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2026
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P/S
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Semiconductor manufacturing apparatus, namely, physical vapor deposition (PVD) systems and magnet... |
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Invention
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Micro-lens array for metal-channel photomultiplier tube.
The effective quantum efficiency of a m... |
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P/S
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Computer software for scientific, academic, and industrial research, namely, computer software us... |
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P/S
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Computer software for use in the printed circuit board industry, namely, computer software for au... |
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Invention
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Low-reflectivity back-illuminated image sensor.
An image sensor for short-wavelength light inclu... |
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P/S
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Metrology apparatus for semiconductor manufacturing, namely, in-situ units for measuring thin fil... |
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P/S
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Computer software; computer software algorithms for semiconductor metrology and inspection; compu... |
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P/S
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Computer software for use in semiconductor manufacturing, namely, software for displaying customi... |
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P/S
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Hardware and software for operating and charging metrology equipment in semiconductor processing ... |
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P/S
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Downloadable and recorded computer software; application software; middleware; and application pr... |
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P/S
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Downloadable software applications and modules featuring generative artificial intelligence, mach... |
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P/S
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Laser scanning semiconductor inspection systems comprised of laser light sources, optical scanner... |
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Invention
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Simultaneous, multiple channel measurements of semiconductor structures at different nominal azim... |
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Invention
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Thermal pump with heat-exchanging displacer.
A thermal pump may include a cylinder having a hot ... |
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P/S
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Wireless wafers for measuring physical conditions such as temperature, pressure, vibration, humid... |
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2025
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Invention
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Overlay metrology system with direction-isolated imaging. An overlay metrology system may include... |
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Invention
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Split objective lens for electron beams to enhance topographical imaging. A system uses a split ... |
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Invention
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Methods and systems for mapping surface topography of semiconductor substrates. Methods and syste... |
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Invention
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Spectral overlay target. A metrology system including a measurement sub-system to collect zero-or... |
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Invention
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Ultra-high sensitivity hybrid inspection with full wafer coverage capability with step and settle... |
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Invention
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Bonded wafer metrology. A metrology system may include a light source providing illumination, a s... |
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Invention
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System and method for spectroscopic critical dimension measurement with two-dimensional detector ... |
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Invention
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Multiwavelength measurements for scanning overlay metrology. A metrology system and method for im... |
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Invention
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Coherent outside-the-lens imaging of moiré targets for overlay metrology. An overlay metrology sy... |
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Invention
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External motor actuator for an x/y stage. A positioning system may use an external motor actuator... |
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Invention
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Method and system of growing and using cesium lithium borate crystals.
A method and system for... |
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Invention
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Methods and systems for measurement of large dimension structures fabricated using semiconductor ... |
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Invention
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Zero-order overlay metrology. A metrology system may include an illumination source to generate o... |
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Invention
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Spectral range extension for laser-sustained plasma light collection. A laser-sustained broadband... |
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Invention
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Overlay metrology target. An overlay target may include a first bonded substrate arranged on a fi... |
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Invention
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Vuv laser-sustained plasma light source with direct gas flow. A high-power vacuum ultraviolet las... |
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Invention
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Methods and systems of film frame pre-alignment for semiconductor measurement equipment. Methods ... |
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Invention
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Vuv laser-sustained plasma light source with direct gas flow.
A high-power vacuum ultraviolet la... |
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P/S
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Recorded computer software that utilizes various model-based and model-less machine learning appr... |
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Invention
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Automated focusing system for tracking specimen surface with a configurable focus offset.
An aut... |
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Invention
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Encoding design information for a specimen for runtime use in inspection and other processes. Met... |
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Invention
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High power 193 nanometer continuous-wave laser light. A laser assembly and a method for generatin... |
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Invention
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Lateral shearing interferometry for surface profile measurement of pattern wafers. A system may i... |
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Invention
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Machine learning based metrology upsampling using a transformer architecture. Methods and systems... |
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Invention
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Spectral range extension for laser-sustained plasma light collection.
A laser-sustained broadban... |
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Invention
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Refillable lamp for laser sustained plasma light source.
A refillable plasma lamp assembly for l... |
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Invention
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Multi axes motion mechanism enabling multiple optical columns metrology system. The system includ... |
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Invention
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Methods and systems of film frame pre-alignment for semiconductor measurement equipment.
Methods... |
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Invention
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Feature transformer architecture for advanced semiconductor metrology.
