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2023
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Invention
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System and methods using an inline surface engineering source.
A system having an auxiliary plas... |
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Invention
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Techniques for controlling precursors in chemical deposition processes. An apparatus for controll... |
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2021
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Invention
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Semiconductor manufacturing device with embedded fluid conduits.
Provided herein are approaches ... |
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Invention
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Techniques and apparatus for elongation patterning using angled ion beams.
A method of patternin... |
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Invention
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System and methods using an inline surface engineering source. A system having an auxiliary plasm... |
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Invention
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Techniques to engineer nanoscale patterned features using ions. A method of patterning a substrat... |
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2020
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Invention
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Spacer sculpting for forming semiconductor devices. A method may include forming in a substrate a... |
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Invention
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In-situ plasma cleaning of process chamber components. Provided herein are approaches for in-situ... |
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Invention
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Optical component having variable depth gratings and method of formation. An optical grating comp... |
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Invention
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System and tool for cleaning a glass surface of an accelerator column. A cleaning tool for cleani... |
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Invention
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Apparatus and techniques for generating bunched ion beam. An ion implantation system, including a... |
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Invention
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Dual cathode ion source. An ion source having dual indirectly heated cathodes is disclosed. Each ... |
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Invention
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Device structure for forming semiconductor device having angled contacts. A memory device may inc... |
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Invention
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System and method for optimally forming gratings of diffracted optical elements. Optical grating ... |
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Invention
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Extreme edge uniformity control. A workpiece processing apparatus allowing independent control of... |
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Invention
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Apparatus and techniques for generating bunched ion beam. An apparatus may include a first ground... |
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Invention
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System and method for forming diffracted optical element having varied gratings. Embodiments here... |
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Invention
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Dynamic random access device including two-dimensional array of fin structures. A method may incl... |
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Invention
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Method and apparatus for non line-of-sight doping. A method of doping a substrate. The method may... |
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Invention
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Hydrophobic shafts for use in process chambers. A system that reduces the amount of water that en... |
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2019
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Invention
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Structure and method of forming fin device having improved fin liner. A method for forming a semi... |
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Invention
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Method and device isolation structure in finfet. A method of forming a semiconductor device. The ... |
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Invention
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Performance improvement of euv photoresist by ion implantation. A method of patterning a substrat... |
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Invention
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Filling a cavity in a substrate using sputtering and deposition.
A method may include providing ... |
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Invention
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Apparatus and techniques for beam mapping in ion beam system.
An apparatus for monitoring of an ... |
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Invention
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Extraction apparatus and system for high throughput ion beam processing. In one embodiment, an io... |
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Invention
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Foam in ion implantation system. Disclosed is a semiconductor processing apparatus including one ... |
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Invention
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Novel apparatus and techniques for generating bunched ion beam. An apparatus may include a first ... |
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Invention
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Angular control of ion beam for vertical surface treatment. Provided herein are techniques for tr... |
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Invention
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Insertable target holder for solid dopant materials. An ion source with an insertable target hold... |
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Invention
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Ion source thermal gas bushing. A system for reducing clogging and deposition of feed gas on a ga... |
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Invention
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System and method to detect glitches. A glitch monitoring system is disclosed. The glitch monitor... |
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Invention
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Anti-reflective coating for transparent end effectors. A workpiece support, such as an end effect... |
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Invention
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Techniques, system and apparatus for selective deposition of a layer using angled ions. A method ... |
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2018
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Invention
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Selective photoresist etching for bridge defect removal. Disclosed are methods for removing bridg... |
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Invention
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Silicon carbide substrate heating. A system and method for heating silicon carbide substrates is ... |
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Invention
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Gate spacer formation for scaled cmos devices. Disclosed are methods of forming a CMOS device. On... |
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Invention
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Conductive beam optics for reducing particles in ion implanter. Provided herein are approaches fo... |
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2010
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Invention
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Platen to control charge accumulation. An embossed platen to control charge accumulation includes... |
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P/S
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Solar cell processing machines and processing equipment, namely, ion implanters |
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2008
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P/S
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Semiconductor manufacturing machines; Semiconductor wafer processing equipment; Semiconductor waf... |
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2006
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P/S
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Semiconductor manufacturing equipment, namely, a substrate masking apparatus preferably for use w... |
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2000
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P/S
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Semiconductor manufacturing machines; logic chip manufacturing machines; memory chip manufacturin... |
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1999
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P/S
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Semiconductor manufacturing equipment, namely, ion implanters |
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P/S
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Semiconductor manufacturing machines, namely, ion implanters |
