2025
|
P/S
|
Semiconductor manufacturing equipment used to densify materials on wafers |
|
P/S
|
Semiconductor wafer processing equipment and components, namely, chemical mechanical polishers an... |
|
P/S
|
Optical defect inspection equipment in the nature of an optical microscope used for inspecting an... |
|
P/S
|
Semiconductor wafer processing equipment used for implanting different materials into wafers. |
|
P/S
|
Operational software for the quality control, and measurement of semiconductor materials, namely,... |
|
P/S
|
Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
|
P/S
|
Semiconductor manufacturing equipment used to densify
materials on wafers. |
|
P/S
|
Semiconductor wafer processing chamber for depositing
dielectric materials. |
|
Invention
|
Modular chemical mechanical polisher with simultaneous polishing and pad treatment.
The present ... |
|
Invention
|
Tunability of dopant concentration in thin hafnium oxide films.
Methods of depositing thin films... |
|
Invention
|
Monolithic complementary field-effect transistors having carbon-doped release layers.
Embodiment... |
|
Invention
|
Arsenic diffusion profile engineering for transistors.
Embodiments of the present disclosure rel... |
|
P/S
|
semiconductor wafer processing chamber for depositing dielectric materials |
|
Invention
|
Methods and mechanisms for preventing fluctuation in machine-learning model performance.
An elec... |
|
P/S
|
Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
|
P/S
|
O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
|
Invention
|
Machine vision as input to a cmp process control algorithm.
During chemical mechanical polishing... |
|
Invention
|
Conditioning of a processing chamber.
A method for cleaning one or more interior surfaces of a p... |
|
Invention
|
Encapsulation materials for flat optical devices.
Embodiments described herein relate to flat op... |
|
P/S
|
O-rings, non-metal gaskets, non-metal seals, and elastomer seals for use in semiconductor manufac... |
|
Invention
|
Eco-efficiency monitoring and exploration platform for semiconductor manufacturing.
A method inc... |
|
P/S
|
Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
2024
|
P/S
|
Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
|
Invention
|
Unification of backside stress mitigation with frontside protection in semiconductor manufacturin... |
|
Invention
|
Radical species recombination in substrate processing systems.
A system includes a plasma source... |
|
Invention
|
Trench overhang for si-ap. In one or more embodiments, a sub-pixel circuit includes a first sub-p... |
|
Invention
|
Uniform gapfill deposition on semiconductor substrates with varying geometries. A gapfill precurs... |
|
Invention
|
Halide-free co-reactants for molybdenum film deposition. Methods for depositing molybdenum-contai... |
|
Invention
|
Cross flow gas delivery for particle reduction. Gas distribution apparatus comprising a backing p... |
|
Invention
|
Interferometry-based temperature monitoring in manufacturing systems. Disclosed systems and techn... |
|
Invention
|
Interferometry-based temperature monitoring in manufacturing systems.
Disclosed systems and tech... |
|
Invention
|
Control of anisotropic deformation with directional stress modulation for device manufacturing. D... |
|
Invention
|
Methods for enabling chemical mechanical polishing and bonding of aluminum-containing materials. ... |
|
Invention
|
High resolution advanced oled sub-pixel circuit and patterning method.
Embodiments described her... |
|
P/S
|
Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
|
Invention
|
Flow-through edge shield to lessen current crowding effects during wafer electroplating. An edge ... |
|
Invention
|
Reconfigurable package integrated electro magnetic interference shielding. A tunable shielding sy... |
|
P/S
|
Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
|
Invention
|
Photo-emitting plasma for activation in processing chambers, and related apparatus and methods. T... |
|
Invention
|
Development for chemically amplified resists. Embodiments described herein relate to a method for... |
|
P/S
|
Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
|
Invention
|
Esd prevention by resistive coatings of robot end effector fingers and conductive pad. An end eff... |
|
P/S
|
Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
|
Invention
|
Hardware design with independent control to improve wiw uniformity. A baffle for providing proces... |
|
Invention
|
Sensor substrate and integrated sensing surfaces. Embodiments disclosed herein include sensor mod... |
|
Invention
|
Development for chemically amplified resists.
