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2019
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Invention
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Recycled polishing pad. A recycled polishing pad includes an upper layer pad and a supplementary ... |
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2016
|
Invention
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Porous polishing pad and preparing method of the same.
The present disclosure relates to a porou... |
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Invention
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Polishing pad and preparing method thereof. The present disclosure relates to a porous polishing ... |
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2014
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Invention
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Polishing pad having micro-grooves on the pad surface. A polishing pad is provided herein, which ... |
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Invention
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Multi-layered chemical-mechanical planarization pad. The present disclosure relates to a chemical... |
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2013
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Invention
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Chemical-mechanical planarization pad including patterned structural domains. An aspect of the pr... |
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Invention
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Method of manufacturing a chemical mechanical planarization pad.
The present disclosure relates ... |
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2010
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Invention
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Method of grooving a chemical-mechanical planarization pad. 2), wherein (X) has a value in the ra... |
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2009
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Invention
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Fabric containing non-crimped fibers and methods of manufacture. A chemical-mechanical planarizat... |
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2008
|
Invention
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Chemical-mechanical planarization pad. The present disclosure relates to a polishing pad includin... |
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Invention
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Chemical-mechanical planarization pad. The present disclosure relates to a polishing pad. The pol... |
|
|
Invention
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Three-dimensional network in cmp pad. 3, and wherein the interconnecting elements have a length b... |
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Invention
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Polishing pad with controlled void formation. A chemical-mechanical planarization polishing pad i... |
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Invention
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Chemical mechanical planarization pad with void network. A polishing pad and a method of producin... |
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Invention
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Chemical-mechanical planarization pad having end point detection window. A chemical mechanical po... |
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Invention
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Polishing pad. An improved polishing pad for polishing semi-conductors and other planar substrate... |
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2003
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Invention
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Polishing pads useful in chemical mechanical polishing of substrates in the presence of a slurry ... |
