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2020
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Invention
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Method for manufacturing a plurality of resonators in a wafer. A method for manufacturing a plura... |
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2014
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Invention
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Mems sensor for measuring z-axis angular rate.
A micromechanical sensor for measuring z-axis ang... |
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Invention
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Mems sensor for measuring z-axis angular rate. A micromechanical sensor device for measuring z-ax... |
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Invention
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Mems device with getter layer. A MEMS device comprises a first layer (1), a second layer (2) and ... |
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Invention
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Mems-sensor. A sensor which measures parameters such as acceleration, rotation and magnetic field... |
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Invention
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Mems-sensor. A sensor for measuring physical parameters such as acceleration, rotation, magnetic ... |
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2013
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Invention
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Micromechanical z-axis gyroscope.
A micromechanical sensor device for measuring angular z-axis m... |
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Invention
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Micromechanical z-axis gyroscope. A micromechanical sensor device for measuring angular z-axis mo... |
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Invention
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Wafer level package with getter. A wafer level package comprises at least two self-supporting ele... |
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2012
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Invention
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Multiaxial micro-electronic inertial sensor.
A resonator micro-electronic inertial sensor, prefe... |
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Invention
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Multiaxial micro-electronic inertial sensor. A resonator micro-electronic inertial sensor, prefer... |
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Invention
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Micro-electromechanical gyro device.
A resonator micro-electronic gyro, preferably a micro-elect... |
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Invention
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A micro-electromechanical gyro device. A resonator micro-electronic gyro, preferably a micro-elec... |
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Invention
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Micro-electromechanical system (mems) device.
A micro-electromechanical system (MEMS) device for... |
