. The microelectromechanical system device can comprise: a proof mass coupled to an anchor via a spring, wherein the proof mass moves in response to an imposition of an external load to the proof mass, and an overtravel stop comprising a first portion and a second portion.
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
Acoustic and other activity detection signaling is provided herein. Operations of a method can include determining a micro-electromechanical system (MEMS) device is no longer in an initialization state and receiving a first signal that instructs the MEMS device to perform event activity detection. The method can also include receiving one or more event signals and determining that an event signal of one or more event signals satisfies a defined event characteristic. The method can also include outputting a second signal that comprises information indicative of a detection of event activity at the MEMS device being more than the defined event characteristic.
G10L 25/18 - Techniques d'analyse de la parole ou de la voix qui ne se limitent pas à un seul des groupes caractérisées par le type de paramètres extraits les paramètres extraits étant l’information spectrale de chaque sous-bande
G10L 25/51 - Techniques d'analyse de la parole ou de la voix qui ne se limitent pas à un seul des groupes spécialement adaptées pour un usage particulier pour comparaison ou différentiation
Acoustic and other activity detection signaling is provided herein. Operations of a method can include determining a micro-electromechanical system (MEMS) device is no longer in an initialization state and receiving a first signal that instructs the MEMS device to perform event activity detection. The method can also include receiving one or more event signals and determining that an event signal of one or more event signals satisfies a defined event characteristic. The method can also include outputting a second signal that comprises information indicative of a detection of event activity at the MEMS device being more than the defined event characteristic.
APPLYING A POSITIVE FEEDBACK VOLTAGE TO AN ELECTROMECHANICAL SENSOR UTILIZING A VOLTAGE-TO-VOLTAGE CONVERTER TO FACILITATE A REDUCTION OF CHARGE FLOW IN SUCH SENSOR REPRESENTING SPRING SOFTENING
Reducing a spring softening effect on a capacitive sense element of an electromechanical sensor is presented herein. A system, such as a microphone or an accelerometer, comprises an electromechanical sensor and a voltage-to-voltage converter component. The electromechanical sensor comprises a capacitive sense element and a bias voltage component that applies a bias voltage to a sense electrode of the capacitive sense element. The voltage-to-voltage converter component couples a positive feedback voltage to the sense electrode to maintain a constant charge at the sense electrode to facilitate a reduction of charge flow in the electromechanical sensor representing a spring softening effect on the capacitive sense element. In an example, the spring softening effect on the sense element alters a resonant frequency of the sense element and a gain of the sense element. In another example, the charge flow corresponds to a parasitic capacitance that is electrically coupled to the sense electrode.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
56.
Photoacoustic gas sensors with improved signal-to-noise ratio
A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.
G01N 21/17 - Systèmes dans lesquels la lumière incidente est modifiée suivant les propriétés du matériau examiné
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
An ultrasonic transducer device comprises a piezoelectric micromachined ultrasonic transducer (PMUT), a transmitter with first and second differential outputs, and a controller. The PMUT includes a membrane layer. A bottom electrode layer, comprising a first bottom electrode and a second bottom electrode, is disposed above the membrane layer. The piezoelectric layer is disposed above the bottom electrode layer. The top electrode layer is disposed above the piezoelectric layer and comprises a segmented center electrode disposed above a center of the membrane layer and a segmented outer electrode spaced apart from the segmented center electrode. The controller, responsive to the PMUT being placed in a transmit mode, is configured to couple the first and second segments of the bottom electrode layer with ground, couple the first output of the transmitter with the segments of the segmented center electrode, and couple the second output with the segments of the segmented outer electrode.
A61B 8/00 - Diagnostic utilisant des ondes ultrasonores, sonores ou infrasonores
B06B 1/06 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique fonctionnant par effet piézo-électrique ou par électrostriction
A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.
G01N 29/22 - Recherche ou analyse des matériaux par l'emploi d'ondes ultrasonores, sonores ou infrasonoresVisualisation de l'intérieur d'objets par transmission d'ondes ultrasonores ou sonores à travers l'objet Détails
A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
H10N 30/057 - Fabrication de dispositifs piézo-électriques ou électrostrictifs multicouches ou de leurs parties constitutives, p. ex. en empilant des corps piézo-électriques et des électrodes par empilement de corps massifs piézo-électriques ou électrostrictifs et d’électrodes
H10N 30/87 - Électrodes ou interconnexions, p. ex. connexions électriques ou bornes
Utilization of microphone ultrasonic response is described. A system, comprising: a microelectromechanical system (MEMS) microphone device configured to capture signal data representing an ultrasonic signal and an audio-band signal simultaneously, and a processing circuitry configured to adjust a configuration parameter associated with the MEMS microphone device based on the ultrasonic signal.
