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2026
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P/S
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Abrasive free chemical solutions for chemical mechanical planarization (CMP) Pads for abrasive fr... |
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2025
|
Invention
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Tools for chemical planarization.
Examples are disclosed that relate to planarizing substrates w... |
|
|
Invention
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Pad surface regeneration and metal recovery.
A method comprises planarizing a substrate material... |
|
|
Invention
|
Abrasive-free planarization of polycrystalline silicon. A pad for performing abrasive-free chemic... |
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|
Invention
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Abrasive-free planarization of polycrystalline silicon.
A pad for performing abrasive-free chemi... |
|
|
Invention
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Determining an endpoint of a planarization process. A method for determining an endpoint of a pla... |
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|
Invention
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Determining an endpoint of a planarization process.
A method for determining an endpoint of a pl... |
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2024
|
Invention
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Chemical planarization of non-metallic materials. A pad for performing abrasive-free chemical pla... |
|
|
Invention
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Chemical planarization of non-metallic materials.
A pad for performing abrasive-free chemical pl... |
|
|
Invention
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Pads for chemical planarization. A pad for performing abrasive-free chemical planarization of a s... |
|
|
Invention
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Pads for chemical planarization.
A pad for performing abrasive-free chemical planarization of a ... |
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2023
|
Invention
|
Chemical planarization. Examples are disclosed that relate to planarizing substrates without use ... |
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2022
|
Invention
|
Tools for chemical planarization. Examples are disclosed that relate to planarizing substrates wi... |
|
|
Invention
|
Pad surface regeneration and metal recovery. A method comprises planarizing a substrate material ... |
