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2024
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Invention
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Seed laser system. A seed laser system for an EUV radiation source, the seed laser system compris... |
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Invention
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Optical amplifier. An optical amplifier comprises: an amplification chamber; a first pump; a firs... |
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Invention
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Method and device for generating laser pulses.
A method for generating laser pulses includes gen... |
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Invention
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Method for changing the polarization of a laser.
A method for changing a polarization of a worki... |
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Invention
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Improved gas laser. There is described a gas-based laser comprising a heat exchanger for cooling ... |
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Invention
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Focusing device having an image plane extending parallel or congruent to a target plane.
A focus... |
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2023
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Invention
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Co2 beam source comprising a catalyst.
A CO2 beam source includes a discharge tube in which a la... |
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Invention
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Euv excitation light source and euv light source.
An EUV excitation light source includes a lase... |
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Invention
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Euv light source with a separation device. A EUV light source includes a prepulse laser source fo... |
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Invention
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Electrooptical modulator having reflection protection. The invention relates to an electrooptical... |
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Invention
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Optical amplifier. An optical amplifier configured to amplify a laser beam, the optical amplifier... |
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Invention
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Beam diaphragm, euv light source, and method for operating an euv light source. The invention rel... |
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Invention
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Assembly for laser protection. The invention relates to an assembly (14a, 14b) for laser protecti... |
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Invention
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Measuring device for adjusting a laser beam. The invention relates to an optical apparatus (10), ... |
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Invention
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Vibration-monitored laser lens system. The invention relates to a method (12) for monitoring a la... |
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Invention
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Euv radiation generation following laser beam rotation. The invention relates to a device (10) an... |
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Invention
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Indirectly monitored laser unit. The invention relates to a method (24) for monitoring a laser sy... |
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2022
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Invention
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Adjustable optical arrangement.
An adjustable optical arrangement includes an optics mount, an o... |
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Invention
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Focusing device having an image plane extending parallel or congruent to a target plane. The inve... |
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Invention
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Rotationally symmetrical curved beam dump for conical beams. The invention relates to a beam-form... |
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Invention
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Device for correcting an astigmatism of a laser beam. The invention relates to a device (10) for ... |
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2021
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Invention
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Back reflection protection by means of a method and a device for interference of a laser pulse. T... |
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Invention
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Device for optically modulating a laser beam. The invention relates to a device (1) for optically... |
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Invention
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Euv light source having a beam-position adjustment device. The invention relates to an EUV light ... |
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Invention
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Method and device for producing laser pulses. The invention relates to a method (12) for producin... |
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Invention
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Method for adjusting a laser beam, apparatus for providing an adjusted laser beam and optical arr... |
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Invention
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Method for changing the polarization of a laser. The invention relates to a method for changing t... |
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Invention
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Beam guide and positioning device for positioning a scraper mirror, provided for coupling out las... |
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Invention
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Arrangement for monitoring an optical element, laser source and euv radiation generation apparatu... |
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Invention
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2 beam source having a catalyst. 1222 beam source (1) is operated. |
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Invention
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Euv excitation light source and euv light source. The invention relates to an EUV excitation ligh... |
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Invention
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Euv light source having a separation device. VVVV), in a focused manner back into the beam genera... |
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Invention
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Method for producing a housing provided for receiving and for defined positioning of at least one... |
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Invention
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Variable beam modulation. The invention relates to a device (10) and to a method for simple intro... |
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2020
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Invention
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Laser amplifier, laser, and method with the b-field running transversely to the e-field. The inve... |
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Invention
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Focusing device and euv radiation generating device having same. A focusing device for focusing a... |
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Invention
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Reflective optical element, beam guiding device and euv-beam generating device. A reflective opti... |
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Invention
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Faraday rotators, optical isolators, driver laser arrangements and euv radiation generation appar... |
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Invention
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Adjustable optical assembly. The invention relates to an adjustable optical assembly (10), compri... |
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Invention
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Laser focussing module. A laser focusing system (330) for use in an EUV radiation source is descr... |
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Invention
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Arrangement for suppressing radiation feedback, and laser system comprising such an arrangement. ... |
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Invention
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Polarizer. A polarizer arrangement for polarizing a laser beam includes: multiple plate-shaped op... |
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2019
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Invention
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Method for adjusting a laser beam, device for providing an adjusted laser beam, and optical assem... |
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2018
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Invention
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Method for determining at least one beam propagation parameter of a laser beam. B1, . . . ) in a ... |
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Invention
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Optical assembly, in particular for polarization of a laser beam, and euv radiation generating de... |
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Invention
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Focusing device and euv radiation generating device having same. The invention relates to a focus... |
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Invention
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Reflective optical element, beam guiding device and euv-beam generating device. The invention rel... |