Utilization of microphone ultrasonic response is described. A system, comprising: a microelectromechanical system (MEMS) microphone device configured to capture signal data representing an ultrasonic signal and an audio-band signal simultaneously, and a processing circuitry configured to adjust a configuration parameter associated with the MEMS microphone device based on the ultrasonic signal.
A system, comprising: a sigma-delta modulator using an integrator of a cascade-of-integrator feedback topology to perform operations is disclosed. The operations can comprise in response to receiving a gain value, applying the gain value to a group of feed-forward coefficients, determining a change in the gain value, and adjusting, during a clock cycle of a defined time period, a plurality of state variables of the sigma-delta modulator by multiplying each of the state variables by the scale factor that is a ratio of the gain value after determining the change in the gain value the gain value before determining the change in the gain value.
An example embodiment includes a head worn electronic device comprising a transceiver for communicating with a host device, an accelerometer having a plurality of axes for detecting three-dimensional forces applied to the head worn electronic device, and a processor. The processor is configured to receive a three-dimensional vibration vector from the accelerometer caused by a voice of a user while the head worn electronic device is positioned in a user's ear, process the three-dimensional vibration vector to determine a voice activity detection axis that correlates with vibrations caused by the voice of the user, perform processing of data from the voice activity detection axis to detect voice activity of the user, and send an instruction to the host device via the transceiver to control the host device based on the voice activity detection.
A MEMS sensor includes a through hole to allow communication with an external environment, such as to send or receive acoustic signals or to be exposed to the ambient environment. In addition to the information that is being measured, light energy may also enter the environment of the sensor via the through hole, causing short-term or long-term effects on measurements or system components. A light mitigating structure is formed on or attached to a lid of the MEMS die to absorb or selectively reflect the received light in a manner that limits effects on the measurements or interest and system components.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Downloadable computer software for integrating drivers for multi-sensor modules for internet of things software development systems and internet of things applications; measuring equipment sensors comprising inertial measurement unit, magnetometer, pressure sensor, microphone, temperature sensor, ultrasonic sensor for measuring acceleration, angle of rotation, pressure, temperature, sound, and distance ranges for use in internet of things applications and internet of things software development systems; measuring equipment sensors comprising an inertial measurement unit, magnetometer, pressure sensor, temperature sensor, ultrasonic sensor, microphone, passive components, and high-precision algorithms for use in sensor fusion and internet of things applications, industrial, drone, and automotive applications, and internet of things software development systems..
A device comprises a processor communicatively coupled with an ultrasonic sensor which is configured to repeatedly emit ultrasonic pulses during transmit periods which are interspersed with receive periods. Returned ultrasonic signals corresponding to the emitted ultrasonic pulses are received by the ultrasonic sensor during the receive periods. The processor is configured to direct the ultrasonic sensor to listen, during a listening window, for a potentially interfering ultrasonic signal from a second ultrasonic sensor. The listening window is prior to a transmit period of the transmit periods. In response to detecting the potentially interfering ultrasonic signal during the listening window, the processor is configured to adjust operation of the ultrasonic sensor to avoid an ultrasonic collision with the second ultrasonic sensor to facilitate coexistence of the ultrasonic sensor and the second ultrasonic sensor in an operating environment shared by the ultrasonic sensor and the second ultrasonic sensor.
A device comprises a processor coupled with an ultrasonic transducer which is configured to repeatedly emit ultrasonic pulses during transmit periods which are interspersed with listening windows. Each sequential pair of the transmit periods is separated by a single listening window of the listening windows. During a fixed portion of a listening window of the listening windows the ultrasonic transducer is configured to receive returned signals corresponding to an emitted ultrasonic pulse of the ultrasonic pulses which was transmitted during a transmit period of the transmit periods that immediately preceded the listening window. The processor randomizes an overall length of each listening window of the listening windows. The processor directs filtering of returned signals received during a plurality of the randomized listening windows to achieve filtered returned signals. The processor detects, using the filtered returned signals, a moving object in a field of view of the ultrasonic transducer.
