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2013
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Invention
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Ion implantation device and a method of semiconductor manufacturing by the implantation of boron ... |
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2011
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Invention
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Vaporizer.
Vapor delivery systems and methods that control the heating and flow of vapors from s... |
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Invention
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System and method for the manufacture of semiconductor devices by the implantation of carbon clus... |
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Invention
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Isotopically-enriched boranes and methods of preparing them. 22. |
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Invention
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Methods of preparing clusterboron. 22. |
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2010
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Invention
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Ion beam apparatus and method employing magnetic scanning. A multipurpose ion implanter beam line... |
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Invention
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External cathode ion source. An ion source is disclosed for use in fabrication of semiconductors.... |
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2009
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Invention
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Methods of synthesis of isotropically enriched borohydride and methods of synthesis of isotropica... |
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Invention
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Ion implantation ion source, system and method. An ion source is disclosed incorporating various ... |
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Invention
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Semiconductor device and method of fabricating a semiconductor device. A method is proposed for t... |
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Invention
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Multi mode ion source. A multi mode ion implantation system, which operates in both an arc discha... |
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Invention
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Ion source gas reactor. An ion source is disclosed which includes a gas reaction chamber. The inv... |
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Invention
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Ion source gas reactor.
An ion source is disclosed which includes a gas reaction chamber. The in... |
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2008
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Invention
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Methods of preparing clusterboron. The invention provides new methods for synthesis of ClusterBor... |
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Invention
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Method for extending equipment uptime in ion implantation. The invention features in-situ cleanin... |
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Invention
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An ion implantation device and a method of semiconductor manufacturing by the implantation of ion... |
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Invention
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Method and system for extracting ion beams composed of molecular ions (cluster ion beam extractio... |
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Invention
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Method and apparatus for extending equipment uptime in ion implantation.
An in situ cleaning sys... |
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Invention
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Cluster ion implantation for defect engineering. A method of semiconductor manufacturing is discl... |
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2007
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Invention
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Vapor delivery system useful with ion sources and vaporizer for use in such system. Vapor deliver... |
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Invention
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Dual mode ion source for ion implantation. +, to enable cluster implants and monomer implants int... |
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Invention
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Ion implantation with molecular ions containing phosphorus and arsenic. +, where n and x are inte... |
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Invention
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Ion implantation device and method of semiconductor manufacturing by the implantation of molecula... |
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Invention
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Magnetic analyzer apparatus and method for ion implantation.
In a magnetic analysis apparatus, h... |
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Invention
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Ion beam apparatus and method for ion implantation. A multipurpose ion implanter beam line config... |
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Invention
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Vapor delivery system useful with ion sources and vaporizers for use in such system.
Vapor deliv... |
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Invention
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Vapor delivery to devices under vacuum. Providing vapor to a vapor-receiving device housed in a h... |
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Invention
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Ion implantation device and a method of semiconductor manufacturing by the implantation of ions d... |
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2006
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Invention
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Method and apparatus for extracting ions from an ion source for use in ion implantation. Thermal ... |
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Invention
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Semiconductor device and method of fabricating a semiconductor device.
A method is proposed for ... |
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Invention
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Method and apparatus for extending equipment uptime in ion implantation. The service lifetime of ... |
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Invention
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Controlling the flow of vapors sublimated from solids.
A vapor delivery system for delivering a ... |
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Invention
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Dual mode ion source for ion implantation.
An ion source is disclosed for providing a range of i... |
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2005
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Invention
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Method of manufacturing semiconductor.
A method of producing ultra shallow junctions (104) for P... |
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2004
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Invention
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Controlling the flow of vapors sublimated from solids. A vapor delivery system for delivering a s... |
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2003
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P/S
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research and development of semiconductor equipment |
