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2019
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Invention
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An apparatus and method for the minimization of undercut during a ubm etch process. A semiconduct... |
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Invention
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System and method for self-cleaning wet treatment process. An apparatus for supporting and maneuv... |
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Invention
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Apparatus for supporting and maneuvering wafers. An apparatus for supporting and maneuvering a wa... |
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Invention
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High pressure spray head. A device for spraying substrates comprises a longitudinal extending flu... |
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2018
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Invention
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Dispensing arm head having point of dispense recirculation mode. A dispense arm device for contro... |
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Invention
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Configurable high temperature chuck for use in a semiconductor wafer processing system. A reconfi... |
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Invention
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Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processin... |
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Invention
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Semiconductor wafer processing chamber. A housing of a wafer processing system includes at least ... |
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Invention
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An apparatus and method for wafer thinning in advanced packaging applications. A system and metho... |
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Invention
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Apparatus and method to remove solids from material lift off post process solvents. An apparatus ... |
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2017
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Invention
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High velocity spray (hvs) dispense arm assemblies including a gas shield nozzle.
A high velocity... |
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Invention
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An apparatus and method to control etch rate through adaptive spiking of chemistry. An apparatus ... |
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Invention
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Apparatus and method to improve plasma dicing and backmetal cleaving process.
An apparatus and m... |
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2016
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Invention
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An apparatus and method for mixing fluids with degradational properties. An apparatus and method ... |
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2015
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Invention
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A system and method for performing a wet etching process. A system and method for performing a we... |
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Invention
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Apparatus and method for metals free reduction and control of resistivity of deionized water. An ... |
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Invention
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Apparatus and method to reduce and control resistivity of deionized water. An apparatus and metho... |
