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2025
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Invention
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Thin film forming method. 222) includes a step for supplying a titanium (Ti)-containing gas onto ... |
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Invention
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Method for forming carbon layer and substrate processing method using same. The present invention... |
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Invention
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Partition wall of substrate support part, substrate support part, and substrate processing appara... |
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P/S
|
Semiconductor processing machines; low pressure chemical vapor deposition machines; plasma chemic... |
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Invention
|
Method for forming metal oxide film. The present invention relates to a method for forming a meta... |
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Invention
|
Substrate processing apparatus. The present invention relates to a substrate processing apparatus... |
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Invention
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Substrate processing device and thin film formation method. The present invention relates to a su... |
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Invention
|
Substrate processing system and substrate processing method. The present invention relates to a s... |
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Invention
|
Method for forming graphene layer and method for manufacturing electronic device using same. The ... |
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Invention
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Method for forming iii-v thin film. The present invention relates to a method for forming a III-V... |
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Invention
|
Substrate support apparatus, substrate processing equipment and substrate processing method. The ... |
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P/S
|
Semiconductor processing machines; low pressure chemical vapor deposition machines for use in man... |
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Invention
|
Thin film forming method. The present invention relates to a thin film forming method and, more s... |
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Invention
|
Electronic element including light-receiving element and light-emitting element, and display devi... |
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Invention
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Gas injection apparatus, substrate processing apparatus, and thin film formation method. The pres... |
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Invention
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Raw material supply device, substrate processing device, and raw material supply method. The pres... |
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2024
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P/S
|
Etching machines used for manufacturing light emitting diodes (LEDs); atomic layer deposition (AL... |
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Invention
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Method for forming aluminum nitride thin film and method for forming thin film including same. An... |
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|
Invention
|
Method for forming gallium nitride film. The present invention relates to a method for forming a ... |
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Invention
|
Substrate processing apparatus.
Provided is a substrate processing apparatus. The positions of a... |
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Invention
|
Substrate processing apparatus and interlock method thereof.
Disclosed herein are a substrate pr... |
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Invention
|
Retainer, heater, chamber for substrate processing apparatus, and substrate processing apparatus.... |
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Invention
|
Thin film forming method, and transistor and capacitor manufactured using same. The present inven... |
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Invention
|
Thin film forming method, electric/electronic device using same, and substrate processing apparat... |
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Invention
|
Substrate processing apparatus and substrate processing method. The present invention relates to ... |
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Invention
|
Thin film formation method. An embodiment of the present invention provides a method for forming ... |
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Invention
|
Solar cell and method for manufacturing same. The present invention relates to a method for manuf... |
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Invention
|
Method for forming thin film of perovskite compound and method for manufacturing solar cell by us... |
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|
Invention
|
Method for forming graphene electrode and method for manufacturing solar cell using same. The pre... |
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|
Invention
|
Method for forming silicon carbide film. A method for forming a silicon carbide film on a substra... |
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|
Invention
|
Load lock chamber, substrate processing system, and substrate processing method. The present inve... |
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|
Invention
|
Substrate processing method. The present invention relates to a substrate processing method and, ... |
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|
Invention
|
Substrate processing method, substrate processing apparatus, and semiconductor device. The presen... |
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|
Invention
|
Gas supply method of substrate processing apparatus.
The present inventive concept relates to a ... |
|
|
Invention
|
Thin film forming method and manufacturing method for electroluminescent display device using sam... |
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|
Invention
|
Substrate processing apparatus, and edge frame of substrate processing apparatus. The present inv... |
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Invention
|
Canister and substrate treatment apparatus. The present invention relates to a canister and a sub... |
|
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Invention
|
Solar cell and manufacturing method therefor. The present invention provides a method for manufac... |
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2023
|
Invention
|
Method for producing thin film, thin film, and substrate processing apparatus.
The present inven... |
|
|
Invention
|
Gas spraying apparatus, substrate processing apparatus, and thin film deposition method.
Provide... |
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|
Invention
|
Oxide transistor and method for manufacturing same.
The present inventive concept provides a met... |
|
|
Invention
|
Method for forming electrode for semiconductor devices, and electrode for semiconductor devices. ... |
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|
Invention
|
Substrate processing apparatus.
The present inventive concept relates to a substrate processing ... |
|
|
Invention
|
Capacitor electrode forming method.
A method for forming a capacitor electrode in accordance wit... |
|
|
Invention
|
Thin film transistor and manufacturing method therefor.
Provided are a thin film transistor and ... |
|
|
Invention
|
Dielectric film, capacitor comprising same and manufacturing methods therefor.
The present inven... |
|
|
Invention
|
Substrate treatment method.
The present inventive concept relates to a method for treatment of a... |
|
2022
|
Invention
|
Method for forming barrier layer.
In accordance with an exemplary embodiment, a method for formi... |
|
|
Invention
|
Method of manufacturing power semiconductor element.
Provided is a method for manufacturing a po... |
|
|
Invention
|
Solar cell and method for manufacturing same.
The present inventive concept provides a solar cel... |
|
|
Invention
|
Semiconductor-packaging device.
Provided is an apparatus for packing a semiconductor, and more p... |
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|
P/S
|
Atomic layer deposition (ALD) machines used for manufacturing light emitting diodes (LEDs); etchi... |
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2020
|
P/S
|
semiconductor processing machines; low pressure chemical vapor deposition machines; plasma chemic... |
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2019
|
P/S
|
semiconductor wafer processing machines; low pressure chemical vapor deposition machines; plasma ... |
|
2014
|
P/S
|
Semiconductor processing machines; low pressure chemical
vapor deposition machines; plasma chemi... |
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2011
|
P/S
|
[ Street lamps; safety lamps for underground use; germicidal lamps for purifying air; miners' lam... |
|
2010
|
P/S
|
Semiconductor processing machines; semiconductor wafer processing machines; low pressure chemical... |
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2008
|
P/S
|
Semiconductor processing machines; Semiconductor wafer processing machines; Atomic layer depositi... |
