Provided is a failure prediction device and a failure prediction method for predicting failures in various types of industrial equipment with different operating characteristics or environments using multiple deep learning models selectively, which includes a sensor unit collecting operational data detecting an operating state of the industrial equipment; a data prediction unit provided with multiple deep learning-based prediction models and predicting the operational data of the industrial equipment during a second period after a first period using the operational data collected by the sensor unit; a prediction model selection unit comparing the operational data collected by the sensor unit during the second period with the operational data predicted by the multiple prediction models and selecting any one of the multiple prediction models; and a failure prediction unit predicting the occurrence time of failure of the industrial equipment using the operational data predicted by the selected operational data prediction model.
05 - Produits pharmaceutiques, vétérinaires et hygièniques
Produits et services
Odor neutralizing preparations for general use on various surfaces; Odor neutralizing preparations for use on shoes; Odor neutralizing sprays for shoes; Odor neutralizing wipes for shoes; Shoe deodorizers
3.
Gas leakage prevention cooling box for pipe flange connection and gas leakage sensing system
Disclosed is a gas leakage prevention cooling box for a pipe flange connection, which includes: a main body casing having an inner chamber in which connection flanges of a first pipe and a second pipe are located at a center portion of the main body casing, a pipe mounting hole in which the pipes connected around the flange are located on front and rear sides of the inner chamber, and a first half main body and a second half main body coupled to face to each other with the connection flanges of the first and second pipes therebetween and supported by the connection between the first pipe and the second pipe; and a cooling fan installed in the first half main body of the main body casing and configured to supply external air to the inner chamber.
G01M 3/04 - Examen de l'étanchéité des structures ou ouvrages vis-à-vis d'un fluide par utilisation d'un fluide ou en faisant le vide par détection de la présence du fluide à l'emplacement de la fuite
G08B 21/12 - Alarmes pour assurer la sécurité des personnes réagissant à l'émission indésirable de substances, p. ex. alarmes de pollution
Disclosed is a gas collection apparatus used in manufacturing a semiconductor. The apparatus includes: a housing having a chamber formed therein; a heating member installed in the housing to heat cobalt-carbon gas introduced into the chamber; a cobalt deposition member installed across the chamber of the housing to deposit cobalt composite; and a cooling member that induces carbon composite to be solidified and deposited while rapidly cooling the carbon composite.
B01D 53/00 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols
B01D 53/34 - Épuration chimique ou biologique des gaz résiduaires
Disclosed is a by-product collection apparatus which collects a by-product generated during a manufacturing process of manufacturing a semiconductor or a semiconductor-like product. The apparatus includes: a by-product collection module connected to a pipeline in series and configured to collect a by-product from a by-product gas, wherein the by-product gas flows in the pipeline having an inlet pipe and an outlet pipe provided at upper and lower portions of a first casing; and a cooling water supply module including a cooling water tank and a cooling water pump in a second casing and configured to supply and recover cooling water to and from the by-product collection module through a cooling pipe.
B01D 53/22 - Séparation de gaz ou de vapeursRécupération de vapeurs de solvants volatils dans les gazÉpuration chimique ou biologique des gaz résiduaires, p. ex. gaz d'échappement des moteurs à combustion, fumées, vapeurs, gaz de combustion ou aérosols par diffusion
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
6.
BYPRODUCT COLLECTION DEVICE INTEGRATED WITH COOLING WATER CIRCULATION SYSTEM
The present invention relates to a byproduct collection device capable of collecting byproducts generated during a manufacturing process of manufacturing semiconductors or semiconductor-like products, and to a byproduct collection device comprising: a byproduct collection module serially connected, by means of an inflow pipe and an outflow pipe respectively provided at the top and bottom of a first casing, to a pipe in which a byproduct gas flows, so as to collect byproducts from the byproduct gas; and a cooling water supply module including, in a second casing, a cooling water tank and a cooling water pump so as to supply the cooling water to the byproduct collection module through a cooling pipe and recover same.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
H01L 21/205 - Dépôt de matériaux semi-conducteurs sur un substrat, p. ex. croissance épitaxiale en utilisant la réduction ou la décomposition d'un composé gazeux donnant un condensat solide, c.-à-d. un dépôt chimique
7.
Triple pipe heating device of easy installation for heating exhaust gas in semiconductor and LCD manufacturing process
The present invention relates to a triple pipe heating device for heating an exhaust gas in a semiconductor and LCD manufacturing process, which has a triple pipe structure capable of effectively heating an exhaust gas with only a small amount of heat without using nitrogen gas, is expandable and bendable so as to be easily installed, and is capable of quickly detecting exhaust gas leakage and overheating.