A device comprises a processor coupled with an ultrasonic transducer which is configured to repeatedly emit ultrasonic pulses during transmit periods which are interspersed with listening windows. Each sequential pair of the transmit periods is separated by a single listening window of the listening windows. During a fixed portion of a listening window of the listening windows the ultrasonic transducer is configured to receive returned signals corresponding to an emitted ultrasonic pulse of the ultrasonic pulses which was transmitted during a transmit period of the transmit periods that immediately preceded the listening window. The processor randomizes an overall length of each listening window of the listening windows. The processor directs filtering of returned signals received during a plurality of the randomized listening windows to achieve filtered returned signals. The processor detects, using the filtered returned signals, a moving object in a field of view of the ultrasonic transducer.
09 - Appareils et instruments scientifiques et électriques
Produits et services
Sensors, not for medical use, being parts of measuring equipment and comprising an inertial measurement unit, magnetometer, pressure sensor, microphone, temperature sensor, ultrasonic sensor for measuring acceleration, angle of rotation, sound, and distance ranges, for use in sensor fusion, Internet of Things applications, industrial applications and related software development systems, drone applications and related software development systems, automotive applications and related software development systems; Ultrasonic time-of-flight sensors being parts of measuring equipment for measuring distances, determining the presence or absence of obstacles, measuring sound waves, detecting ultrasonic signals, and measuring ultrasonic range; surface acoustic wave sensors; microphones; electronic sensors for detecting sound; sensors for measuring sound waves; sensors for the determination of location, positions, movement, change in pressure, activity monitoring, and change in elevation of computers, laptops, tablets, smartphones, portable electronic devices, drones, smart watches, electronic tracking devices, and wearable electronic devices; fingerprint scanners; ultrasonic sensors; biometric identification apparatus; touchscreen sensors for interpreting fingerprints, image enhancement, fingerprint matching, user identification and user authentication; kits for making motion sensors comprised of downloadable software and electronic sensors for use in industrial applications; sensor development kits, namely, kits for making motion sensors comprised of computer hardware and downloadable software for developing and operating electronic devices for detecting, transmitting, recognizing, analyzing, and tracking motion, movement, positions, distances, the presence or absence of obstacles, sounds, change in elevation, ultrasonic signals, and barometric pressure; downloadable and recorded software for use with sensors for monitoring position, movement, vibration, and angle of incline, and for measuring distances, determining environmental conditions, all for use in Internet of Things applications; downloadable software for use with sensor devices and sensors for detecting sound, recognizing sound, analyzing sound, monitoring sound, and controlling sound; downloadable software for use with sensor enabled microphones, headsets, wireless audio devices, smart speakers, mobile devices, wearable mobile technologies for capturing and storing sensor data and analytics; downloadable software for interpreting fingerprints; hardware for interpreting fingerprints, image enhancement, fingerprint matching, user identification, and user authentication, namely, fingerprint scanners; downloadable software for use with sensor-enabled microphones, headphones, wireless audio devices, smart speakers, mobile devices, wearable mobile technologies, and Internet of Things devices for capturing and storing sensor data and analytics
70.
LOW NOISE READOUT INTERFACE FOR CAPACITIVE SENSORS WITH NEGATIVE CAPACITANCE
Disclosed embodiments provide a self-contained topology that enables a significant noise reduction of capacitive sensor readout interfaces. For example, various embodiments can provide low noise capacitive sensor readout interfaces or analog front ends having a main buffer amplifier in a bootstrap configuration, wherein a bootstrap loop configuration comprises a negative capacitance coupled to an input of the main buffer amplifier with a negative impedance converter.
G01R 27/26 - Mesure de l'inductance ou de la capacitanceMesure du facteur de qualité, p. ex. en utilisant la méthode par résonanceMesure de facteur de pertesMesure des constantes diélectriques
09 - Appareils et instruments scientifiques et électriques
Produits et services
Inertial measurement unit; motion sensors; accelerometers;
gyroscopes; magnetometers; pressure sensors; temperature
sensors; ultrasonic sensors for measuring acceleration,
angle of rotation, pressure, temperature, and distance
ranges, all for use in automotive systems, autonomous car
systems, advanced driver assisted systems, internet of
things applications, and internet of things software
development systems; measuring equipment (sensors)
comprising an inertial measurement unit, magnetometer,
pressure sensor, temperature sensor, ultrasonic sensor,
passive components, and high-precision algorithms, all for
use in sensor fusion for automotive systems, autonomous car
systems, advanced driver assisted systems, internet of
things applications, and internet of things software
development systems; sensor development kits, namely, kits
comprised primarily of computer hardware and downloadable
software for use in developing and operating sensors and
electronic devices for detecting, transmitting, recognizing,
analyzing, and tracking motion, movement, positions,
distances, obstacles, ultrasonic signals, and ultrasonic
range sensing; downloadable computer software for
integrating drivers for multi-sensor modules for automotive
systems, autonomous car systems, advanced driver assisted
systems, internet of things software development systems,
and internet of things applications.
