|
2024
|
Invention
|
Plasma generator and method of using same.
A plasma generator and a method of using the same are... |
|
|
Invention
|
Triple-electrode device for fusing and mixing device of mixed gas/separated gas.
A triple-electr... |
|
2017
|
Invention
|
Surface treatment apparatus using plasma. The present invention relates to a surface treatment ap... |
|
|
Invention
|
Plasma generator. Provided is a plasma generator for improving uniformity of plasma. The plasma g... |
|
|
Invention
|
Plasma generator apparatus.
Provided is a plasma generator apparatus for forming a thin film in ... |
|
2012
|
Invention
|
Plasma generating apparatus and plasma etching method using the same.
A plasma generating appara... |
|
2011
|
Invention
|
Plasma generating apparatus.
Provided is a plasma generating apparatus. The plasma generating ap... |
|
2010
|
Invention
|
Apparatus for generating plasma. An apparatus for generating plasma is provided. The apparatus ma... |
|
|
Invention
|
Plasma generating apparatus. A plasma generating apparatus is provided. The plasma generating app... |
|
|
Invention
|
Plasma source for large size substrate. A plasma source for a substrate is provided. The plasma s... |
|
2008
|
Invention
|
Plasma generating apparatus having antenna with impedance controller. Provided is a plasma genera... |
|
|
Invention
|
Plasma generating apparatus.
Provided is a plasma generating apparatus. The apparatus includes a... |
|
|
Invention
|
Plasma generating apparatus. Provided is a plasma generating apparatus. The apparatus includes a ... |
|
2007
|
Invention
|
Plasma generating apparatus. Provided is a plasma generating apparatus. The plasma generating app... |