F16L 53/30 - Chauffage des tuyaux ou des systèmes de tuyaux
F16L 53/38 - Chauffage par résistance ohmique en utilisant des éléments de chauffage électrique allongés, p. ex. des fils ou des rubans
F16L 9/18 - Tuyaux à double paroiTuyaux à canaux multiples ou assemblages de tuyaux
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
8.
TRIPLE PIPE HEATING DEVICE OF EASY INSTALLATION FOR HEATING EXHAUST GAS IN SEMICONDUCTOR AND LCD MANUFACTURING PROCESS
The present invention relates to a triple pipe heating device for heating an exhaust gas in a semiconductor and LCD manufacturing process, which has a triple pipe structure capable of effectively heating an exhaust gas with only a small amount of heat without using nitrogen gas, is expandable and bendable so as to be easily installed, and is capable of quickly detecting exhaust gas leakage and overheating.
H01L 21/67 - Appareils spécialement adaptés pour la manipulation des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide pendant leur fabrication ou leur traitementAppareils spécialement adaptés pour la manipulation des plaquettes pendant la fabrication ou le traitement des dispositifs à semi-conducteurs ou des dispositifs électriques à l'état solide ou de leurs composants
F16L 53/38 - Chauffage par résistance ohmique en utilisant des éléments de chauffage électrique allongés, p. ex. des fils ou des rubans
9.
Energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with same and method for heating nitrogen gas
The disclosure relates to an energy-saving silencer assembly, which includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space.
F04B 39/00 - Parties constitutives, détails ou accessoires de pompes ou de systèmes de pompage spécialement adaptés aux fluides compressibles, non prévus dans les groupes ou présentant un intérêt autre que celui visé par ces groupes
F24H 3/12 - Appareils de chauffage d'air avec aménagements additionnels pour le chauffage
F01N 5/02 - Silencieux ou dispositifs d'échappement combinés ou associés à des dispositifs bénéficiant de l'énergie des gaz évacués les dispositifs utilisant la chaleur
F28D 7/02 - Appareils échangeurs de chaleur comportant des ensembles de canalisations tubulaires fixes pour les deux sources de potentiel calorifique, ces sources étant en contact chacune avec un côté de la paroi d'une canalisation les canalisations étant enroulées en hélice
F04D 19/04 - Pompes multiétagées spécialement adaptées pour réaliser un vide poussé, p. ex. pompes moléculaires
F04D 29/66 - Lutte contre la cavitation, les tourbillons, le bruit, les vibrations ou phénomènes analoguesÉquilibrage
F28D 7/10 - Appareils échangeurs de chaleur comportant des ensembles de canalisations tubulaires fixes pour les deux sources de potentiel calorifique, ces sources étant en contact chacune avec un côté de la paroi d'une canalisation les canalisations étant disposées l'une dans l'autre, p. ex. concentriquement
An exhaust pressure measuring device including a connection pipe connected to a middle of an exhaust line for carrying byproduct gas, the connection pipe having an opening formed in a middle of a body thereof; a chamber provided at an outer side of the connection pipe and communicating with an inside of the connection pipe through the opening, the chamber having a nitrogen supply line connected thereto, the nitrogen supply line allowing nitrogen gas to be supplied from the outside; and a pressure sensor installed to the chamber to measure pressure in the chamber, whereby a change of exhaust pressure in the exhaust line is measured from the measured pressure in the chamber.
H01L 21/00 - Procédés ou appareils spécialement adaptés à la fabrication ou au traitement de dispositifs à semi-conducteurs ou de dispositifs à l'état solide, ou bien de leurs parties constitutives
11.
ENERGY-SAVING SILENCER ASSEMBLY, A SEMICONDUCTOR MANUFACTURING VACUUM PUMP WITH SAME AND METHOD FOR HEATING NITROGEN GAS
The present invention pertains to an energy-saving silencer assembly, a semiconductor manufacturing vacuum pump with the same and a method for heating nitrogen gas. Nitrogen gas is heated using the high temperature of the surface of a silencer and supplied to the inside of the silencer so as to resolve blockage problems due to the solidification of reaction by-products while saving energy costs due to the use of additional heat sources. The energy-saving silencer assembly in the present invention as above includes: a silencer connected to a discharge side of a pump section, which pumps reaction by-product gas into a vacuum pump, so as to pass the pumped reaction by-product gas from a rear end portion to a front end portion; an outer pipe surrounding the outer peripheral surface of the silencer at an interval so as to provide a heating space between the silencer and the outer pipe; a nitrogen gas supply section for supplying nitrogen gas to the heating space; and a nitrogen gas injection section for injecting heated nitrogen gas to the inside of the silencer by the contact with the outer peripheral surface of the silencer in the heating space.
