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2024
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Invention
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Electroplating device and substrate cleaning method. The present invention belongs to the technic... |
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Invention
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Electroplating apparatus and cleaning method. The present application discloses an electroplating... |
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Invention
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Substrate control device and semiconductor reaction chamber. Provided in the present application ... |
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Invention
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Electroplating device and cleaning method. Disclosed are an electroplating device and a cleaning ... |
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Invention
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Substrate treatment apparatus. The present invention relates to the technical field of semiconduc... |
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Invention
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Substrate clamping device for substrate chuck and tooling and method for adjusting same. Provided... |
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Invention
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Nozzle cleaning apparatus and method for coating and developing device. A nozzle cleaning apparat... |
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Invention
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Electroplating solution backflow control system and method. An electroplating solution backflow c... |
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Invention
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Thin film deposition device and thin film deposition method. A thin film deposition device, compr... |
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Invention
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Electroplating solution backflow control system and control method. An electroplating solution ba... |
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Invention
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Wafer electroplating device. The present application provides a wafer electroplating device, comp... |
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Invention
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Furnace tube device. The present invention relates to the technical field of semiconductor device... |
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Invention
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Electroplating device for square substrate. Provided in the present invention is an electroplatin... |
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Invention
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Thin film deposition apparatus, thin film deposition method, and thin film deposition device. The... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus, comprising: an RF power supply ... |
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Invention
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Electroplating method and electroplating apparatus. An electroplating method and an electroplatin... |
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Invention
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Electroplating apparatus and electroplating method for non-circular substrate. An electroplating ... |
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Invention
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Position demonstration apparatus and position demonstration method. Provided in the present inven... |
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Invention
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Electroplating fixture, electroplating device, and electroplating fixture detection method. An el... |
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Invention
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Substrate clamping apparatus and method. The present invention relates to the technical field of ... |
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Invention
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Substrate holding device. Provided in the present invention is a substrate holding device, compri... |
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Invention
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Cleaning device and wet method apparatus. Disclosed in the present invention are a cleaning devic... |
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Invention
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Connecting apparatus, substrate thermal treatment unit, and coating and developing device. Disclo... |
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Invention
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Substrate bearing device and substrate processing apparatus. The present invention relates to the... |
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Invention
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Wafer cleaning method and apparatus. A wafer cleaning method and a wafer cleaning apparatus. The ... |
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Invention
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Control system for bubbles in liquid film, and wafer cleaning device and wafer cleaning method. T... |
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Invention
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Sensor fixing structure. Disclosed in the present invention is a sensor fixing structure. The sen... |
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Invention
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Substrate electroplating apparatus and method. A substrate electroplating apparatus, comprising a... |
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Invention
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Pressure monitoring apparatus, semiconductor cleaning device, and monitoring method therefor. The... |
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Invention
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Wafer chuck device and wafer clamping state detection method. A wafer chuck device and a wafer cl... |
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Invention
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Thin film deposition device and thin film deposition method. The present application provides a t... |
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Invention
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Substrate processing device. Provided in the present invention is a substrate processing device, ... |
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Invention
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Moisture removal device and electroplating apparatus. The present application relates to a moistu... |
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Invention
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Method for improving uniformity of wafer electroplating thickness. The present invention provides... |
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Invention
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Substrate clamp and substrate treatment device. Disclosed are a substrate clamp and a substrate t... |
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Invention
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Substrate treatment method and substrate treatment device. The present invention provides a subst... |
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Invention
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Wafer drying device and wafer drying method. Disclosed in the present application are a wafer dry... |
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Invention
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Electroplating device. An electroplating device, comprising a central flow tube. The central flow... |
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Invention
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Electrochemical etching method and electrochemical etching device. The present invention relates ... |
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Invention
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Wafer cleaning apparatus and method. The present invention relates to the field of semiconductor ... |
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Invention
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Contact member, chuck, and electroplating device. The present invention relates to the technical ... |
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2023
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Invention
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Substrate processing apparatus.
A substrate processing apparatus, comprising a chamber (1000), a... |
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Invention
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Electroplating apparatus.
The present invention discloses an electroplating apparatus, comprisin... |
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Invention
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Film deposition device.
Disclosed is a film deposition device, having a substrate supporting com... |
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Invention
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Substrate cleaning apparatus and turn-over device thereof.
A substrate turn-over device includes... |
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2022
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Invention
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Electroplating chamber leakage plating warning method and system.
An electroplating chamber leak... |
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Invention
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Thin wafer transfer method.
The present invention discloses a transfer method of thin wafer. For... |
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Invention
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Furnace tube for thin film deposition, thin film deposition method and processing apparatus.
A f... |
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G/S
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Machines for the electronic industry, namely, semiconductor integrated circuit manufacturing and ... |
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G/S
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Machines for the electronic industry; battery manufacturing
machinery; machines and apparatus fo... |
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2021
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Invention
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Coating and developing device.
A coating and developing device comprises a front end module (100... |
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2019
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G/S
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Electronic industry equipment, namely semiconductor integrated circuit manufacturing and packagin... |
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G/S
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Electronic industry equipment; battery machine; cleaning
equipment; glue clear machine; solar ce... |
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G/S
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Machines for the electronic industry; battery making
machines; electroplating machines; solar ce... |
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G/S
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Machines for the electronic industry; battery making
machines; metal processing machine; machine... |
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G/S
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Battery making machines; cleaning machines, namely, machines for cleaning semiconductor substrate... |
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G/S
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Battery making machines; cleaning machines; glue clear
machines; metal processing machine; elect... |
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G/S
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Machines for the electronic industry; battery making
machines; cleaning machines; glue clear mac... |
