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2026
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G/S
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Abrasive free chemical solutions for chemical mechanical planarization (CMP). Pads for abrasive f... |
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Invention
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Chemical planarization.
Examples are disclosed that relate to planarizing substrates without use... |
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G/S
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Abrasive free chemical solutions for chemical mechanical planarization (CMP) for polishing semico... |
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Invention
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Functionalized pads for chemical planarization. Examples are disclosed that relate to a pad for p... |
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Invention
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Functionalized pads for chemical planarization.
Examples are disclosed that relate to a pad for ... |
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Invention
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Planarization solution for abrasive-free copper planarization.
Examples are disclosed that relat... |
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Invention
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Planarization solution for abrasive-free copper planarization. Examples are disclosed that relate... |
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2025
|
Invention
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Tools for chemical planarization.
Examples are disclosed that relate to planarizing substrates w... |
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Invention
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Pad surface regeneration and metal recovery.
A method comprises planarizing a substrate material... |
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Invention
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Abrasive-free planarization of polycrystalline silicon. A pad for performing abrasive-free chemic... |
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Invention
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Abrasive-free planarization of polycrystalline silicon.
A pad for performing abrasive-free chemi... |
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Invention
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Determining an endpoint of a planarization process. A method for determining an endpoint of a pla... |
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Invention
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Determining an endpoint of a planarization process.
A method for determining an endpoint of a pl... |
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2024
|
Invention
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Chemical planarization of non-metallic materials. A pad for performing abrasive-free chemical pla... |
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Invention
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Chemical planarization of non-metallic materials.
A pad for performing abrasive-free chemical pl... |
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Invention
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Pads for chemical planarization. A pad for performing abrasive-free chemical planarization of a s... |
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Invention
|
Pads for chemical planarization.
A pad for performing abrasive-free chemical planarization of a ... |
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2023
|
Invention
|
Chemical planarization. Examples are disclosed that relate to planarizing substrates without use ... |
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2022
|
Invention
|
Tools for chemical planarization. Examples are disclosed that relate to planarizing substrates wi... |
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|
Invention
|
Pad surface regeneration and metal recovery. A method comprises planarizing a substrate material ... |
