|
2024
|
Invention
|
Metrology using joint angle and wavelength scattering. Embodiments of the present disclosure rela... |
|
|
Invention
|
Measuring contamination accumulated on a semiconductor specimen. A system for monitoring an exten... |
|
|
Invention
|
Optical systems and methods of providing a coupling mirror to an optical system.
The present dis... |
|
|
Invention
|
Methods of designing objective lens arrangements.
The present disclosure relates to a method of ... |
|
|
Invention
|
Method for illuminating a substrate using a single acousto optical device.
A method and a system... |
|
|
Invention
|
Robot blade and wafer breakage prevention system. An apparatus that includes an end effector for ... |
|
|
Invention
|
Novel method to more precisely calibrate the mechanical tilt and rotation angles of an sem column... |
|
|
Invention
|
Defect depth estimation for a semiconductor specimen.
There is provided a system and method of e... |
|
|
Invention
|
Entropy based image processing for focused ion beam delayer - edge slices detection. A method of ... |
|
|
Invention
|
Novel flow for high resolution stereoscopic measurements. A method of determining a depth of a ho... |
|
|
Invention
|
Moveable support to secure electrically conductive and nonconductive samples in a vacuum chamber.... |
|
|
Invention
|
Optimal determination of an overlay target using machine learning.
There are provided systems an... |
|
|
Invention
|
Optical inspection systems with pulsed light sources and pulse multiplexing.
Implementations dis... |
|
|
Invention
|
Laser pulse cascade.
An illumination module of a wafer inspection system including: an illuminat... |
|
2023
|
Invention
|
Vacuum chuck for high warpage wafers.
A vacuum chuck for supporting a sample, the vacuum chuck c... |
|
|
Invention
|
Depth profiling of semiconductor structures using multi-wavelength pump-probe technique.
A syste... |
|
|
Invention
|
Non-destructive three-dimensional probing and characterization of specimens.
Disclosed herein is... |
|
|
Invention
|
Machine learning based defect examination and ranking for semiconductor specimens.
There is prov... |
|
|
Invention
|
Automatic calibration of an examination tool.
There are provided systems and methods of calibrat... |
|
|
Invention
|
Model-based acousto-optic depth-metrology of specimens.
Disclosed herein is a method for non-des... |
|
|
Invention
|
Method and system for calibration of diffraction angles.
Disclosed are method and system for cal... |
|
|
Invention
|
Support unit.
A support unit for supporting a supported element, including (a) a spherical joint... |
|
|
Invention
|
Machine learning based defect examination for semiconductor specimens.
There is provided a syste... |
|
|
Invention
|
Substrate pre-aligner.
A substrate alignment system that includes (i) an illumination unit that ... |
|
|
Invention
|
Robot blade and wafer breakage prevention system.
An apparatus that includes an end effector for... |
|
|
Invention
|
Coupling mirror of an optical inspection system.
A system for scanning a surface including: an i... |
|
|
Invention
|
Method to more precisely calibrate the mechanical tilt and rotation angles of an sem column.
A m... |
|
|
Invention
|
Pulse stretcher system and method.
A pulse stretcher unit, and a respecting inspection system ar... |
|
|
Invention
|
Image segmentation for examining a semiconductor specimen.
A system for examining a semiconducto... |
|
|
Invention
|
Optimization of a metrology algorithm for examination of semiconductor specimens.
There is provi... |
|
|
Invention
|
Substrate safety system.
A substrate safety system that includes (i) a control unit that is conf... |
|
|
Invention
|
Discharging a region of a sample.
A system for discharging a region of a sample, the system incl... |
|
|
Invention
|
Scanning electron microscopy-based tomography of specimens.
Disclosed herein is a system for non... |
|
|
Invention
|
Electron beam spot shape reconstruction unit.
An electron beam spot shape reconstruction unit th... |
|
|
Invention
|
Positioning system.
A positioning system that includes (a) a linear motor that includes a movabl... |
|
|
Invention
|
Multiple electron beam optics.
Multiple electron beam optics that includes a detection unit that... |
|
|
Invention
|
Entropy based image processing for focused ion beam delayer-edge slices detection. A method of de... |
|
|
Invention
|
Flow for high resolution stereoscopic measurements.
A method of determining a depth of a hole mi... |
|
|
Invention
|
High voltage noise cancellation.
A high voltage noise reduction unit that includes (i) an input ... |
|
|
Invention
|
Sample related system that includes a load lock.
A sample related system that includes a vacuum ... |
|
|
Invention
|
Optimal determination of an overlay target.
There are provided systems and methods comprising ob... |
|
|
Invention
|
Methods and systems for microscopy.
The presently disclosed subject matter provides a method for... |
|
|
Invention
|
Machine learning based yield prediction.
There is provided a system and method of examination of... |
|
|
Invention
|
Machine learning based examination for process monitoring.
There is provided a system and method... |
|
|
Invention
|
Securing a wafer to a chuck. A system that includes a vacuum module that includes a first vacuum ... |
|
|
Invention
|
Coupling mirror of an optical inspection system.
A wafer inspection tool comprising an illuminat... |
|
|
Invention
|
Non-destructive classification of specimens based on energy signature measurements.
Disclosed he... |