72.
Parameterized Register Programming Protocol (RPP) To Save Layout Routing Area
A parameterized register interface of an integrated circuit and methods of register programming. An integrated circuit includes a digital controller, at least one client comprising at least one programmable register and a parameterized bus coupled to the digital controller and the client. The digital controller is configured to: transfer, via the parameterized bus, address data and/or register data between the digital controller and the client according to one or more interface signals conveyed over the parameterized bus; generate a transaction command comprising at least one transaction specific to the programmable register of the client, the transaction command generated according to a predetermined register programming protocol; and transfer, via the parameterized bus, the transaction command together with at least one predetermined combination of the interface signals to the client. The programmable register is configured to perform the transaction in accordance with the transaction command.
G11C 7/10 - Dispositions d'interface d'entrée/sortie [E/S, I/O] de données, p. ex. circuits de commande E/S de données, mémoires tampon de données E/S
G11C 7/22 - Circuits de synchronisation ou d'horloge pour la lecture-écriture [R-W]Générateurs ou gestion de signaux de commande pour la lecture-écriture [R-W]
G11C 7/24 - Circuits de protection ou de sécurité pour cellules de mémoire, p. ex. dispositions pour empêcher la lecture ou l'écriture par inadvertanceCellules d'étatCellules de test
73.
Incremental analog to digital converter incorporating noise shaping and residual error quantization
The present invention relates to an incremental analog to digital converter incorporating noise shaping and residual error quantization. In one embodiment, a circuit includes an incremental analog to digital converter, comprising a loop filter that filters an analog input signal in response to receiving a reset signal, resulting in a filtered analog input signal, and a successive approximation register (SAR) quantizer, coupled with the filtered analog input signal, that converts the filtered analog input signal to an intermediate digitized output of a first resolution based on a reference voltage, wherein the SAR quantizer comprises a feedback loop that shapes quantization noise generated by the SAR quantizer as a result of converting the filtered analog input signal; and a digital filter, coupled with the intermediate digitized output, that generates a digitized output signal of a second resolution, greater than the first resolution, by digitally filtering the intermediate digitized output.
H03M 1/46 - Valeur analogique comparée à des valeurs de référence uniquement séquentiellement, p. ex. du type à approximations successives avec convertisseur numérique/analogique pour fournir des valeurs de référence au convertisseur
74.
ANCHOR DESIGN WITH REJECTION OF EXTERNAL SHEAR FORCE
A MEMS sensor includes at least one anchor that extends into a MEMS layer and a proof mass suspended from the at least one anchor. Each anchor is coupled to the proof mass via two compliant springs that are oriented perpendicular to each other and attached to a respective anchor. The compliant springs absorb non-measured external forces such as shear forces that are applied to the sensor packaging, preventing these forces from modifying the relative location and operation of the proof mass.
Acoustic activity detection is provided herein. Operations of a method can include receiving an acoustic signal at a micro-electromechanical system (MEMS) microphone. Based on portions of the acoustic signal being determined to exceed a threshold signal level, output pulses are generated. Further, the method can include extracting information representative of a frequency of the acoustic signal based on respective spacing between rising edges of the output pulses.
A dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
G01C 19/5747 - Details de structure ou topologie les dispositifs ayant deux masses de détection en mouvement en opposition de phase chaque masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
G01C 19/5762 - Details de structure ou topologie les dispositifs ayant une seule masse de détection la masse de détection étant reliée à une masse d'entraînement, p. ex. cadres d'entraînement
09 - Appareils et instruments scientifiques et électriques
Produits et services
Downloadable computer software for integrating drivers for
multi-sensor modules for internet of things software
development systems and internet of things applications;
measuring equipment sensors comprising inertial measurement
unit, magnetometer, pressure sensor, microphone, temperature
sensor, ultrasonic sensor for measuring acceleration, angle
of rotation, pressure, temperature, sound, and distance
ranges for use in internet of things applications and
internet of things software development systems; measuring
equipment sensors comprising an inertial measurement unit,
magnetometer, pressure sensor, temperature sensor,
ultrasonic sensor, microphone, passive components, and
high-precision algorithms for use in sensor fusion and
internet of things applications, industrial, drone, and
automotive applications, and internet of things software
development systems.