Embodiments described herein relate to a method fo... |
|
Invention
|
Adapting ion implant model during maintenance recovery. Techniques to adapt an ion implant model ... |
|
Invention
|
High resolution advanced oled sub-pixel circuit and patterning method. Embodiments described here... |
|
Invention
|
Substrate warpage reduction. Embodiments disclosed herein include a processing system. The proces... |
|
Invention
|
High temperature auto teach calibration disc. A calibration disc is inserted into a processing ch... |
|
Invention
|
Cooling station. A cooling station is provided including one or more cooling plates configured to... |
|
P/S
|
Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
|
P/S
|
Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
|
P/S
|
Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
|
P/S
|
Semiconductor wafer processing equipment. |
|
P/S
|
Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
|
P/S
|
Inspection machines for the inspection of semiconductor wafers to inspect darkfield defects, name... |
|
P/S
|
Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
|
P/S
|
Semiconductor wafer processing equipment including equipment for manufacturing OLED (Organic ligh... |
|
P/S
|
Semiconductor manufacturing equipment used to deposit metal
on wafers. |
|
P/S
|
Semiconductor manufacturing equipment used to deposit
materials on substrates. |
|
P/S
|
Providing non-downloadable electronic publications featuring
information about the environment, ... |
|
P/S
|
Eco-efficient semiconductor wafer processing equipment. Software-controlled, eco-efficient system... |
|
P/S
|
Optical devices for high performance photonic applications. |
|
P/S
|
Equipment for testing chemical delivery systems including
ampoules or containers. Downloadable a... |
|
P/S
|
Downloadable and/or recordable software for creating
semiconductor fabrication recipes. |
|
P/S
|
Equipment for delivery systems, namely, containers made of
metal for storing and delivering chem... |
|
P/S
|
Recorded computer software used for running, tracking, and
providing feedback for on-tool metrol... |
|
P/S
|
Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
|
P/S
|
Semiconductor wafer processing equipment used for implanting different materials into wafers |
|
P/S
|
Semiconductor manufacturing equipment used to remove
material from substrates. |
|
P/S
|
Semiconductor manufacturing software used to provide wafer
doping uniformity. |
|
P/S
|
Semiconductor wafer processing equipment for modifying film
properties of substrates. |
|
P/S
|
Semiconductor manufacturing machines used to deposit metal
on wafers. |
|
P/S
|
Semiconductor processing equipment components, namely,
chambers used to deposit materials on sub... |
|
P/S
|
Semiconductor manufacturing machines used to remove material
from wafers. |
|
P/S
|
Semiconductor wafer processing equipment, namely, semiconductor processing chamber used to deposi... |
2023
|
Invention
|
Ultrasonic conditioning disk cleaning module.
Embodiments of the disclosure include a conditioni... |
|
Invention
|
Pulsed voltage waveform biasing of plasma.
Embodiments of the disclosure include apparatus (e.g.... |
|
Invention
|
High-temperature implant for gate-all-around devices.
Approaches herein provide devices and meth... |
|
Invention
|
Wafer total thickness variation using maskless implant.
Embodiments herein are directed to local... |
|
Invention
|
Uniform gapfill deposition on semiconductor substrates with varying geometries.
A gapfill precur... |
|
Invention
|
Implant for transistor bitline contact and junction formation.
Approaches herein provide devices... |
|
Invention
|
Reconfigurable package integrated electro magnetic interference shielding.
A tunable shielding s... |
|
Invention
|
Cross flow gas delivery for particle reduction.
Gas distribution apparatus comprising a backing ... |
|
Invention
|
Flow-through edge shield to lessen current crowding effects during wafer electroplating.
An edge... |
|
Invention
|
Halide-free co-reactants for molybdenum film deposition.
Methods for depositing molybdenum-conta... |
|
Invention
|
Measurement system for measuring a thickness of a layer on a substrate, deposition apparatus, met... |
|
Invention
|
Photo-emitting plasma for activation in processing chambers, and related apparatus and methods.
... |
|
Invention
|
Sensor substrate and integrated sensing surfaces.
Embodiments disclosed herein include sensor mo... |
|
Invention
|
Deposition of resist underlayer for enhancing photoresist performance.
The present disclosure ge... |
|
Invention
|
Novel embedded nano porous caps.
A capacitor may include a substrate may include a cavity. The c... |
|
Invention
|
Fault event recovery in multi-slot processing chambers.
A method includes causing initiation of ... |