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2026
|
Invention
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Process chamber with uv irradiance.
A semiconductor processing apparatus includes a process cham... |
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2025
|
Invention
|
Apparatus and methods for removing photoresist and polymer coatings. A system for removing polyme... |
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|
Invention
|
Wet processing device with gas-liquid mixing. An apparatus for wet chemical processing of multipl... |
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|
Invention
|
Sulfur-containing surface polymers.
Disclosed herein are surface polymers having sulfur in at le... |
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|
Invention
|
Sulfur-containing surface polymers. Disclosed herein are surface polymers having sulfur in at lea... |
|
|
Invention
|
High temperature annealing of semiconductor substrates.
An annealing system for semiconductor su... |
|
|
Invention
|
Chemical binding of surface polymer to epoxy material. The present disclosure relates to the chem... |
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|
Invention
|
Ruthenium-catalyzed surface polymer formation. The present disclosure relates to ruthenium (Ru) c... |
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|
Invention
|
Device bonding.
A device includes: a first substrate; a second substrate; interconnects bonding ... |
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|
Invention
|
Device bonding. A device includes: a first substrate; a second substrate; interconnects bonding t... |
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|
Invention
|
Substrate carrier. A substrate carrier including an enclosure to hold substrates. The enclosure i... |
|
|
Invention
|
Iron-catalyzed surface polymer formation. The present disclosure relates to iron (Fe) catalysts a... |
|
|
Invention
|
High temperature annealing of semiconductor substrates. An annealing system for a semiconductor s... |
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|
Invention
|
Fluid vaporizers. A vaporizer apparatus includes a liquid inlet; a plurality of plates in a stack... |
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|
Invention
|
Edge zone coating removal apparatus and method. An apparatus to remove a coating from an edge of ... |
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|
Invention
|
Edge zone coating removal with warpage compensation. An apparatus to remove at least a portion of... |
|
|
Invention
|
Double-sided scrubber for substrate cleaning.
A substrate cleaning device includes a double-side... |
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|
Invention
|
Control of surface polymerization rate by formulation of reaction compositions. Methods for contr... |
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|
Invention
|
Substrate holder. An apparatus that includes a holder body configured to hold a substrate at edge... |
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|
Invention
|
Batch processing oven for magnetic anneal.
A batch processing oven includes a processing chamber... |
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|
Invention
|
Electroless deposition of metal on surface polymer films on substrate surfaces. The present discl... |
|
|
Invention
|
Surface polymers of at least two polymer molecules and methods of forming the same. Disclosed her... |
|
|
Invention
|
Fluid vaporizers.
A vaporizer apparatus includes a liquid inlet; a plurality of plates in a stac... |
|
|
Invention
|
Method of using processing oven.
A method of using a processing oven may include disposing at le... |
|
|
Invention
|
Apparatus and method for coating removal.
An apparatus for removing a coating from a substrate c... |
|
|
Invention
|
Self-alignment for bonding of semiconductor devices.
A method of bonding semiconductor devices u... |
|
|
Invention
|
Unified rinse and dry cleaning apparatus and methods. A cleaning apparatus incudes a plurality of... |
|
|
Invention
|
Surface polymerization control.
Reaction compositions for surface polymer formation may comprise... |
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|
Invention
|
Solder reflow with optical endpoint control. A solder reflow system that includes a vacuum chambe... |
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P/S
|
Semiconductor manufacturing machines |
|
|
P/S
|
Semiconductor manufacturing machines; cleaning machines,
namely, machines for removing impuritie... |
|
|
Invention
|
Dielectric liners on through glass vias. A method of improving interfacial adhesion of a copper-g... |
|
2024
|
Invention
|
Multifunctional composite si and c-based particles. The present disclosure provides methods for f... |
|
|
Invention
|
Apparatus and methods for removing photoresist and polymer coatings.
A system for removing polym... |
|
|
Invention
|
Wet processing device with gas-liquid mixing.
An apparatus for wet chemical processing of multip... |
|
|
Invention
|
Wet processing with automatic process control. A system and a method of wet processing includes r... |
|
|
Invention
|
High temperature annealing of semiconductor substrates.
An annealing system for a semiconductor ... |
|
|
P/S
|
Chemical vapor deposition equipment, namely, chemical vapor deposition apparatus for use in research |
|
|
P/S
|
Semiconductor manufacturing machines; Cleaning machines, namely, machines for removing impurities... |
|
|
Invention
|
Edge zone coating removal with warpage compensation.
An apparatus to remove at least a portion o... |
|
|
Invention
|
Edge zone coating removal apparatus and method.
An apparatus to remove a coating from an edge of... |
|
|
Invention
|
Improved adhesion strength of metal-organic interfaces in electronic devices. A method of improvi... |
|
|
Invention
|
Method for forming dielectric liners on through glass vias.
A method of improving interfacial ad... |
|
|
Invention
|
Wet etching system for semiconductor substrates.
A wet etching system includes a process tank ha... |
|
|
Invention
|
Carrier for panels. A carrier configured to support multiple panels includes a housing having a p... |
|
|
Invention
|
Dual channel flow plate for wet processing. An apparatus for wet chemical processing includes a p... |
|
|
Invention
|
Oven with adjustable volume processing chamber.
An oven with a processing chamber having an adju... |
|
2023
|
Invention
|
Double-sided scrubber for substrate cleaning. A substrate cleaning device includes a double-sided... |
|
|
Invention
|
Wet processing with automatic process control.
A system and a method of wet processing includes ... |
|
|
Invention
|
Carrier for panels.
A carrier configured to support multiple panels includes a housing having a ... |
|
|
Invention
|
Dual channel flow plate for wet processing.
An apparatus for wet chemical processing includes a ... |
|
2022
|
P/S
|
Semiconductor manufacturing machines; Semiconductor
substrates manufacturing machines. Semicondu... |
|
|
P/S
|
Curing machines, namely, vacuum curing machines for
manufacturing semiconductors, microelectrome... |
|
2021
|
P/S
|
Semiconductor manufacturing machines. Semiconductor manufacturing equipment. |
|
|
P/S
|
Semiconductor manufacturing machines. Hardware, controls, computer hardware, and computer softwar... |
|
|
P/S
|
Machines for precision treatment of surfaces; semiconductor
manufacturing machines; vapor deposi... |
|
|
P/S
|
Chemical vapor deposition apparatus for use in research |
|
|
P/S
|
Curing machines for use in the manufacture of
semiconductors. Curing equipment for use in the ma... |
|
|
P/S
|
Semiconductor manufacturing machines; cleaning machines;
stripping machines; plasma cleaning mac... |
|
2020
|
P/S
|
Chemical treatment of plastics; chemical treatment of metals; treatment and processing of plastic... |
|
|
P/S
|
Chemical treatment of plastics; Chemical treatment of metals; Treatment of metal using chemicals;... |
|
|
P/S
|
Chemical treatment of plastics; chemical treatment of
metals; treatment and processing of plasti... |
|
2019
|
P/S
|
Chemical treatment of plastics; Chemical treatment of metals; treatment and processing of plastic... |