78.
PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME
A pressure sensor includes a first electrode, a plurality of cavities, and a second electrode. The second electrode is disposed opposite the first electrode through the plurality of cavities. The second electrode includes a flat structure spanning two adjacent cavities of the plurality of cavities.
G01L 9/12 - Mesure de la pression permanente, ou quasi permanente d’un fluide ou d’un matériau solide fluent par des éléments électriques ou magnétiques sensibles à la pressionTransmission ou indication par des moyens électriques ou magnétiques du déplacement des éléments mécaniques sensibles à la pression, utilisés pour mesurer la pression permanente ou quasi permanente d’un fluide ou d’un matériau solide fluent en faisant usage des variations de la capacité
B81C 1/00 - Fabrication ou traitement de dispositifs ou de systèmes dans ou sur un substrat
09 - Appareils et instruments scientifiques et électriques
Produits et services
Motion sensors; industrial sensors for improving efficiency and monitoring conditions in industrial applications; sensor evaluation kits for motion measurement comprised primarily of electronic sensors and software for use in industrial applications; sensors for determining position, movement, vibration, inclination, and distances; downloadable and recorded software for use with sensors and for monitoring position, movement, vibration, inclination, distances, environmental conditions, and for Internet of Things applications..
80.
MEMS design with shear force rejection for reduced offset
A MEMS sensor includes a central anchoring region that maintains the relative position of an attached proof mass relative to sense electrodes in the presence of undesired forces and stresses. The central anchoring region includes one or more first anchors that rigidly couple to a cover substrate and a base substrate. One or more second anchors are rigidly coupled to only the cover substrate and are connected to the one or more first anchors within the MEMS layer via an isolation spring. The proof mass in turn is connected to the one or more second anchors via one or more compliant springs.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
81.
Round robin sensor device for processing sensor data
A round robin sensor device for processing sensor data is provided herein. The sensor device includes a multiplexer stage configured to sequentially select sensor outputs from one or more sensors continuously. Continuously and sequentially selecting sensor outputs results in a stream of selected sensor outputs. The sensor device also includes a charge-to-voltage converter operatively coupled to the multiplexer stage and configured to convert a charge from a first sensor of the one or more sensors to a voltage. Further, the sensor device includes a resettable integrator operatively coupled to the charge-to-voltage converter and configured to demodulate and integrate the voltage, resulting in an integrated voltage. Also included in the sensor device is an analog-to-digital converter operatively coupled to the resettable integrator and configured to digitize the integrated voltage to a digital code.
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
H03M 1/38 - Valeur analogique comparée à des valeurs de référence uniquement séquentiellement, p. ex. du type à approximations successives
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
09 - Appareils et instruments scientifiques et électriques
Produits et services
Barometric pressure measurement sensors; sensors and
waterproof sensors for the determination of location,
positions, movement, change in pressure, activity
monitoring, and change in elevation, for use in computers,
laptops, tablets, smartphones, portable electronic devices,
drone, smart watches, electronic tracking devices, wearable
electronic devices, and wireless connected devices; software
for use with computers, laptops, tablets, smartphones,
portable electronic devices, smart watches, electronic
tracking devices, wearable electronic devices, and wireless
connected devices, and electronic devices embedded with
sensors; software for use in tracking, locating, activity
monitoring, measuring change in elevation; software for
operating and managing mobile phones, computers, tablet
computers, portable electronic devices, smart watches,
fitness devices, electronic tracking devices, wireless
connected devices, wearable activity trackers, drones, and
in the Internet of Things (IoT); software for use with, but
not limited to, sensor devices, development kit; sensor
development kits, namely, kits comprised primarily of
computer hardware and downloadable software for use in
developing and operating sensors and electronic devices for
detecting, transmitting, recognizing, analyzing, and
tracking motion, change in elevation, movement, positions,
and barometric pressure.
83.
Motion sensor with sigma-delta analog-to-digital converter having resistive continuous-time digital-to-analog converter feedback for improved bias instability
A motion sensor with sigma-delta analog-to-digital converter (ADC) having improved bias instability is presented herein. Differential outputs of a differential amplifier of the sigma-delta ADC are electrically coupled, via respective capacitances, to differential inputs of the differential amplifier. To minimize bias instability corresponding to flicker noise that has been injected into the differential inputs, the differential inputs are electrically coupled, via respective pairs of electronic switches, to feedback resistances based on a pair of switch control signals. In this regard, a first feedback resistance of the feedback resistances is electrically coupled to a first defined voltage, and a second feedback resistance of the feedback resistances is electrically coupled to a second defined reference voltage. The differential outputs are electrically coupled to differential inputs of a differential comparator of the sigma-delta ADC, and complementary outputs of the differential comparator comprise the pair of switch control signals.
