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2024
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Invention
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Thin film piezoelectric device. 23333131 mode based on a piezoelectric or inverse piezoelectric e... |
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Invention
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Film structure and electronic device. 33222333 that is c-axis orientated and in-plane oriented, a... |
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2023
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Invention
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Film structure and electronic device.
A film structure (10) includes a Si layer (12a), a ZrO2 la... |
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Invention
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Film structure and electronic device. 222333, which is oriented in the c-axis direction. |
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Invention
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Film structure and method for producing same. 22 that has been epitaxially grown on the substrate... |
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Invention
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Piezoelectric film integrated device, manufacturing method thereof, and acoustic oscillation sens... |
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2021
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Invention
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Film structure, method for producing film structure and apparatus for producing film structure. T... |
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Invention
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Membrane structure and electronic device.
A membrane structure (10) includes: a substrate being ... |
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2019
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Invention
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Film structure, piezoelectric film and superconductor film.
According to the present invention, ... |
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2018
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Invention
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Film structure and method for manufacturing the same. a) and includes a zirconium oxide film whic... |
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2015
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Invention
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Electrode, ferroelectric ceramics and manufacturing method thereof. x≤0.4 formula 1
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2014
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Invention
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Thermal poling method, piezoelectric film and manufacturing method of same, thermal poling appara... |
