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2025
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P/S
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Apparatus and instruments for physics; Diagnostic equipment for research laboratory use; Marine n... |
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P/S
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Imaging metrology tools, namely, scientific and electronic imaging instruments for inspecting and... |
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Invention
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Supercritical fluid cleaning for components in optical or electron beam systems.
To clean compon... |
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Invention
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Calibrated measurement of overlay error using small targets.
A method for semiconductor metrolog... |
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2024
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Invention
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Measurements of complex semiconductor structures based on component measurement signals. Methods ... |
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Invention
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Measurements of complex semiconductor structures based on component measurement signals.
Methods... |
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Invention
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System and method of finding pixel-to-design target for dram inspection. A system and method for ... |
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Invention
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Position feedback sensor using out-of-band wavelengths. An assembly is in a path of a beam of lig... |
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Invention
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Diffraction-based illumination sampling. An illumination system may include an optical homogenize... |
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Invention
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System and method for overlay metrology using a phase mask. An overlay metrology system is disclo... |
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Invention
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System and method for in-situ swath positioning. A method for in-situ swath positioning includes ... |
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Invention
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Position feedback sensor using out-of-band wavelengths.
An assembly is in a path of a beam of li... |
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Invention
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Transistor channel stress and mobility metrology using multi-pass spectroscopic ellipsometry and ... |
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Invention
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Transistor channel stress and mobility metrology using multipass spectroscopic ellipsometry and r... |
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Invention
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Optical and x-ray metrology methods for patterned semiconductor structures with randomness. Metho... |
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Invention
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Yield improvements in stacked packaging. Shape-changed induced stress for a target thickness of a... |
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Invention
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Back-illuminated sensor and method of making same. An image sensor includes a p-type silicon laye... |
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Invention
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Stage motion profile system and method. A system for generating a motion profile is disclosed. Th... |
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Invention
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Metrology method of calibrating and monitoring radiation in euv lithographic systems. An instrume... |
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Invention
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Back-illuminated sensor and method of making same.
An image sensor includes a p-type silicon lay... |
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Invention
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Overlay mark design enabling large overlay measurement. An overlay metrology system may receive i... |
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Invention
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Yield improvements in stacked packaging.
Shape-changed induced stress for a target thickness of ... |
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Invention
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Single wafer orientation tool-induced shift cleaning. A metrology system may include a spectrosco... |
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Invention
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Single wafer orientation tool-induced shift cleaning.
A metrology system may include a spectrosc... |
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Invention
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Methods and systems for spectral measurements based on perturbed spectra. Methods and systems for... |
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Invention
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Methods and systems for spectral measurements based on perturbed spectra.
Methods and systems fo... |
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Invention
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Spectra delta metrology. An inspection system may receive first measurement data of training samp... |
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Invention
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Monitoring of hf in buffered hydrofluoric acid (bhf). 444F, which demonstrates a substantial accu... |
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Invention
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Massive measurement sampling using multiple chucks and optical columns. A measurement system may ... |
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Invention
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Multi-thickness overlay measurement system. A measurement system is disclosed. The measurement sy... |
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Invention
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Defect synthesis and detection via defect generative pre-trained transformer for semiconductor ap... |
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Invention
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Metrology system with twin planar motor stage. A system includes a stator, and a first carrier an... |
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Invention
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Pick and place head with automatic pitch adjustment.
A transfer head may include a plurality of ... |
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Invention
|
System and method for in-situ swath positioning.
A method for in-situ swath positioning includes... |
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Invention
|
Diffraction-based illumination sampling.
An illumination system may include an optical homogeniz... |
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P/S
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Automated optical inspection and metrology system for advanced process control during manufacturi... |
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Invention
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Monitoring of hf in buffered hydrofluoric acid (bhf).
The disclosed subject matter relates to me... |
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Invention
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Integrated non-contact cleaning and inspection system and method for electronic components. An in... |
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Invention
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Metrology method of calibrating and monitoring radiation in euv lithographic systems.
An instrum... |
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Invention
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Enhanced modes for scanning acoustic microscope inspection in semiconductor inspection.
A scanni... |
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Invention
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Multi-thickness overlay measurement system.
A measurement system is disclosed. The measurement s... |
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Invention
|
Spectra delta metrology.
An inspection system may receive first measurement data of training sam... |
|
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Invention
|
Metrology system with twin planar motor stage.