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
G01C 19/5776 - Traitement de signal non spécifique à l'un des dispositifs couverts par les groupes
Exemplary multipath digital microphones described herein can comprise exemplary embodiments of automatic gain control and multipath digital audio signal digital signal processing chains, which allow low power and die size to be achieved as described herein, while still providing a high DR digital microphone systems. Further non-limiting embodiments can facilitate switching between multipath digital audio signal digital signal processing chains while minimizing audible artifacts associated with either the change in the gain automatic gain control amplifiers switching between multipath digital audio signal digital signal processing chains.
A microelectromechanical system device is described. The microelectromechanical system device can comprise: a proof mass coupled to an anchor via a spring, wherein the proof mass moves in response to an imposition of an external load to the proof mass, and an overtravel stop comprising a first portion and a second portion.
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
A method including fusion bonding a handle wafer to a first side of a device wafer. The method further includes depositing a hardmask on a second side of the device wafer, wherein the second side is planar. An etch stop layer is deposited over the hardmask and an exposed portion of the second side of the device wafer. A dielectric layer is formed over the etch stop layer. A via is formed within the dielectric layer. The via is filled with conductive material. A eutectic bond layer is formed over the conductive material. Portions of the dielectric layer uncovered by the eutectic bond layer is etched to expose the etch stop layer. The exposed portions of the etch stop layer is etched. A micro-electro-mechanical system (MEMS) device pattern is etched into the device wafer.
Embodiments for constant charge or capacitance for capacitive micro-electro-mechanical system (MEMS) sensors are presented herein. A MEMS device comprises a sense element circuit comprising a bias resistance, a charge-pump, and a capacitive sense element comprising an electrode and a sense capacitance. The charge-pump generates, at a bias resistor electrically coupled to the electrode, a bias voltage that is inversely proportional to a capacitance value comprising a value of the sense capacitance to facilitate maintenance of a nominally constant charge on the electrode. A sensing circuit comprises an alternating current (AC) signal source that generates an AC signal at a defined frequency; and generates, based on the AC signal, an AC test voltage at a test capacitance that is electrically coupled to the electrode. The sense element circuit generates, based on the AC test voltage at the defined frequency, an output signal representing the value of the sense capacitance.
Systems and methods are disclosed for capturing stabilized images. Motion of the mobile device is determined so that the relative position of the lens and image sensor may be adjusted to compensate for unintended motion. The relative position of the lens and image sensor may be periodically reset in response to a synchronization signal in between capturing images.
H04N 23/80 - Chaînes de traitement de la caméraLeurs composants
H04N 23/68 - Commande des caméras ou des modules de caméras pour une prise de vue stable de la scène, p. ex. en compensant les vibrations du boîtier de l'appareil photo
H04N 23/81 - Chaînes de traitement de la caméraLeurs composants pour supprimer ou minimiser les perturbations lors de la génération de signaux d'image
G01N 27/18 - Recherche ou analyse des matériaux par l'emploi de moyens électriques, électrochimiques ou magnétiques en recherchant l'impédance en recherchant la résistance d'un corps chauffé électriquement dépendant de variations de température produite par des variations de la conductivité thermique d'un matériau de l'espace environnant à tester
G01K 7/22 - Mesure de la température basée sur l'utilisation d'éléments électriques ou magnétiques directement sensibles à la chaleur utilisant des éléments résistifs l'élément étant une résistance non linéaire, p. ex. une thermistance
G01N 33/00 - Recherche ou analyse des matériaux par des méthodes spécifiques non couvertes par les groupes
H05B 3/20 - Éléments chauffants ayant une surface s'étendant essentiellement dans deux dimensions, p. ex. plaques chauffantes
90.
SYSTEMS AND METHODS FOR CAPTURING STABILIZED IMAGES
Systems and methods are disclosed for capturing stabilized images. Motion of the mobile device is determined so that the relative position of the lens and image sensor may be adjusted to compensate for unintended motion. The relative position of the lens and image sensor may be periodically reset in response to a synchronization signal in between capturing images.
H04N 23/68 - Commande des caméras ou des modules de caméras pour une prise de vue stable de la scène, p. ex. en compensant les vibrations du boîtier de l'appareil photo
91.
