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2024
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Invention
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Etching apparatus and etching method.
Provided is an etching apparatus for etching a silicon oxi... |
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P/S
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Installation, repair and maintenance of semiconductor manufacturing machines and systems; Install... |
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Invention
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Target assembly and method for manufacturing target assembly. To provide a target assembly in whi... |
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Invention
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Etching method.
The present disclosure provides an etching method that includes a resist pattern... |
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Invention
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Molybdenum target and method for producing same. The present invention provides a molybdenum targ... |
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Invention
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Hard mask manufacturing method. Provided is a hard mask manufacturing method capable of adjusting... |
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Invention
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Substrate-processing device and substrate-processing method. A connection part of this substrate-... |
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Invention
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Vacuum evaporation method.
A vacuum evaporation method includes a vaporization step in which use... |
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Invention
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Etching device and etching method.
An etching device includes a discharge tube irradiated with m... |
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2023
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Invention
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Vapor deposition source for vacuum vapor deposition apparatus, and vacuum vapor deposition method... |
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Invention
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Method for depositing film. Provided is a method for depositing a silicon film, the method capabl... |
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Invention
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Evaporation source for vacuum evaporation apparatus.
An evaporation source for use in a vacuum e... |
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Invention
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Evaporation source for vacuum evaporation apparatus.
Provided is an evaporation source for use i... |
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Invention
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Deep ultraviolet led. effeffeff is the effective refractive index of the photonic crystal period ... |
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Invention
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Dried plasma. The specific embodiments of the present invention provide: dried plasma that is cha... |
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Invention
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Substrate processing device, substrate processing system, and method for processing substrate.
A... |
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Invention
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Information processing device and information processing method.
An information processing devic... |
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Invention
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Vacuum treatment apparatus and vacuum treatment method.
In a present vacuum treatment apparatus,... |
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Invention
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Vacuum treatment apparatus and vacuum treatment method.
A vacuum treatment apparatus including: ... |
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Invention
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Sputtering target for oxide semiconductor thin film formation, method for producing sputtering ta... |
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Invention
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Sputtering target for formation of oxide semiconductor thin film, method for producing sputtering... |
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Invention
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Plasma processing apparatus and plasma processing method.
A plasma processing apparatus accordin... |
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Invention
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Tungsten target and method for manufacturing same. The present invention provides a tungsten targ... |
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Invention
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Method for controlling specific resistivity and stress of tungsten through pvd sputtering method.... |
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Invention
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Vacuum processing device, particle removal mechanism, and particle removal method. According to t... |
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Invention
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Plasma processing device and plasma processing method.
A method for processing a subject with pl... |
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Invention
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Display device, display method, and storage medium. A display device of the present invention inc... |
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Invention
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Display device, display method, and program. A display device of the present invention is provide... |
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Invention
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Sputtering target, method for producing sputtering target, oxide semiconductor thin film, thin fi... |
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2022
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Invention
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Sputtering device. This sputtering device is provided with a cathode unit for emitting sputter pa... |
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Invention
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Method of depositing silicon nitride film, apparatus for depositing film, and silicon nitride fil... |
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Invention
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Silicon nitride film forming method, film forming device, and silicon nitride film. Provided is a... |
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Invention
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Freeze-drying device and freeze-drying method. A freeze-drying device includes a controller confi... |
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Invention
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Vacuum processing apparatus.
A vacuum processing apparatus of this invention having a stage on w... |
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Invention
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Vacuum processing device. Provided is a vacuum processing device that holds a stage configured so... |
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Invention
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Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus. A cathode uni... |
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Invention
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Method for manufacturing crystallized laminated structure.
Provided is a method of manufacturing... |
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Invention
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Method for manufacturing crystallized laminated structure. 23232323233 layer 5 at a second crysta... |
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Invention
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Film forming method. Provided is a film forming method by which a metal film having a high meltin... |
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Invention
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Method for controlling resistivity and crystallinity of low-resistance material through pvd.
The... |
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Invention
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Cathode unit for magnetron sputtering apparatus and magnetron sputtering apparatus.
A cathode un... |
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2021
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Invention
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Evaporation source for use in vapor deposition apparatus.
