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2024
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Invention
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Apparatus and method for cleaning semiconductor wafers.
An apparatus for cleaning semiconductor ... |
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Invention
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Agitating mechanism of electroplating apparatus, electroplating apparatus, and electroplating met... |
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Invention
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Substrate treatment method and device. The present application relates to a substrate treatment m... |
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Invention
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Electroplating device and electroplating method. An electroplating device and an electroplating m... |
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Invention
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Solution supply device and semiconductor apparatus. Disclosed in the present invention are a solu... |
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Invention
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Process tank temperature-measuring device and substrate processing apparatus. Disclosed in the pr... |
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Invention
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Electroplating apparatus and electroplating system. An electroplating apparatus and an electropla... |
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Invention
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Drying device. Disclosed in the present invention is a drying device, comprising an upper cavity,... |
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Invention
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Wafer cleaning method. The present application relates to a wafer cleaning method, used for clean... |
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Invention
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Wafer transfer device with liquid discharging function. Disclosed in the present invention is a w... |
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Invention
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Wafer cleaning apparatus. The present application relates to a wafer cleaning apparatus. The wafe... |
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Invention
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Electrostatic eliminating device and method for electroplating apparatus. The present invention p... |
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Invention
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Drying medium recovery system and semiconductor drying apparatus. The present application relates... |
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Invention
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Liquid treatment device. The present invention relates to the field of semiconductor device manuf... |
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Invention
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Electroplating apparatus. An electroplating apparatus, comprising a membrane frame, wherein the m... |
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Invention
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Gas control device. The present invention relates to the technical field of manufacturing of inte... |
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Invention
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Splash-proofing device for photoresist stripping process, photoresist stripping apparatus, and ch... |
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Invention
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Sealing method, electronic apparatus, storage medium, and semiconductor device. The present appli... |
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Invention
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Substrate carrying structure. Disclosed in the present invention is a substrate carrying structur... |
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Invention
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Thin-film deposition apparatus. Disclosed in the present invention is a thin-film deposition appa... |
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Invention
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Substrate treatment apparatus and method. The present invention provides a substrate treatment me... |
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Invention
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Substrate etching method and device. Disclosed in the present invention are a substrate etching m... |
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Invention
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Substrate treatment device. The present invention relates to the field of devices in semiconducto... |
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Invention
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Cleaning method and device for packaging structure. A cleaning method and device for a packaging ... |
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Invention
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Method and apparatus for monitoring warping of wafer in real time. The present invention relates ... |
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Invention
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Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic devi... |
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Invention
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Electroplating apparatus and electroplating method.
An electroplating apparatus for electroplati... |
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Invention
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Furnace tube for plasma enhanced thin film deposition. Disclosed in the present invention is a fu... |
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Invention
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Electroplating device. Provided in the present invention is an electroplating device. A solid ano... |
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Invention
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Thin film deposition device. A thin film deposition device, comprising a controller (100), and a ... |
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Invention
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Substrate processing apparatus and method, and computer readable medium. Disclosed in the present... |
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2023
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Invention
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Anti-backflow apparatus and substrate treatment device. An anti-backflow apparatus, comprising a ... |
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Invention
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Photoresist stripping method and system for chip-on-wafer process. The present application relate... |
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Invention
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Substrate handling device. The present invention provides a substrate handling device, comprising... |
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Invention
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Purging process for chemical vapor deposition furnace tube, and furnace tube having purging funct... |
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Invention
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Vibration attenuation control method and apparatus for electroplating device, and electronic devi... |
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Invention
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Wafer cleaning method and device. The present application discloses a wafer cleaning method and d... |
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Invention
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Substrate treatment apparatus. Provided in the present invention is a substrate treatment apparat... |
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2022
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Invention
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Wafer cleaning apparatus.
A wafer cleaning apparatus provided by the present invention comprises... |
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Invention
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Thin film deposition device, thin film deposition method and thin film deposition apparatus.
Dis... |
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Invention
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Substrate processing apparatus.
Disclosed in an embodiment of the present invention is a substra... |
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Invention
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Substrate processing method.
Disclosed is a substrate processing method, which comprises the fol... |
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Invention
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Electroplating apparatus.
An electroplating device includes a process chamber, a paddle plate an... |
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G/S
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Machines for the electronic industry, namely, semiconductor integrated circuit manufacturing and ... |
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G/S
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Machines for the electronic industry; battery manufacturing
machinery; machines and apparatus fo... |
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Invention
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Flipping apparatus.
Provided in the present invention is a flipping apparatus, comprising a brac... |
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Invention
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Electroplating apparatus and electroplating method for non-circular substrate.
The present inven... |
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Invention
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Deviation measurement device.
A deviation measurement device, which is used for measuring the de... |
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Invention
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Substrate treatment apparatus.
Disclosed in an embodiment of the present invention is a substrat... |
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Invention
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Electroplating device and electroplating method.
Disclosed in an embodiment of the present inven... |
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2021
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Invention
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Drying apparatus and method based on supercritical fluid.
A drying apparatus is based on supercr... |
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Invention
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Substrate processing apparatus.
Embodiments of the present invention provide a substrate process... |
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2019
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G/S
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Electronic industry equipment, namely semiconductor integrated circuit manufacturing and packagin... |
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G/S
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Electronic industry equipment; battery machine; cleaning
equipment; glue clear machine; solar ce... |
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G/S
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Machines for the electronic industry; battery making
machines; electroplating machines; solar ce... |
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G/S
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Machines for the electronic industry; battery making
machines; metal processing machine; machine... |
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G/S
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Battery making machines; cleaning machines, namely, machines for cleaning semiconductor substrate... |
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G/S
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Battery making machines; cleaning machines; glue clear
machines; metal processing machine; elect... |
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G/S
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Machines for the electronic industry; battery making
machines; cleaning machines; glue clear mac... |