Methods and systems for m... |
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Invention
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Lateral shearing interferometry for surface profile measurement of pattern wafers.
A system may ... |
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Invention
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Method and apparatus for the enhanced optics protection from the adverse effects of plasma under ... |
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Invention
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Overlay metrology system with direction-isolated imaging.
An overlay metrology system may includ... |
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P/S
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Imaging metrology tools, namely, scientific and electronic imaging instruments for inspecting and... |
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P/S
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Apparatus and instruments for physics, namely, measuring devices for monitoring and measuring env... |
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P/S
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Apparatus and instruments for physics, namely, in-situ semiconductor process temperature measurem... |
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P/S
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Apparatus and instruments for physics, namely, extreme ultraviolet (EUV) radiation-measurement wa... |
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P/S
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Apparatus and instruments for physics, namely, ultraviolet (UV) radiation-measurement wafers equi... |
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P/S
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Apparatus and instruments for physics, namely, in-situ semiconductor process pressure and tempera... |
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P/S
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Apparatus and instruments for physics, namely, in-situ semiconductor process monitoring systems c... |
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P/S
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Apparatus and instruments for physics, namely, automated front-opening unified pods (FOUPs) being... |
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P/S
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Apparatus and instruments for physics, namely, wafer temperature measurement devices, in situ tem... |
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P/S
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Apparatus and instruments for physics, namely, process monitoring wafers, in-situ process monitor... |
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P/S
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Apparatus and instruments for wafer processing chambers, namely, semiconductor wafer temperature ... |
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P/S
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Imaging metrology tools, namely, scientific and electronic imaging instruments in the nature of o... |
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Invention
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Overlay metrology target.
An overlay target may include a first bonded substrate arranged on a f... |
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2024
|
Invention
|
Split objective lens for electron beam to enhance topographical imaging.
A system uses a split o... |
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Invention
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Spectral overlay target.
A metrology system including a measurement sub-system to collect zero-o... |
|
|
Invention
|
Methods and systems for mapping surface topography of semiconductor substrates.
Methods and syst... |
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Invention
|
Hyperspectral inspection system.
A hyperspectral inspection system is disclosed. The hyperspectr... |
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Invention
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Bonded wafer metrology.
A metrology system may include a light source providing illumination, a ... |
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Invention
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External motor actuator for an x/y stage.
A positioning system may use an external motor actuato... |
|
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Invention
|
Coherent outside-the-lens imaging of moiré targets for overlay metrology.
An overlay metrology s... |
|
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Invention
|
Multiwavelength measurements for scanning overlay metrology.
A metrology system and method for i... |
|
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Invention
|
Zero-order overlay metrology.
A metrology system may include an illumination source to generate ... |
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Invention
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Encoding design information for a specimen for runtime use in inspection and other processes.
Me... |
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P/S
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Automated optical inspection and metrology system for advanced process control during manufacturi... |
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P/S
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Automated optical inspection and metrology system comprised primarily of computers, computer hard... |
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P/S
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Downloadable and prerecorded computer software for use in process control and yield management fo... |
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2023
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P/S
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Downloadable computer (simulation) software for identifying stochastic defects in semiconductor w... |
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2022
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P/S
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scientific instruments, namely, contacting instruments for use in inspection and measurement of s... |
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P/S
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Computer servers [computer hardware]; Computer hardware for network access servers; Computer hard... |
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2021
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P/S
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Apparatus and instruments for recording, transmitting, reproducing or processing sound, images or... |
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P/S
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Downloadable computer software platform for remote customer assistance, training, and communicati... |
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P/S
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Downloadable computer software platform for software startup, documentation, and customer engagem... |
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P/S
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Scientific, research, navigation, surveying, photographic, cinematographic, audiovisual, optical,... |
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2020
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P/S
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Data analytics computer hardware and prerecorded and
downloadable computer software for correcti... |
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P/S
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Downloadable and prerecorded computer software for use in
process control and yield management f... |
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P/S
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Scientific, electrical and measuring apparatus and
instruments for determining and analyzing phy... |
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P/S
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Computer hardware and downloadable and prerecorded computer
software for use in process control ... |
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P/S
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Computer hardware and downloadable and prerecorded computer
software all for testing, inspecting... |
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P/S
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Data analytics computer hardware and prerecorded and downloadable computer software for correctin... |
