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2023
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Invention
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Fixing-type anti-loosening fastening structure. The present invention relates to a fixing-type an... |
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Invention
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Sliding-type anti-loosening fastening structure. The present invention relates to a sliding-type ... |
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2022
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Invention
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Assembly-type profile upper electrode and plasma processing apparatus including same. The present... |
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2021
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Invention
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Interlocking fastening upper electrode assembly having improved fastening force, and plasma devic... |
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2020
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Invention
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Coupling-type focus ring. The present invention relates to a coupling-type focus ring whereby the... |