Constant charge or capacitance for capacitive micro-electrical-mechanical system sensors
Embodiments for constant charge or capacitance for capacitive micro-electro-mechanical system (MEMS) sensors are presented herein. A MEMS device comprises a sense element circuit comprising a bias resistance, a charge-pump, and a capacitive sense element comprising an electrode and a sense capacitance. The charge-pump generates, at a bias resistor electrically coupled to the electrode, a bias voltage that is inversely proportional to a capacitance value comprising a value of the sense capacitance to facilitate maintenance of a nominally constant charge on the electrode. A sensing circuit comprises an alternating current (AC) signal source that generates an AC signal at a defined frequency; and generates, based on the AC signal, an AC test voltage at a test capacitance that is electrically coupled to the electrode. The sense element circuit generates, based on the AC test voltage at the defined frequency, an output signal representing the value of the sense capacitance.
B81B 7/02 - Systèmes à microstructure comportant des dispositifs électriques ou optiques distincts dont la fonction a une importance particulière, p. ex. systèmes micro-électromécaniques [SMEM, MEMS]
H02M 3/07 - Transformation d'une puissance d'entrée en courant continu en une puissance de sortie en courant continu sans transformation intermédiaire en courant alternatif par convertisseurs statiques utilisant des résistances ou des capacités, p. ex. diviseur de tension utilisant des capacités chargées et déchargées alternativement par des dispositifs à semi-conducteurs avec électrode de commande
92.
Microelectromechanical system microphone array capsule
The present invention relates to a microelectromechanical system (MEMS) microphone array capsule. In one embodiment, a MEMS microphone includes a MEMS microphone die; an acoustic sensor array formed into the MEMS microphone die, the acoustic sensor array comprising a plurality of MEMS acoustic sensor elements, wherein respective ones of the plurality of MEMS acoustic sensor elements are tuned to different resonant frequencies; and an interconnect that electrically couples the acoustic sensor array to an impedance converter circuit.
An inertial sensor such as a MEMS accelerometer or gyroscope has a proof mass that is driven by a self-test signal, with the response of the proof mass to the self-test signal being used to determine whether the sensor is within specification. The self-test signal is provided as a non-periodic self-test pattern that does not correlate with noise such as environmental vibrations that are also experienced by the proof mass during the self-test procedure. The sense output signal corresponding to the proof mass is correlated with the non-periodic self-test signal, such that an output correlation value corresponds only to the proof mass response to the applied self-test signal.
G01C 19/5776 - Traitement de signal non spécifique à l'un des dispositifs couverts par les groupes
G01C 25/00 - Fabrication, étalonnage, nettoyage ou réparation des instruments ou des dispositifs mentionnés dans les autres groupes de la présente sous-classe
G01P 21/00 - Essai ou étalonnage d'appareils ou de dispositifs couverts par les autres groupes de la présente sous-classe
An inertial sensor such as a MEMS accelerometer or gyroscope has a proof mass that is driven by a self-test signal, with the response of the proof mass to the self-test signal being used to determine whether the sensor is within specification. The self-test signal is provided as a non-periodic self-test pattern that does not correlate with noise such as environmental vibrations that are also experienced by the proof mass during the self-test procedure. The sense output signal corresponding to the proof mass is correlated with the non-periodic self-test signal, such that an output correlation value corresponds only to the proof mass response to the applied self-test signal.
B81B 3/00 - Dispositifs comportant des éléments flexibles ou déformables, p. ex. comportant des membranes ou des lamelles élastiques
G01P 15/08 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques
95.
HW programmable signal path event-based DSP for sensor mixed signal devices
A hardware-programmable digital signal path component for processing events from sensor mixed signal devices. A system includes a mixed signal component and a reconfigurable signal path component. The mixed signal component includes a group of sensor devices and generates one or more events from among the group of sensor devices. The signal path component receives the event(s), and includes a control unit component and a digital signal processor (DSP) component. The control unit component includes a programmable function enable mechanism, and distributes the received event(s) in combination with one or more functions among a set of predefined functions enabled by the programmable function enable mechanism. The DSP component is configured to perform one or more operations associated with the distributed event(s) in accordance with the enabled function(s).
G01C 19/5656 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des barres ou des poutres vibrantes les dispositifs comportant une structure micromécanique
G01C 19/5776 - Traitement de signal non spécifique à l'un des dispositifs couverts par les groupes
G01C 25/00 - Fabrication, étalonnage, nettoyage ou réparation des instruments ou des dispositifs mentionnés dans les autres groupes de la présente sous-classe
97.
