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2016
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Invention
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A method of measurement and control of the surface potential of a sample. A method of measurement... |
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Invention
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Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass ... |
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2015
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Invention
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Feed-forward of multi-layer and multi-process information using xps and xrf technologies. Methods... |
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Invention
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Silicon germanium thickness and composition determination using combined xps and xrf technologies... |
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Invention
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Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatter... |
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2014
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Invention
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Methods and systems for fabricating platelets of a monochromator for x-ray photoelectron spectros... |
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2012
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Invention
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System and method for characterizing a film by x-ray photoelectron and low-energy x-ray fluoresce... |
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2006
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Invention
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A photoelectron spectroscopy apparatus and method of use. According to one aspect of the present ... |
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Invention
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Method and system for non-destructive distribution profiling of an element in a film. A method to... |
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Invention
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Techniques for analyzing data generated by instruments. According to one embodiment of the invent... |
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Invention
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Determining layer thickness using photoelectron spectroscopy. ⏧0095] According to one embodi... |
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2005
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Invention
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A semiconductor substrate processing method. According to one aspect of the invention, a semicond... |
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2003
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P/S
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Metrology systems comprised of computer hardware and x-ray equipment for measuring physical compo... |
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1986
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Invention
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Vacuum-compatible air-cooled plasma device. A plasma generating device, and in particular a duopl... |
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1983
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Invention
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Sample vessel. A sample vessel for carrying a sample and storing same in a high vacuum. The vesse... |
