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2021
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Invention
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Hydrogen generation system, power generation system, hydrogen generation method, and power genera... |
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2018
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Invention
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Producing method for producing magnesium hydride, power generation system using magnesium hydride... |
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2017
|
Invention
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Ion implantation apparatus and ion implantation method.
An ion implantation method in which an i... |
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2014
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Invention
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Ion implantation method and ion implantation apparatus. An ion implantation method includes recip... |
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2013
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Invention
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Method for manufacturing high-strength cement cured product.
A method for manufacturing a high-s... |
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Invention
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Ion implantation apparatus and control method thereof. A vertical profile, a horizontal profile, ... |
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Invention
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Ion source device and ion beam generating method. An ion source device has a configuration in whi... |
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Invention
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Ion implantation method and ion implantation apparatus. On a plane of a semiconductor wafer, two ... |
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2012
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Invention
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Ion implantation method and ion implantation apparatus. An ion implantation method includes trans... |
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Invention
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Ion implantation apparatus and ion implantation method. During ion implantation into a wafer, an ... |
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Invention
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Method for producing concrete formed body. A problem is to provide a production method by which a... |
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Invention
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Impurity-doped layer formation apparatus and electrostatic chuck protection method. An electrosta... |
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Invention
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Ion implantation apparatus and ion implantation method. An ion implantation method in which an io... |
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2011
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Invention
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Manufacturing method of semiconductor device. After formation of a silicon Fin part on a silicon ... |
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Invention
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Plasma doping apparatus and plasma doping method.
A plasma doping apparatus for adding an impuri... |
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Invention
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Ion beam irradiation system and ion beam irradiation method. An ion beam irradiation method compr... |
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2010
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Invention
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Manufacturing method of semiconductor device. A manufacturing method of a semiconductor device in... |
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2008
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Invention
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Beam processing apparatus. In a beam processing apparatus including a beam scanner having a two e... |
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Invention
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Ion implantation apparatus and ion implantation method. An ion implantation apparatus according t... |
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Invention
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Ion implantation apparatus and method of converging/shaping ion beam used therefor. An ion implan... |
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Invention
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Ion implantation apparatus. A beam line before incidence on a beam scanner is arranged with an in... |
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2007
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Invention
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Beam processing system and beam processing method. A beam processing system comprises a rotary di... |
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Invention
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Electrostatic beam deflection scanner and beam deflection scanning method. A beam deflection scan... |
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Invention
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Beam processing system and beam processing method. A beam processing system is for causing a part... |
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2005
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Invention
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Wafer processing system, wafer processing method, and ion implantation system. Two load lock cham... |
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Invention
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Irradiation system with ion beam/charged particle beam. In an irradiation system with an ion beam... |
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Invention
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Irradiation system ion beam and method to enhance accuracy of irradiation. The present invention ... |
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Invention
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Method to increase low-energy beam current in irradiation system with ion beam. A method to incre... |
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Invention
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Irradiation system with ion beam. An irradiation system comprises a beam generation source, a mas... |
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Invention
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Wafer charge compensation device and ion implantation system having the same. A charge compensati... |
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Invention
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Beam space-charge compensation device and ion implantation system having the same. A beam space-c... |
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Invention
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Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantatio... |
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Invention
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Wafer scanning device. The wafer scanning device causes a wafer to scan in a vacuum area and incl... |
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Invention
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Method of controlling mover device. Embodiments of the invention are directed to a method of cont... |
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2004
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Invention
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Ion source apparatus and electronic energy optimized method therefor. The ion source apparatus of... |
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Invention
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Ion implanter and method for controlling the same. The present invention is applied to an ion imp... |
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Invention
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Ion source apparatus and cleaning optimized method thereof. An ion source apparatus includes a ra... |
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Invention
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Mover device and semiconductor manufacturing apparatus and method. A mover device and an ion impl... |
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2003
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Invention
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Ion beam charge neutralizer and method therefor. In an ion beam line having a mechanism for scann... |
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Invention
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Ion beam mass separation filter, mass separation method thereof and ion source using the same. A ... |
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Invention
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Ion implantation apparatus equipped with plasma shower and ion implantation method. In an ion imp... |
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2002
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Invention
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Ion beam processing method and apparatus therefor. An ion beam processing apparatus comprises a b... |
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Invention
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Plasma generator using microwave. Here is disclosed a plasma generator using microwave wherein a ... |
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Invention
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Radio frequency resonator and method for producing the same. A dished head and a wall part are in... |
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Invention
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Ion implantation apparatus suited for low energy ion implantation and tuning method for ion sourc... |
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2001
|
Invention
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Wafer carrying system and carrying method thereof. A wafer carrying system includes an intermedia... |
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2000
|
Invention
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Detection method of coating film thickness and ion implantation equipment using this method. A de... |
