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2024
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Invention
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Electroplating method and electroplating apparatus. An electroplating method and an electroplatin... |
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Invention
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Electroplating apparatus and electroplating method for non-circular substrate. An electroplating ... |
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Invention
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Position demonstration apparatus and position demonstration method. Provided in the present inven... |
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Invention
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Cleaning device and wet method apparatus. Disclosed in the present invention are a cleaning devic... |
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Invention
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Electroplating fixture, electroplating device, and electroplating fixture detection method. An el... |
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Invention
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Substrate clamping apparatus and method. The present invention relates to the technical field of ... |
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Invention
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Substrate holding device. Provided in the present invention is a substrate holding device, compri... |
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Invention
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Connecting apparatus, substrate thermal treatment unit, and coating and developing device. Disclo... |
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Invention
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Substrate bearing device and substrate processing apparatus. The present invention relates to the... |
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Invention
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Wafer cleaning method and apparatus. A wafer cleaning method and a wafer cleaning apparatus. The ... |
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Invention
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Control system for bubbles in liquid film, and wafer cleaning device and wafer cleaning method. T... |
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Invention
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Sensor fixing structure. Disclosed in the present invention is a sensor fixing structure. The sen... |
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Invention
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Substrate electroplating apparatus and method. A substrate electroplating apparatus, comprising a... |
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Invention
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Pressure monitoring apparatus, semiconductor cleaning device, and monitoring method therefor. The... |
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Invention
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Wafer chuck device and wafer clamping state detection method. A wafer chuck device and a wafer cl... |
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Invention
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Thin film deposition device and thin film deposition method. The present application provides a t... |
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Invention
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Substrate processing device. Provided in the present invention is a substrate processing device, ... |
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Invention
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Moisture removal device and electroplating apparatus. The present application relates to a moistu... |
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Invention
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Method for improving uniformity of wafer electroplating thickness. The present invention provides... |
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Invention
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Substrate clamp and substrate treatment device. Disclosed are a substrate clamp and a substrate t... |
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Invention
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Substrate treatment method and substrate treatment device. The present invention provides a subst... |
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Invention
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Real-time solution temperature control system and method. A real-time solution temperature contro... |
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Invention
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Wafer drying device and wafer drying method. Disclosed in the present application are a wafer dry... |
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Invention
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Electroplating device. An electroplating device, comprising a central flow tube. The central flow... |
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Invention
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Electrochemical etching method and electrochemical etching device. The present invention relates ... |
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Invention
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Wafer cleaning apparatus and method. The present invention relates to the field of semiconductor ... |
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Invention
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Contact member, chuck, and electroplating device. The present invention relates to the technical ... |
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Invention
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Thin film deposition apparatus and thin film deposition method. Disclosed is a thin film depositi... |
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Invention
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Position detection apparatus, semiconductor device, and method for measuring offset of substrate.... |
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Invention
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Electroplating device having function of monitoring the status of ionic membrane in electroplatin... |
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Invention
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Electroplating device. An electroplating device, comprising a film frame and an ion film, wherein... |
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Invention
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Optical measurement apparatus for measuring thickness of deposited film layer, and furnace tube d... |
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Invention
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Agitating mechanism of electroplating apparatus, electroplating apparatus, and electroplating met... |
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Invention
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Drying device. Disclosed in the present invention is a drying device, comprising an upper cavity,... |
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Invention
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Wafer cleaning method. The present application relates to a wafer cleaning method, used for clean... |
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Invention
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Wafer cleaning apparatus. The present application relates to a wafer cleaning apparatus. The wafe... |
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Invention
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Electrostatic eliminating device and method for electroplating apparatus. The present invention p... |
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2023
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Invention
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Substrate processing apparatus.
A substrate processing apparatus, comprising a chamber (1000), a... |
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Invention
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Substrate cleaning apparatus and turn-over device thereof.
A substrate turn-over device includes... |
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2022
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Invention
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Electroplating chamber leakage plating warning method and system.
An electroplating chamber leak... |
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Invention
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Thin wafer transfer method.
The present invention discloses a transfer method of thin wafer. For... |
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Invention
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Furnace tube for thin film deposition, thin film deposition method and processing apparatus.
A f... |
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Invention
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Liquid storage device and electroplating apparatus.
A liquid storage device includes a tank body... |
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Invention
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Method for cleaning electroplating device.
Disclosed in the present invention is a method for cl... |
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Invention
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Electroplating device.
An electroplating device includes a process chamber, a substrate holding ... |
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Invention
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Wafer backside cleaning method.
Disclosed is a wafer backside cleaning method, comprising: using... |
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Invention
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Wafer cleaning apparatus.
A wafer cleaning apparatus provided by the present invention comprises... |
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P/S
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Machines for the electronic industry, namely, semiconductor integrated circuit manufacturing and ... |
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P/S
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Machines for the electronic industry; battery manufacturing
machinery; machines and apparatus fo... |
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2021
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Invention
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High-temperature tube furnace.
A high-temperature tube furnace comprises: a process tube (1) wit... |
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Invention
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Coating and developing device.
A coating and developing device comprises a front end module (100... |
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2019
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P/S
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Electronic industry equipment, namely semiconductor integrated circuit manufacturing and packagin... |
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P/S
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Electronic industry equipment; battery machine; cleaning
equipment; glue clear machine; solar ce... |
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P/S
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Machines for the electronic industry; battery making
machines; electroplating machines; solar ce... |
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P/S
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Machines for the electronic industry; battery making
machines; metal processing machine; machine... |
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P/S
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Battery making machines; cleaning machines, namely, machines for cleaning semiconductor substrate... |
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P/S
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Battery making machines; cleaning machines; glue clear
machines; metal processing machine; elect... |
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P/S
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Machines for the electronic industry; battery making
machines; cleaning machines; glue clear mac... |
