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2023
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Invention
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Actuator and workpiece delivery robot equipped with same. The present invention provides a high-p... |
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Invention
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Workpiece-conveying robot. Provided is a workpiece-conveying robot comprising a joint equipped wi... |
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Invention
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Load port.
A load port control unit performs an opening operation of a sealable container accord... |
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2022
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Invention
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Wafer transfer apparatus and wafer transfer method.
An object of the invention is to realize a h... |
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Invention
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Actuator and workpiece transfer robot comprising same. Provided is an actuator which has high pre... |
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Invention
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Actuator and work transfer robot provided with same. Provided is an actuator having small vertica... |
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Invention
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Subculture timing determination method, subculture timing determination system, and cell culture ... |
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2021
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Invention
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Load port. [Problem] To provide a load port which can separate a container and a lid without caus... |
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Invention
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Waveform analysis device and waveform analysis method.
The present invention prevents stoppage o... |
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Invention
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Waveform analysis device and waveform analysis method. The present invention prevents stoppage or... |
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2020
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Invention
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Aligner and correction value calculation method for aligner. An aligner includes a driving pulley... |
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Invention
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Foup transfer device.
Provided is a FOUP transfer device for transferring FOUPs between load por... |
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Invention
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Foup transfer device. Provided is a FOUP transfer device for transferring FOUPs between loading p... |
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Invention
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Switching valve and suction-discharge device including the same. A switching valve includes a rot... |
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Invention
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Wafer transfer device and wafer transfer method. The purpose of the present invention is to achie... |
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Invention
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Pod opener. A pod opener includes an elevating mechanism elevating the cassette in a vertical dir... |
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2019
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Invention
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Electrostatic capacitance sensor. Provided is an electrostatic capacitance sensor which can remov... |
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Invention
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Aligner and correction value calculation method for aligner. In order to inexpensively provide an... |
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Invention
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Thin plate substrate-holding device and transfer robot provided with this holding device. Provide... |
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Invention
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Thin plate-shaped substrate holding device, and holding device equipped transport robot. Provided... |
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2018
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Invention
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Pod opener. Provided is an inexpensive pod opener that opens the door of a container and that pla... |
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Invention
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Transport device having local purge function.
The purpose of the present invention is to provide... |
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Invention
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Transport device having local purge function. The purpose of the present invention is to provide,... |
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Invention
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Thin-plate substrate holding finger and transfer robot provided with said finger. Provided is hol... |
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Invention
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Thin-plate substrate holding finger and transfer robot provided with said finger. Provided is a h... |
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Invention
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Switching valve and suction-discharge device including the same. Since a drive unit is disposed i... |
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2017
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Invention
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Waveform analysis device and waveform analysis method. Provided are a waveform analysis method an... |
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Invention
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Load port and load port atmosphere replacing method. Provided is a load port capable of loading a... |
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2016
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Invention
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Switching valve, and suction/discharge device provided with same. For switching valves provided i... |
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2015
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Invention
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Loading port and loading port atmoshpere substitution method. Provided is a loading port allowing... |
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2014
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Invention
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Storage container, shutter opening/closing unit of storage container, and wafer stocker using sto... |
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2013
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Invention
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Device and method for detecting position of semiconductor substrate. Provided is a position detec... |
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Invention
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Accommodating container, shutter opening and closing unit for accommodating container, and wafer ... |
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2012
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Invention
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Constant-temperature device provided with rotating specimen table. Provided is a constant-tempera... |
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Invention
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Sensor unit and constant-temperature device. 2 sensor and an oxygen concentration sensor, a senso... |
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Invention
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Sensor unit, and constant-temperature device using sensor unit. In order to enable the inside of ... |
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Invention
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Conveyance arm and conveyance robot with same. First and second parallel link mechanisms 36, 38 a... |
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2011
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Invention
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Robot control device and control method. A robot control apparatus and a control method for movin... |
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Invention
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Robot control device and control method. A control device and control method for dramatically red... |
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2010
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Invention
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Conveyance arm and conveyance robot with same. Provided are a conveyance arm which is low cost an... |
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Invention
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Apparatus for holding thin-board-like material and method for holding thin-board-like material. D... |
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Invention
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Low dielectric constant films and manufacturing method thereof, as well as electronic parts using... |
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Invention
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Atmosphere replacement device. An improved atmosphere replacement device configured to purge a FO... |
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2009
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Invention
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Constant-temperature equipment. Provided is constant-temperature equipment wherein maintenance is... |
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Invention
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Constant-temperature equipment. Constant-temperature equipment wherein mechanical and electrical ... |
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Invention
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Transport apparatus, position teaching method, and sensor jig. Disclosed are a transport apparatu... |
