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2021
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Invention
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Holding apparatus and method for holding a substrate. A holding apparatus, in particular a chuck,... |
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Invention
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Adapter, connection device and supply system. An adapter for a liquid container of a supply syste... |
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Invention
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Wet process module and method of operation.
A wet process module, in particular a lacquering mod... |
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2020
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Invention
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Apparatus, system, and method for handling aligned wafer pairs. An industrial-scale apparatus, sy... |
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Invention
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Stamp replication device and method for producing a holding means for a stamp replication device ... |
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Invention
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Framework for a replication device, replication device as well as method for producing nanostruct... |
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Invention
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Replication device and method for reproducing a structure on a substrate.
Replication device for... |
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2019
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Invention
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Substrate cassette. A substrate cassette for housing several substrates stacked on top of each ot... |
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Invention
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Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device. Disc... |
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Invention
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Method for controlling a substrate processing device as well as substrate processing device. A me... |
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Invention
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Fixation system, support plate and method for production thereof.
A fixation system for fixing a... |
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Invention
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Edge bead removal system and method of treating a substrate.
An edge bead removal system for tre... |
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Invention
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Exposure device for a photolithography method, assembly having an exposure device, and method for... |
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Invention
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Dispensing nozzle for a coater.
A dispensing nozzle for applying a coating to a substrate has a ... |
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Invention
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Bonding device as well as method for bonding substrates. A bonding device has two chucks, two gas... |
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Invention
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Bonding device as well as method for bonding substrates. A bonding device (10) has two chucks (24... |
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Invention
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Method for coating a substrate with a lacquer and device for planarising a lacquer layer. The dis... |
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2018
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Invention
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Wafer support system, wafer support device, system comprising a wafer and a wafer support device ... |
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Invention
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Nozzle tip adapter, nozzle assembly as well as nozzle. A nozzle tip adapter has a suction duct, a... |
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Invention
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Method and device for aligning a first substrate with a second substrate.
A method for aligning ... |
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Invention
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End effector. An end effector for holding substrates has a multi-layered main body and a fluid ch... |
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Invention
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Suction apparatus for an end effector, end effector for holding substrates and method of producin... |
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2017
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Invention
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Semiconductor bonding apparatus and related techniques. A semiconductor structure bonding apparat... |
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Invention
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Positioning device. The invention relates to a positioning device for positioning a substrate, in... |
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Invention
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Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing. A waf... |
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Invention
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System and related techniques for handling aligned substrate pairs. An industrial-scale system an... |
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Invention
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Light source arrangement for a photolithography exposure system and photolithography exposure sys... |
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Invention
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Method for coating a substrate and also a coating system. Method for coating a substrate with a c... |
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2016
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Invention
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Debonding temporarily bonded semiconductor wafers. Described methods and apparatus provide a cont... |
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Invention
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Spacer displacement device for a wafer illumination unit and wafer illumination unit. A spacer di... |
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Invention
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Device for treating a disc-shaped substrate and support adapter. A device for treating a disc-sha... |
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Invention
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Method and device for curing at least in part a photoresist applied to a substrate. A method for ... |
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Invention
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Method and device for applying a coating to a substrate.
A device for applying a coating to a su... |
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Invention
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Method for coating a substrate. A method for coating substrates provided with vias uses a first s... |
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Invention
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Method for regulating a light source of a photolithography exposure system and exposure assembly ... |
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Invention
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Wafer treating device and sealing ring for a wafer treating device. A sealing ring for attaching ... |
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2015
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Invention
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Baking device for a wafer coated with a coating containing a solvent. A baking device for a wafer... |
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Invention
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Method for coating a substrate with a lacquer and device for planarising a lacquer layer. A metho... |
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Invention
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Method for coating a substrate and coating device. A method for coating a substrate with a lacque... |
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Invention
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Method and apparatus for temporary bonding of ultra thin wafers.
An apparatus for temporary bond... |
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Invention
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Bottle supply system and bottle cap adapter. A bottle cap adapter for supplying liquids, particul... |
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Invention
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Method and apparatus for preventing the deformation of a substrate supported at its edge area. Th... |
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Invention
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System amd method for substrate holding.
A system for mechanically holding a substrate during pr... |
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2013
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Invention
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Chuck, in particular for use in a mask aligner. A chuck for aligning a first planar substrate in ... |
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Invention
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Chuck for suction and holding a wafer.
The invention relates to a chuck and a method for suction... |
