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2024
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Invention
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Panel repairing apparatus. A panel repairing apparatus according to an embodiment of the present ... |
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2020
|
Invention
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Inspection apparatus, repair apparatus, and particle beam apparatus. The present invention provid... |
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Invention
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Treatment device and treatment method. Provided are a treatment device and a treatment method uti... |
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2017
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Invention
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Sensor for depth of anesthesia and cerebral blood oxygen saturation.
Provided is an integrated d... |
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2016
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Invention
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Liner assembly and substrate processing apparatus having the same.
Provided are a liner assembly... |
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2015
|
Invention
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Gas distribution apparatus and substrate processing apparatus including same.
Provided is a gas ... |
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2014
|
Invention
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Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate p... |
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Invention
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Substrate supporter and substrate processing apparatus including the same.
Provided is a substra... |
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Invention
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Method and apparatus for measuring anesthetic depth using cepstrum technique.
The present invent... |
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Invention
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Method and apparatus for measuring anesthetic depth using cepstrum tenique. The present invention... |
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Invention
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Method and apparatus for measuring anesthetic depth. The present invention rapidly reacts to chan... |
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2013
|
Invention
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Substrate processing apparatus. The present invention relates to a substrate processing apparatus... |
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2009
|
Invention
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Plasma processing apparatus and method for plasma processing. Provided are a plasma processing ap... |
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2008
|
Invention
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Apparatus and method for processing substrate. There are provided an apparatus and method for pro... |
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Invention
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Plasma etching chamber.
Disclosed is a plasma etching chamber including a gas distribution plate... |
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Invention
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Apparatus for supporting substrate and plasma etching apparatus having the same. Provided are a s... |
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Invention
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Apparatus for plasma processing and method for plasma processing. There is provided a substrate s... |
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2004
|
Invention
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Working stage system for flat panel display and flat panel display working method using same. A w... |
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2002
|
Invention
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Apparatus for inspecting flat panel display. The present invention relates to an apparatus for in... |
