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2024
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Invention
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Imaging overlay targets using moiré elements and rotational symmetry arrangements.
A metrology t... |
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P/S
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Automated optical inspection and metrology system for advanced process control during manufacturi... |
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Invention
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Laser-sustained plasma generation in supersonic gas jets.
A LSP broadband light source is disclo... |
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Invention
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Mini environment instrumented wafer. A system and method for measuring substrate processing condi... |
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Invention
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Multiple pass optical measurements of semiconductor structures. Methods and systems for performin... |
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Invention
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Mini environment instrumented wafer.
A system and method for measuring substrate processing cond... |
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Invention
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Metrology in the presence of cmos under array (cua) structures utilizing model-less machine learn... |
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Invention
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Metrology in the presence of cmos under array (cua) structures utilizing machine learning and phy... |
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Invention
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Acoustic xenon droplet generator. A cup to hold liquid Xe is disposed in a vacuum chamber. The cu... |
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Invention
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Multiple pass optical measurements of semiconductor structures.
Methods and systems for performi... |
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Invention
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Metrology in the presence of cmos under array (cua) structures utilizing an effective medium mode... |
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Invention
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Acoustic xenon droplet generator.
A cup to hold liquid Xe is disposed in a vacuum chamber. The c... |
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Invention
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Optics for measurement of thick films and high aspect ratio structures. Methods and systems for p... |
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Invention
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System and method for detecting chemically contaminated samples. A sample contamination detection... |
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Invention
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System and method for aligning a wafer to a chuck. A wafer-chuck alignment system includes a meas... |
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Invention
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Autofocus method for single beam and multi-beam systems. An electron beam is directed at a workpi... |
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Invention
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Sliding outer tool enclosure. The system includes a tool disposed in an interior volume. An inner... |
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Invention
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Metrology of nanosheet surface roughness and profile. An inspection system includes a controller ... |
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Invention
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Combination of multiwavelength raman and spectroscopic ellipsometry to measure a film stack. A th... |
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Invention
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Grating-over-grating overlay measurement with parallel color per layer. An overlay metrology syst... |
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Invention
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Electron beam position detection and repositioning. A multichannel electrode tube includes at lea... |
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Invention
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Single grab pupil landscape via broadband illumination. A method for overlay metrology may includ... |
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Invention
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System and method for improving measurement performance of characterization systems. A method for... |
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Invention
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Dynamic freeform optics for lithography illumination beam shaping. The system includes a light so... |
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Invention
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Dynamic freeform optics for lithography illumination beam shaping.
The system includes a light s... |
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Invention
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High-precision alignable optical mounting. An optical assembly may include an optical element com... |
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Invention
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Deep learning based mode selection for inspection.
Methods and systems for determining informati... |
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Invention
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High-precision alignable optical mounting.
An optical assembly may include an optical element co... |
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Invention
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Electron beam position detection and repositioning.
A multichannel electrode tube includes at le... |
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Invention
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Wafer signature local maxima via clustering for metrology guided inspection. Methods and systems ... |
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Invention
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Method and system for bonding high fluence optics to opto-mechanical assemblies. A method for bin... |
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Invention
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Precision stylus control system.
The system includes a processor configured to energize a pair o... |
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Invention
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Height sensing system for electron beam metrology tool. A beam of light is directed at a workpiec... |
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Invention
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Angular averaging calibration on bare wafer metrology tools for esfqr matching improvement.
Meth... |
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Invention
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System and method for detecting chemically contaminated samples.
A sample contamination detectio... |
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Invention
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Method and system for bonding high fluence optics to optomechanical assemblies.
A method for bin... |
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Invention
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System and method for growth of quasi-phase matched strontium tetraborate and lithium triborate c... |
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Invention
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Wafer signature local maxima via clustering for metrology guided inspection.
Methods and systems... |
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Invention
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Methods of imaging path polarization control for defect detection sensitivity enhancement.
Metho... |
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P/S
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Downloadable and prerecorded computer software for use in process control and yield management fo... |
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2023
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P/S
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Downloadable computer (simulation) software for identifying stochastic defects in semiconductor w... |
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P/S
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Downloadable computer simulation software for identifying stochastic defects in semiconductor waf... |
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Invention
|
Single grab pupil landscape via broadband illumination.
