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2018
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Invention
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Non-evaporable getter and non-evaporable getter pump. A non-evaporable getter 1 includes a mesh 3... |
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2010
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Invention
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Vacuum measurement device with ion source mounted. A vacuum measurement device includes a grid (1... |
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Invention
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Vacuum measuring device having ion source. A vacuum measuring device which is provided with a gri... |
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2006
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Invention
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Ionization vacuum gauge. An ionization vacuum gauge includes a vacuum container (4) connected in ... |
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Invention
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Quadrupole mass spectrometer and vacuum device using the same. In a quadrupole mass spectrometer ... |
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2004
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Invention
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Material for vacuum device, vacuum device, vacuum apparatus, manufacturing method of material for... |
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Invention
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Heating device and heating method. A heating device includes a first electrode and a second elect... |
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2003
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Invention
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Processing equipment and processing method. A processing equipment is provided with a vessel havi... |
