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2024
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Invention
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Method of manufacturing semiconductor device capable of controlling film thickness distribution. ... |
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Invention
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Substrate processing apparatus and method of manufacturing semiconductor device.
Described herei... |
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Invention
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Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory ... |
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Invention
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Method of processing substrate, method of manufacturing semiconductor device, recording medium, a... |
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Invention
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Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediu... |
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Invention
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Processing method, method of manufacturing semiconductor device, substrate processing apparatus a... |
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Invention
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Substrate processing apparatus, method of processing substrate, and method of manufacturing semic... |
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Invention
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Substrate processing method, method of manufacturing semiconductor device, non-transitory compute... |
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Invention
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Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory c... |
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Invention
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Substrate processing method, method for producing semiconductor device, program, and substrate pr... |
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Invention
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Method of processing substrate, method of manufacturing semiconductor device, recording medium, s... |
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Invention
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Substrate processing apparatus, cleaning method, method of manufacturing semiconductor device, an... |
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Invention
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Substrate processing method, method of manufacturing semiconductor device, recording medium, and ... |
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Invention
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Processing method, method of manufacturing semiconductor device, processing apparatus, and record... |
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Invention
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Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediu... |
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Invention
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Method of processing substrate, method of manufacturing semiconductor device, recording medium an... |
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Invention
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Method of processing substrate, method of manufacturing semiconductor device, substrate processin... |
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Invention
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Processing apparatus, substrate processing apparatus, display method, substrate processing method... |
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Invention
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Substrate processing apparatus, rotation state detection method, method of manufacturing semicond... |
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Invention
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Temperature measurement assembly, substrate processing apparatus, method of processing substrate,... |
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Invention
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Substrate processing apparatus, method of processing substrate, method of manufacturing semicondu... |
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Invention
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Display processing apparatus, substrate processing apparatus, display method, substrate processin... |
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Invention
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Reaction tube holding jig, substrate processing device, and manufacturing method for semiconducto... |
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Invention
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Substrate treatment device, substrate treatment unit, substrate treatment method, and program. A ... |
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Invention
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Gas supply system, processing device, gas supply method, production method for semiconductor devi... |
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Invention
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Temperature measurement assembly, substrate processing device, substrate processing method, manuf... |
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2023
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Invention
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Substrate processing method, method for manufacturing semiconductor device, substrate processing ... |
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Invention
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Substrate processing device, substrate processing method, method for manufacturing semiconductor ... |
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Invention
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Substrate processing device, method for manufacturing semiconductor device, and program. The pres... |
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Invention
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Substrate treatment method, method for manufacturing semiconductor device, program, and substrate... |
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Invention
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Processing method, method for producing semiconductor device, program, and processing device. The... |
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Invention
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Treatment container, treatment device, and method for manufacturing semiconductor device. The pre... |
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Invention
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Purge nozzle, substrate processing device, method for purging substrate container, method for man... |
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Invention
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Storage container, substrate treatment device, gas supply method, and semiconductor device produc... |
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Invention
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Substrate lifter for semiconductor manufacturing equipment |
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2022
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Invention
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Film forming method.
A film forming method for forming a film on a workpiece is disclosed includ... |
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Invention
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Furnace for substrate processing apparatus |
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2019
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P/S
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Semiconductor manufacturing machines |
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2018
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P/S
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Semiconductor manufacturing machines. |
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2003
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P/S
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Semiconductor manufacturing machines and systems; semiconductor element manufacturing machines; i... |
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2002
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P/S
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Semiconductor manufacturing machines and systems comprising one or more of CVD (chemical vapor de... |
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1998
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P/S
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Semiconductor manufacturing machines, CVD (Chemical Vapor deposition) machines, PVD (physical vap... |
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1992
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P/S
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semiconductor manufacturing apparatus;, namely, diffusion/oxidation furnace, low pressure chemica... |
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1990
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P/S
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Vapour deposition apparatus for use in the production of semiconductors and chemical vapour depos... |
