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2026
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Invention
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Load port.
A load port includes: a plate-shaped base member having an opening via which a transf... |
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Invention
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Aligner and substrate processing system.
An aligner for correcting a position of a tape frame ha... |
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Invention
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Cooling system. The present invention achieves a cooling system that supplies a refrigerant to a ... |
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Invention
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Load port.
A load port includes: a base; a mounter mounting thereon a container accommodating su... |
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Invention
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Dispensing device. [Problem] To achieve precise dispensing by setting, for each dispensing contai... |
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Invention
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Drive mechanism and actuator. A drive mechanism comprises: a plurality of drives; a joint part wh... |
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Invention
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Conveyance robot. In the present invention, the rotation angle of a motor for driving an arm in a... |
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Invention
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Liquid-cooled motor. The present invention comprises: a housing; a rotor that rotates around an a... |
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2025
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Invention
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Dispensing unit. [Problem] To provide a dispensing unit that makes it possible to easily and prop... |
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Invention
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Dispensing apparatus and dispensing method. [Problem] To provide a dispensing apparatus suitable ... |
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Invention
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Container opening/closing device and substrate conveyance apparatus. The present invention easily... |
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P/S
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Interference prevention devices for hydraulic excavators that restrict movement of an arm or boom... |
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Invention
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Motor and motor assembly method. Provided is a motor capable both of improving the workability of... |
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Invention
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Autonomous mobile transport vehicle. Provided is an autonomous mobile transport vehicle 1 compris... |
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Invention
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Drive control apparatus. This drive control apparatus, which has a drive control unit for control... |
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Invention
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Mapping device and mapping method.
A load port detects an accommodation state of a plurality of ... |
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Invention
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Conveying device and substrate treatment system. HL1HL1HR1HR1HL2HL2HR2HR2HL3HL3HR3HR3LLRRHL1HL1HR... |
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Invention
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Conveyance device. [Problem] To provide a conveyance device which can be particularly suitably ap... |
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Invention
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Mapping device and mapping method. A purpose of the present invention is to suppress erroneous de... |
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Invention
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Conveyance-container lid fall-off detection device, load port, and conveyance-container lid fall-... |
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Invention
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Mapping device. The present invention more reliably suppresses erroneous determination regarding ... |
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Invention
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Control device and control method. The present invention realizes a control device or a control m... |
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Invention
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Load port. To provide a load port capable of realizing a low profile. A load port 1 on which a wa... |
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Invention
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Coreless motor unit and method for producing coreless motor. [Problem] To provide a coreless moto... |
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Invention
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Liquid-cooled motor. The present invention includes: a housing; a rotor that rotates about an axi... |
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2024
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Invention
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Transport device. [Problem] To provide a transport device for correcting a transport track in acc... |
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Invention
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Pod opening/closing device. Provided is a pod opening/closing device connected to a substrate tra... |
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Invention
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Mapping device. The present invention more reliably suppresses erroneous determinations pertainin... |
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Invention
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Cell dispensing device and cell dispensing method.
A cell dispensing device capable of efficient... |
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Invention
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Aligner and substrate processing system. Provided is a technology that makes it possible to corre... |
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Invention
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Power conversion device. Provided is a power conversion device in which, even when divided input ... |
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Invention
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Efem and method of controlling supply amount of inert gas. An EFEM includes a housing having a su... |
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Invention
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Load port. According to the present invention, the amount of deflection of a substrate in a conta... |
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Invention
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Efem. b and configured to accommodate a part of the opening/closing mechanism 54. The discharge p... |
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Invention
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Mapping device and mapping method. [Problem] To provide a technology that makes it possible to de... |
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Invention
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Efem.
An EFEM includes: a housing including a transfer chamber where a processing object is tran... |
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Invention
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Load port. [Problem] To provide a technique with which a housing state of a substrate can be dete... |
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2023
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Invention
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Equipment front end module. An EFEM includes a housing including a transfer chamber in which a pr... |
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Invention
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Power feeding device. Provided is a power feeding device capable of preventing supply of power to... |
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Invention
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Load port, and lid closed state determination method. The present invention effectively checks wh... |
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Invention
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Load port and method for sensing inclination of lid. The present invention suppresses the occurre... |
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Invention
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Load port. A load port includes: a plate-shaped base member having an opening via which a transfe... |
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Invention
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Rectangular substrate inversion device, substrate transport system comprising same, rectangular s... |
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Invention
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Mapping device and substrate accommodation state determination method. The load port includes a F... |
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Invention
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Transfer chamber. The EFEM comprises: a transfer chamber in which a transfer robot is disposed, a... |
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Invention
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Electric machine.
In a device including a rotor core 21, a plurality of magnets 22 disposed on a... |
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Invention
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Electric machine. [Problem] To achieve a motor comprising a structure that prevents damage to mag... |
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Invention
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Load port mounting position adjustment mechanism.
A load port mounting position adjustment mecha... |
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Invention
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Load port mounting position adjustment mechanism. As a load port mounting position adjustment mec... |
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Invention
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Substrate detection method and load port.
A detection method of a wafer detects whether or not t... |
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2021
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Invention
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Lubricating oil supply device and rotation test apparatus equipped therewith.
A lubricating oil ... |
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P/S
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Automated cell removal device for laboratory use; cell
culture instruments for laboratory use; l... |
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P/S
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Automated cell removal device for laboratory use; cell culture instruments for laboratory use; au... |
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P/S
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automated cell removal device for laboratory use; automated cell culture incubator component part... |
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2016
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P/S
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[ Multiplex transmission devices for truck cranes; vibration conveyors; linear motor type conveyo... |
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P/S
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Parts feeders and their parts; linear feeders; digital
controllers for parts feeders; devices fo... |
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2014
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P/S
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Metalworking grinders; electric arc welding machines;
metalworking machines and tools; apparatus... |
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P/S
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Construction machines and apparatus, namely, interference prevention devices for hydraulic excava... |
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2008
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P/S
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Digital photo printers; other electronic machines, apparatus
and their parts; coin-operated phot... |
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P/S
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Loading and unloading machines and apparatus; semiconductor manufacturing machines and systems; r... |
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P/S
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[ Metalworking grinders; construction machines and apparatus, namely, interference prevention dev... |
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P/S
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Metalworking machines and tools; mining machines and
apparatus; construction machines and appara... |
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P/S
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Loading-unloading machines and apparatus namely, container lift loaders, passenger steps, belt lo... |
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P/S
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Metalworking machines and machine tools; mining machines;
construction machines; loading-unloadi... |
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P/S
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testing equipment for motors, inverters and other parts of electric cars, hybrid cars and other t... |
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P/S
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[ Metal working grinders; printing or bookbinding machines; ] semiconductor wafer transferring ma... |
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2005
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P/S
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semiconductor manufacturing machines |
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1996
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P/S
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Color printers, color hard copiers, in particular for computer graphics, CAD/CAM and image proces... |