A system includes a stator, and a first carrier a... |
|
|
Invention
|
Optical and x-ray metrology methods for patterned semiconductor structures with randomness.
Meth... |
|
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Invention
|
Overlay mark design enabling large overlay measurement.
An overlay metrology system may receive ... |
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P/S
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Downloadable and prerecorded computer software for use in process control and yield management fo... |
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2023
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Invention
|
System and method of finding pixel-to-design target for dram inspection.
A system and method for... |
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Invention
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In-situ in-band and out-of-band spectral measurement for euv tools. ABSTRACT A substrate is mount... |
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Invention
|
System and method for overlay metrology using a phase mask.
An overlay metrology system is discl... |
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Invention
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In-situ in-band and out-of-band spectral measurement for euv tools.
A substrate is mounted on a ... |
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Invention
|
Stage motion profile system and method.
A system for generating a motion profile is disclosed. T... |
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P/S
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Downloadable computer (simulation) software for identifying stochastic defects in semiconductor w... |
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P/S
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Downloadable computer simulation software for identifying stochastic defects in semiconductor waf... |
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Invention
|
Massive measurement sampling using multiple chucks and optical columns.
A measurement system may... |
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Invention
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Metrology in the presence of cmos under array (cua) structures utilizing model-less machine learn... |
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2022
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P/S
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scientific instruments, namely, contacting instruments for use in inspection and measurement of s... |
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P/S
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Server hardware and computer hardware that utilizes various model-based and model-less machine le... |
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P/S
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Computer servers [computer hardware]; Computer hardware for network access servers; Computer hard... |
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2021
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P/S
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Apparatus and instruments for recording, transmitting, reproducing or processing sound, images or... |
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P/S
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Downloadable computer software platform for remote customer assistance, training, and communicati... |
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P/S
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Downloadable computer software platform for software startup, documentation, and customer engagem... |
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P/S
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Scientific, research, navigation, surveying, photographic, cinematographic, audiovisual, optical,... |
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2020
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P/S
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Data analytics computer hardware and prerecorded and
downloadable computer software for correcti... |
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P/S
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Downloadable and prerecorded computer software for use in
process control and yield management f... |
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P/S
|
Scientific, electrical and measuring apparatus and
instruments for determining and analyzing phy... |
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P/S
|
Computer hardware and downloadable and prerecorded computer
software for use in process control ... |
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P/S
|
Computer hardware and downloadable and prerecorded computer
software all for testing, inspecting... |
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P/S
|
Data analytics computer hardware and prerecorded and downloadable computer software for correctin... |
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P/S
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Downloadable computer simulation software used for
monitoring, controlling, accelerating and imp... |
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P/S
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Computer hardware, namely, computer server blade units to be
used in integrated circuits manufac... |
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P/S
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Scientific, electrical and measuring apparatus and instruments for determining and analyzing phys... |
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2019
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P/S
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Computer hardware and downloadable and prerecorded computer software for use in process control a... |
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P/S
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Computer hardware and downloadable and prerecorded computer software all for testing, inspecting,... |
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P/S
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Downloadable computer simulation software used for monitoring, controlling, accelerating and impr... |
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P/S
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Computer hardware, namely, computer server blade units to be used in integrated circuits manufact... |
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P/S
|
Inspection system comprised of a laser, recorded computer
software, and computer hardware for te... |
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P/S
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Optical thin-film and surface measuring instruments, including, systems comprised of computers, s... |
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P/S
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Computer hardware; computer hardware and software for testing, inspecting, characterizing, and pr... |
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P/S
|
Inspection system comprised of a laser, recorded computer software, and computer hardware for tes... |
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2018
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P/S
|
Optical thin-film and surface measuring instruments, namely, systems comprised of computers, spec... |
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P/S
|
Computer hardware; computer hardware and software for
testing, inspecting, characterizing, and p... |
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P/S
|
Computer hardware and software used for testing, inspecting, characterizing, and predicting physi... |
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P/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductors and... |
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P/S
|
instruments for testing, inspecting, and characterizing physical properties of reticles; computer... |
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P/S
|
Instruments for testing, inspecting, and characterizing physical properties of semiconductor wafe... |
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P/S
|
Consulting services in the field of product inspection and testing for the semiconductor, integra... |