Ultrasonic cliff detection and depth estimation using tilted sensors
A robotic cleaning appliance includes a housing to which is coupled a surface treatment item and a sensor assembly with first and second transducers and an acoustic interface. The first sonic transducer transmits sonic signals through an acoustic interface and out of a first acoustic opening toward a surface beneath the robotic cleaning appliance. The sonic signals reflect from the surface as corresponding returned signals received by the second sonic transducer via a second acoustic opening port of the acoustic interface. A first annular ring is defined around the first acoustic opening port and a second annular rings is defined around the second acoustic opening port. The annular ring attenuate direct path echoes between the acoustic opening ports. The first and second acoustic opening ports are coupled the first and sonic transducers, respectively, via first and second horns; and the horns are tilted from orthogonal with the surface.
B06B 1/02 - Procédés ou appareils pour produire des vibrations mécaniques de fréquence infrasonore, sonore ou ultrasonore utilisant l'énergie électrique
G01S 15/931 - Systèmes sonar, spécialement adaptés à des applications spécifiques pour prévenir les collisions de véhicules terrestres
A robotic cleaning appliance includes a housing to which is coupled a surface treatment item and a sensor assembly with first and second transducers and an acoustic interface. The first sonic transducer transmits sonic signals through an acoustic interface and out of a first acoustic opening toward a surface beneath the robotic cleaning appliance. The sonic signals reflect from the surface as corresponding returned signals received by the second sonic transducer via a second acoustic opening port of the acoustic interface. A first plurality of annular rings is defined in the external surface around the first acoustic opening port and a second plurality of annular rings is defined in the external surface around the second acoustic opening port. The pluralities of annular rings attenuate direct path echoes from a subset of the transmitted sonic signals which attempt to travel across the external surface to the second acoustic opening port.
A modified version of a MEMS self-test procedure is presented that can be used to detect the amplitude and frequency of an external vibration from an ambient environment. The method implements processing circuitry that correlates an output sense signal, s(t), with a plurality of periodic signal portions and a plurality of shifted periodic signal portions to generate a plurality of correlation values. A frequency associated with the external vibration is determined based on the plurality of correlation values.
G01P 15/125 - Mesure de l'accélérationMesure de la décélérationMesure des chocs, c.-à-d. d'une variation brusque de l'accélération en ayant recours aux forces d'inertie avec conversion en valeurs électriques ou magnétiques au moyen de capteurs à capacité
G01C 19/5712 - Dispositifs sensibles à la rotation utilisant des masses vibrantes, p. ex. capteurs vibratoires de vitesse angulaire basés sur les forces de Coriolis utilisant des masses entraînées dans un mouvement de rotation alternatif autour d'un axe les dispositifs comportant une structure micromécanique
G01D 1/08 - Dispositions pour la mesure donnant des résultats autres que la valeur instantanée d'une variable, d'application générale donnant des valeurs intégrées par sommations intermittentes sur des périodes de temps fixées
G01D 1/02 - Dispositions pour la mesure donnant des résultats autres que la valeur instantanée d'une variable, d'application générale donnant des valeurs moyennes, p. ex. des valeurs efficaces
G01D 1/16 - Dispositions pour la mesure donnant des résultats autres que la valeur instantanée d'une variable, d'application générale donnant une valeur qui est une fonction de plusieurs valeurs, p. ex. produit ou rapport
09 - Appareils et instruments scientifiques et électriques
Produits et services
Inertial measurement unit; motion sensors; accelerometers; gyroscopes; magnetometers; pressure sensors; temperature sensors; ultrasonic sensors for measuring acceleration, angle of rotation, pressure, temperature, and distance ranges, all for use in automotive systems, autonomous car systems, advanced driver assisted systems, internet of things applications, and internet of things software development systems; measuring equipment sensors comprising an inertial measurement unit, and high-precision algorithms, all for use in sensor fusion for automotive systems, autonomous car systems, advanced driver assisted systems, internet of things applications, and internet of things software development systems; sensor development kits, namely, kits comprised primarily of computer hardware and downloadable software for use in developing and operating sensors and electronic devices for detecting, transmitting, recognizing, analyzing, and tracking motion, movement, positions, distances, and obstacles; downloadable computer software for integrating drivers for multi-sensor modules for automotive systems, autonomous car systems, advanced driver assisted systems, internet of things software development systems, and internet of things applications