A method for overlay metrology may inclu... |
|
|
Invention
|
Combination of multiwavelength raman and spectroscopic ellipsometry to measure a film stack.
A t... |
|
|
Invention
|
Grating-over-grating overlay measurement with parallel color per layer.
An overlay metrology sys... |
|
|
Invention
|
Optics for measurement of thick films and high aspect ratio structures.
Methods and systems for ... |
|
|
Invention
|
System and method for aligning a wafer to a chuck.
A wafer-chuck alignment system includes a mea... |
|
|
Invention
|
Autofocus method for single beam and multi-beam systems.
An electron beam is directed at a workp... |
|
|
Invention
|
Sliding outer tool enclosure.
The system includes a tool disposed in an interior volume. An inne... |
|
|
Invention
|
Metrology of nanosheet surface roughness and profile.
An inspection system includes a controller... |
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Invention
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System and method for improving measurement performance of characterization systems.
A method fo... |
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2022
|
P/S
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scientific instruments, namely, contacting instruments for use in inspection and measurement of s... |
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P/S
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Server hardware and computer hardware that utilizes various model-based and model-less machine le... |
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P/S
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Computer servers [computer hardware]; Computer hardware for network access servers; Computer hard... |
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2021
|
Invention
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Passivation of nonlinear optical crystals. The passivation of a nonlinear optical crystal for use... |
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P/S
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Apparatus and instruments for recording, transmitting, reproducing or processing sound, images or... |
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P/S
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Downloadable computer software platform for remote customer assistance, training, and communicati... |
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P/S
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Downloadable computer software platform for software startup, documentation, and customer engagem... |
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P/S
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Scientific, research, navigation, surveying, photographic, cinematographic, audiovisual, optical,... |
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2020
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P/S
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Data analytics computer hardware and prerecorded and
downloadable computer software for correcti... |
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P/S
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Downloadable and prerecorded computer software for use in
process control and yield management f... |
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P/S
|
Scientific, electrical and measuring apparatus and
instruments for determining and analyzing phy... |
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P/S
|
Computer hardware and downloadable and prerecorded computer
software for use in process control ... |
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P/S
|
Computer hardware and downloadable and prerecorded computer
software all for testing, inspecting... |
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P/S
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Data analytics computer hardware and prerecorded and downloadable computer software for correctin... |
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P/S
|
Downloadable computer simulation software used for
monitoring, controlling, accelerating and imp... |
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P/S
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Computer hardware, namely, computer server blade units to be
used in integrated circuits manufac... |
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P/S
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Scientific, electrical and measuring apparatus and instruments for determining and analyzing phys... |
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2019
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P/S
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Computer hardware and downloadable and prerecorded computer software for use in process control a... |
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P/S
|
Computer hardware and downloadable and prerecorded computer software all for testing, inspecting,... |
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P/S
|
Downloadable computer simulation software used for monitoring, controlling, accelerating and impr... |
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P/S
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Computer hardware, namely, computer server blade units to be used in integrated circuits manufact... |
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P/S
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Inspection system comprised of a laser, recorded computer
software, and computer hardware for te... |
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P/S
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Optical thin-film and surface measuring instruments, including, systems comprised of computers, s... |
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P/S
|
Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr... |
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P/S
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Inspection system comprised of a laser, recorded computer software, and computer hardware for tes... |
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2018
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P/S
|
Optical thin-film and surface measuring instruments, namely, systems comprised of computers, spec... |
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P/S
|
Computer hardware; computer hardware and software for
testing, inspecting, characterizing, and p... |
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P/S
|
Computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
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P/S
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Instruments for testing, inspecting, and characterizing physical properties of semiconductors and... |
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P/S
|
instruments for testing, inspecting, and characterizing physical properties of reticles; computer... |
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P/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
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P/S
|
Consulting services in the field of product inspection and testing for the semiconductor, integra... |
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P/S
|
computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
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P/S
|
instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
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P/S
|
metrology system comprised of computer software and computer hardware for testing and characteriz... |
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2017
|
P/S
|
Software for use in processing and analyzing data from electro-optical instruments, systems and p... |
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P/S
|
Computer hardware; semiconductor and wafer defect inspection systems comprised of computer softwa... |
