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2025
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Invention
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High temperature annealing of semiconductor substrates.
An annealing system for semiconductor su... |
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Invention
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High temperature annealing of semiconductor substrates. An annealing system for a semiconductor s... |
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Invention
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Edge zone coating removal apparatus and method. An apparatus to remove a coating from an edge of ... |
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Invention
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Edge zone coating removal with warpage compensation. An apparatus to remove at least a portion of... |
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Invention
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Double-sided scrubber for substrate cleaning.
A substrate cleaning device includes a double-side... |
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Invention
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Control of surface polymerization rate by formulation of reaction compositions. Methods for contr... |
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Invention
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Batch processing oven for magnetic anneal.
A batch processing oven includes a processing chamber... |
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Invention
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Electroless deposition of metal on surface polymer films on substrate surfaces. The present discl... |
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Invention
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Method of using processing oven.
A method of using a processing oven may include disposing at le... |
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Invention
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Apparatus and method for coating removal.
An apparatus for removing a coating from a substrate c... |
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Invention
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Self-alignment for bonding of semiconductor devices.
A method of bonding semiconductor devices u... |
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Invention
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Unified rinse and dry cleaning apparatus and methods. A cleaning apparatus incudes a plurality of... |
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Invention
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Solder reflow with optical endpoint control. A solder reflow system that includes a vacuum chambe... |
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G/S
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Semiconductor manufacturing machines |
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G/S
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Semiconductor manufacturing machines; cleaning machines,
namely, machines for removing impuritie... |
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Invention
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Dielectric liners on through glass vias. A method of improving interfacial adhesion of a copper-g... |
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2024
|
Invention
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Multifunctional composite si and c-based particles. The present disclosure provides methods for f... |
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Invention
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Fluid vaporizers. A vaporizer apparatus includes a liquid inlet; a plurality of plates in a stack... |
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Invention
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Apparatus for coating removal. An apparatus for removing a coating from a substrate comprises a n... |
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Invention
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Wet processing with automatic process control. A system and a method of wet processing includes r... |
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Invention
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High temperature annealing of semiconductor substrates.
An annealing system for a semiconductor ... |
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G/S
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Chemical vapor deposition equipment, namely, chemical vapor deposition apparatus for use in research |
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G/S
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Semiconductor manufacturing machines; Cleaning machines, namely, machines for removing impurities... |
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Invention
|
Edge zone coating removal with warpage compensation.
An apparatus to remove at least a portion o... |
|
|
Invention
|
Edge zone coating removal apparatus and method.
An apparatus to remove a coating from an edge of... |
|
|
Invention
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Improved adhesion strength of metal-organic interfaces in electronic devices. A method of improvi... |
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Invention
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Method for forming dielectric liners on through glass vias.
A method of improving interfacial ad... |
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Invention
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Wet etching system for semiconductor substrates.
A wet etching system includes a process tank ha... |
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Invention
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Carrier for panels. A carrier configured to support multiple panels includes a housing having a p... |
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Invention
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Dual channel flow plate for wet processing. An apparatus for wet chemical processing includes a p... |
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Invention
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Apparatus and method for separating wafer slices. An apparatus to separate a wafer from a pre-sli... |
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Invention
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Unified rinse and dry cleaning apparatus and methods.
A cleaning apparatus incudes a plurality o... |
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Invention
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Oven with adjustable volume processing chamber.
An oven with a processing chamber having an adju... |
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2023
|
Invention
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Method of using processing oven. A method of using a processing oven may include disposing at lea... |
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Invention
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Compositions for forming polymer brushes.
The present invention relates to novel chemical soluti... |
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Invention
|
Double-sided scrubber for substrate cleaning. A substrate cleaning device includes a double-sided... |
|
|
Invention
|
Wet processing with automatic process control.
A system and a method of wet processing includes ... |
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|
Invention
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Carrier for panels.
A carrier configured to support multiple panels includes a housing having a ... |
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|
Invention
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Electronic device with improved interfacial adhesion of metal-organic interfaces.
An electronic ... |
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|
Invention
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Method of improving the adhesion strength of metal-organic interfaces in electronic devices. A me... |
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|
Invention
|
Dual channel flow plate for wet processing.
An apparatus for wet chemical processing includes a ... |
|
|
Invention
|
Apparatus and method for separating wafer slices.
An apparatus to separate a wafer from a pre-sl... |
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Invention
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Integrated ultrasonics and megasonics cleaning. A cleaning device includes a tank configured to c... |
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2022
|
Invention
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Method of using processing oven. A method of using a solder reflow oven can include disposing at ... |
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G/S
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Semiconductor manufacturing machines; Semiconductor
substrates manufacturing machines. Semicondu... |
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Invention
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Polymer gels in the formation of polymer brushes. The present invention relates to the use of pol... |
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G/S
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Curing machines, namely, vacuum curing machines for
manufacturing semiconductors, microelectrome... |
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2021
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G/S
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Semiconductor manufacturing machines. Semiconductor manufacturing equipment. |
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G/S
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Semiconductor manufacturing machines. Hardware, controls, computer hardware, and computer softwar... |
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G/S
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Machines for precision treatment of surfaces; semiconductor
manufacturing machines; vapor deposi... |
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G/S
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Chemical vapor deposition apparatus for use in research |
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G/S
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Curing machines for use in the manufacture of
semiconductors. Curing equipment for use in the ma... |
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G/S
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Semiconductor manufacturing machines; cleaning machines;
stripping machines; plasma cleaning mac... |
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|
Invention
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Batch processing oven and method. A batch processing oven includes a processing chamber configure... |
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2020
|
Invention
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Compositions for forming polymer brushes. The present invention relates to novel chemical solutio... |
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2018
|
Invention
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Trap assembly and system for trapping polymer vapors in process oven vacuum systems.
A trap syst... |
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2017
|
Invention
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System for trapping polymer vapors in process oven vacuum systems.
A trap system adapted to trap... |
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Invention
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System for trapping polymer vapors in process oven vacuum systems. A trap system adapted to trap ... |
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1999
|
Invention
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Rapid heating and cooling vacuum oven. An oven for processing semiconductor wafers comprised of a... |
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Invention
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Apparatus for cleaning items using gas plasma. A plasma cleaning apparatus for cleaning lead fram... |
