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2019
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Invention
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Temperature control system and method tdsf plus. Versatile temperature control systems adaptable ... |
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2016
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Invention
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Method and apparatus for thermal exchange with two-phase media. In a temperature control system u... |
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Invention
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Temperature control system and method tdsf plus. A temperature control system is disclosed where ... |
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2014
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Invention
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Temperature control system with programmable orit valve. A temperature control system employing a... |
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2010
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Invention
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Method of processing a workpiece in a plasma reactor using multiple zone feed forward thermal con... |
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Invention
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Method of processing a workpiece in a plasma reactor using feed forward thermal control. A method... |
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Invention
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Plasma reactor with a multiple zone thermal control feed forward control apparatus. A plasma reac... |
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Invention
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System and method for thermal control of different heat loads from a single source of saturated f... |
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2009
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Invention
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Thermal control system and method. In a thermal control system of the type employing a two phase ... |
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2008
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Invention
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Thermal control system and method. A system (110) for improving the thermal efficiency of a therm... |
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2006
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Invention
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Thermal control system and method.
Improvements in systems and methods which employ a two-phase ... |
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Invention
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Method of processing a workpiece in a plasma reactor using feed forward thermal control.
A metho... |
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Invention
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Method for agile workpiece temperature control in a plasma reactor using a thermal model. A metho... |
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Invention
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Plasma reactor with wafer backside thermal loop, two-phase internal pedestal thermal loop and a c... |
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Invention
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Plasma reactor with feed forward thermal control system using a thermal model for accommodating r... |
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2005
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Invention
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Heat exchanger and temperature control unit. Systems and methods for heat exchange in accordance ... |
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Invention
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Thermal control system and method. A system and method for controlling the temperature of a proce... |
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2003
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Invention
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Pump driven by motor with fluid filled rotor. A motor/pump system which uses an enclosed rotor sh... |
