2024
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P/S
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Etching machines used for manufacturing light emitting diodes (LEDs); atomic layer deposition (AL... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a chamber having a si... |
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Invention
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Titanium nitride thin film forming method and semiconductor device. The present invention relates... |
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Invention
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Method for forming copper film. 22) on the substrate; and (d) spraying a mixed gas comprising a h... |
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Invention
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Method for forming gallium-containing film. An embodiment of the present invention relates to a m... |
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Invention
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Method for forming electrode. The present invention relates to a method for forming an electrode ... |
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Invention
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Method for forming electrode. A method for forming an electrode of a semiconductor device, accord... |
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Invention
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Organic light-emitting display device and method for manufacturing same. The present invention pr... |
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Invention
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Substrate processing device. A capacitively coupled plasma substrate processing device according ... |
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Invention
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Substrate processing apparatus. The present invention relates to a substrate processing apparatus... |
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Invention
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Solar cell and method for forming same. The present invention relates to a solar cell and a metho... |
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Invention
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Method for forming gallium oxynitride layer. The present invention provides a method for forming ... |
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Invention
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Method for manufacturing gallium oxide layer. The present invention provides a method for manufac... |
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Invention
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Semiconductor device and method for manufacturing semiconductor device. A semiconductor device ac... |
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Invention
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Method for forming titanium nitride thin film and method for forming electrode. A method for form... |
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Invention
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Electrode connection element, light-emitting device comprising same, and method for producing lig... |
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Invention
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Method for forming ruthenium oxide film and method for manufacturing semiconductor device compris... |
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Invention
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Substrate for solar cell, solar cell, and solar cell manufacturing method.
The present inventive... |
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Invention
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Vaporizer for substrate processing device and substrate processing device. The present invention ... |
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Invention
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Solar cell and method for manufacturing same. The present invention relates to a solar cell and a... |
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Invention
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Silicon insulation film forming method. The present invention relates to a silicon insulation fil... |
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Invention
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Method for forming gallium nitride film. 222). |
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Invention
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Collecting apparatus and collecting method. The embodiments of the present invention relate to a ... |
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Invention
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Thin film forming method and capping layer forming method. A thin film forming method according t... |
2023
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Invention
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Substrate processing apparatus and substrate processing method. The present invention relates to ... |
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Invention
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Semiconductor device and manufacturing method therefor. The present invention relates to a semico... |
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Invention
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Substrate processing device. The substrate processing device according to one embodiment of the p... |
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Invention
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Electrode formation method for semiconductor device. 2222) and annealing the metal thin film laye... |
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Invention
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Thin-film transistor and manufacturing method therefor. The present invention relates to a thin-f... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus according to an embodiment of th... |
2022
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Invention
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Method for manufacturing perovskite solar cell.
The present inventive concept comprises the step... |
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Invention
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Method for washing substrate treatment apparatus.
Provided is a method for cleaning a substrate ... |
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Invention
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Method for manufacturing sic substrate.
Provided is a method for manufacturing an SiC substrate.... |
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Invention
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Buffer tank, supply block including buffer tank, and gas supply device.
In accordance with an ex... |
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Invention
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Display device comprising antireflective layer.
The present inventive concept provides a display... |
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Invention
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Method for controlling canister temperature and raw material supply device.
Disclosed are a raw ... |
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Invention
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Power semiconductor device manufacturing method.
Provided is a method for manufacturing a power ... |
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Invention
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Thin film deposition method.
Provided is a method for depositing a thin film, which is performed... |
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Invention
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Thin film deposition method.
The present disclosure relates to a method for depositing a thin fi... |
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Invention
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Substrate processing apparatus and substrate processing method.
Disclosed are a substrate proces... |
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Invention
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Substrate processing method and substrate processing device.
In accordance with an exemplary emb... |
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Invention
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Solar cell and manufacturing method therefor.
The present inventive concept provides a solar cel... |
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Invention
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Substrate processing apparatus, method of temperature measuring, and method of temperature contro... |
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P/S
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Atomic layer deposition (ALD) machines used for manufacturing light emitting diodes (LEDs); etchi... |
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Invention
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Thin film formation method.
The present disclosure relates to a thin film forming method, and mo... |
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Invention
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Semiconductor packaging method.
Provided is a method for packing a semiconductor, and more parti... |
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Invention
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Solar cell and method for manufacturing same.
The present invention relates to a solar cell, inc... |
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Invention
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Tandem solar cell and manufacturing method therefor.
The present inventive concept relates to a ... |
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Invention
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Solar cell and method for manufacturing same.
The present inventive concept provides a solar cel... |
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Invention
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Substrate treatment apparatus.
The present inventive concept relates to a substrate treatment ap... |
2021
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Invention
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Substrate processing device.
Disclosed is a substrate processing apparatus having a symmetrical ... |
2020
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Invention
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Substrate processing apparatus.
The present inventive concept relates to a substrate processing ... |
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P/S
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semiconductor processing machines; low pressure chemical vapor deposition machines; plasma chemic... |
2019
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P/S
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Semiconductor processing machines; low pressure chemical vapor deposition machines; plasma chemic... |
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P/S
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semiconductor wafer processing machines; low pressure chemical vapor deposition machines; plasma ... |
2014
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P/S
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Semiconductor processing machines; low pressure chemical
vapor deposition machines; plasma chemi... |
2011
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P/S
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[ Street lamps; safety lamps for underground use; germicidal lamps for purifying air; miners' lam... |
2010
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P/S
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Semiconductor processing machines; semiconductor wafer processing machines; low pressure chemical... |
2008
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P/S
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Semiconductor processing machines; Semiconductor wafer processing machines; Atomic layer depositi... |