There is provided an evaporation sourc... |
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Invention
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Vapor deposition source for vacuum vapor deposition apparatus.
A vapor deposition source for a v... |
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P/S
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Machines for the deposition of thin films upon semiconductor wafers; Semiconductor wafer processi... |
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P/S
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Machines and systems for the deposition of thin films upon semiconductor wafers; Semiconductor wa... |
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Invention
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Deposition method and deposition apparatus. [Object] To improve step coverage of a coating film
... |
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Invention
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Film formation method and film formation device. [Problem] To improve step coverage of a coating ... |
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Invention
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Vacuum pump, vacuum pump control method, power conversion device for vacuum pump, power conversio... |
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Invention
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Nonvolatile memory device and manufacturing method therefor.
[PROBLEM] An object of the present ... |
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Invention
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Freeze-drying device and freeze-drying method. A freeze-drying apparatus includes a freeze-drying... |
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Invention
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Freeze-drying device and freeze-drying method. Provided is a freeze-drying device that can evenly... |
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Invention
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Vacuum freeze-drying method, injection nozzle for a vacuum freeze-drying apparatus, and vacuum fr... |
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Invention
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Nanotube mediated delivery system and methods comprising the same.
The present disclosure relate... |
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2012
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P/S
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Inking apparatus for printing machines; spray guns for
paint; machines and apparatus for cleanin... |
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2011
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P/S
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chemical vapor deposition apparatus for use in the manufacture of semiconductors; vacuum depositi... |
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P/S
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Chemical vapor deposition apparatus for use in the manufacture of semiconductors; vacuum depositi... |
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P/S
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Chemical vapor deposition apparatus for use in the
manufacture of semiconductors; vacuum deposit... |
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P/S
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Embrocations for forming insulating coating films; ultrafine
particles of ceramics, metals or pr... |
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2010
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P/S
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Roll-to-roll deposition machines and systems; roll-to-roll
deposition machines and systems for m... |
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P/S
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Vacuum vapor deposition apparatus for manufacturing semiconductor devices; sputtering apparatus f... |
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P/S
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Vacuum vapor deposition apparatus for manufacturing
semiconductor devices; sputtering apparatus ... |
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P/S
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Freeze-drying machines for manufacturing pharmaceutical preparations; freeze-drying machines for ... |
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P/S
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Freeze-drying apparatus for manufacturing pharmaceutical
preparations; freeze-drying apparatus f... |
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P/S
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Apparatus and instruments for measuring and testing optical thin film |
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P/S
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Measuring or testing machines and instruments; spectroscopic
ellipsometer for thin film analysis. |
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P/S
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Lubricating oils. |
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P/S
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Lubricating oils |
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2007
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P/S
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Industrial programmable modular systems for the manufacture of electronic displays, liquid crysta... |
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P/S
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Fuel; industrial oil; industrial grease; raw material waxes |
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P/S
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Laboratory apparatus and instruments; mass spectroscopy type
helium leak detector; other measuri... |
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P/S
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Fuel; industrial oil; industrial grease; wax (raw material). |
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2006
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P/S
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semiconductor wafer processing equipment, namely microwave and RF plasma chamber for removing pho... |
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2005
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P/S
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Electric welding apparatus; ozonisers (ozonators);
electrolysers (electrolytic cells); photo-cop... |
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2001
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P/S
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Gravimetric measuring instruments to measure molecular
interaction by quartz crystal microbalanc... |
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2000
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P/S
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Laboratory apparatus and instruments, namely, biosensors for measuring, monitoring, analyzing, st... |
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1998
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P/S
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Semiconductor wafer processing equipment, namely microwave and RF plasma chamber for removing pho... |
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1996
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P/S
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helium leak detectors and their parts |
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1979
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P/S
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Hobbing and Heading Tools |
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1978
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P/S
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Vacuum Coaters which Vaporize Materials and Then Condense These Vapors to Coat a Surface, and Par... |
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1975
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P/S
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VACUUM PUMPS, VACUUM VALVES OF BOTH THE HAND-OPERATED AND AIR-OPERATED TYPE USED IN SEALING AND V... |
