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2026
|
P/S
|
Semiconductor manufacturing machines; Machines for manufacturing semiconductors; Semiconductor su... |
|
|
Invention
|
Hydrogen peroxide plasma surface modification.
The techniques described herein relate to hydroge... |
|
2025
|
Invention
|
Oxidant gas or oxidant vapor generation and delivery systems and methods.
The techniques describ... |
|
|
Invention
|
Oxidant gas or oxidant vapor generation and delivery systems and methods. The techniques describe... |
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2024
|
Invention
|
Hydrogen peroxide plasma surface modification. The techniques described herein relate to hydrogen... |
|
2023
|
Invention
|
Hydrogen peroxide plasma etch of ashable hard mask. The techniques described herein relate to a m... |
|
|
Invention
|
Gas recovery systems and methods. The present disclosure relates to gas recovery systems and meth... |
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2022
|
Invention
|
Suppression of hydrogen degradation. The present disclosure provides techniques for suppression o... |
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2019
|
Invention
|
Method, system, and device for removing hydrogen peroxide or hydrazine from a process gas stream.... |
|
|
Invention
|
Method and system for low temperature ald.
A method and chemical delivery system are provided fo... |
|
|
Invention
|
Controlled vapor delivery into low pressure processes. Provided herein are methods, systems, and ... |
|
2018
|
Invention
|
Method, system, and device for storage and delivery of process gas from a substrate. Provided her... |
|
|
Invention
|
Method, system, and device for delivery of process gas.
Provided herein are methods, systems, an... |
|
|
Invention
|
System, device, and method for controlling mass flow of a catalytically reactive gas in a mixed g... |
|
2017
|
Invention
|
Method, system, and apparatus for inhibiting decomposition of hydrogen peroxide in gas delivery s... |
|
|
Invention
|
Method, system and device for delivery of process gas. A method and chemical delivery system and ... |
|
|
Invention
|
Method, system, and device for delivery of process gas. Provided herein are methods, systems, and... |
|
|
Invention
|
Devices, systems, and methods for controlled delivery of process gases. A method and chemical del... |
|
2016
|
Invention
|
Methods and systems for generating process gases. Methods for the gas-phase delivery of gases, su... |
|
|
Invention
|
Method and system for decontaminating materials. Methods, systems, and devices for decontaminatin... |
|
|
Invention
|
Methods and systems for purifying hydrogen peroxide solutions. Compositions, methods, devices, an... |
|
2015
|
P/S
|
Anhydrous Chemical for semiconductor wafer and microelectronic processing |
|
|
Invention
|
Method, system, and device for delivery of process gas. A method and chemical delivery system and... |
|
|
Invention
|
Methods and systems for delivering process gases to critical process applications. Methods and de... |
|
2014
|
P/S
|
Power-operated vaporizers for industrial or commercial use |
|
|
Invention
|
Delivery of a high concentration hydrogen peroxide gas stream.
A method and chemical delivery sy... |
|
|
Invention
|
Delivery of a high concentration hydrogen peroxide gas stream. A method and chemical delivery sys... |
|
2013
|
Invention
|
Method, system, and device for delivery of high purity hydrogen peroxide. A method and chemical d... |
|
|
Invention
|
Method of delivering a process gas from a multi-component solution. A method and chemical deliver... |
|
|
Invention
|
Method of delivering a process gas from a multi-component solution.
A method and ... |
|
2011
|
Invention
|
Gas-liquid phase transition method and apparatus for cleaning of surfaces in semiconductor manufa... |
|
|
Invention
|
Apparatus and method for delivery of vapor. A vaporizing device and method for operating same is ... |
|
2008
|
P/S
|
Humidifiers for use only in industrial machinery |
|
2007
|
P/S
|
STEAM GENERATORS, DRYERS, NAMELY, DRYERS FOR THE REMOVAL OF WATER VAPOR FROM COMPRESSED AIR AND G... |
|
|
Invention
|
Vaporizer for delivery of low vapor pressure gasses. A vaporizing device is provided for control,... |
