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2013
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Invention
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Susceptor for improved epitaxial wafer flatness and methods for fabricating a semiconductor wafer... |
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Invention
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A method of manufacturing silicon-on-insulator wafers. A method is provided for preparing multila... |
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Invention
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Qualitative crystal defect evaluation method. A process is provided for evaluating oxygen precipi... |
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2012
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Invention
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Methods for mounting an ingot on a wire saw. Methods are disclosed for determining mounting locat... |
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Invention
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Processes and systems for purifying silane. Processes and systems for purifying silane-containing... |
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Invention
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Crucibles with a reduced amount of bubbles, ingots and wafers produced by use of such crucibles a... |
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Invention
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Clamping apparatus for cleaving a bonded wafer structure and methods for cleaving. Apparatus and ... |
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Invention
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Direct formation of graphene on semiconductor substrates. The invention generally related to a me... |
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Invention
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Systems and methods for connecting an ingot to a wire saw. Systems and methods are disclosed for ... |
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Invention
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Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed r... |
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Invention
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Processes for producing silane in a bubble column. Methods for producing silane by reacting a hyd... |
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Invention
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Methods for producing single crystal silicon ingots with reduced incidence of dislocations.
Meth... |
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Invention
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Silicon on insulator structures having high resistivity regions in the handle wafer and methods f... |
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Invention
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Qualitative crystal defect evaluation method.
A process is provided for evaluating oxygen precip... |
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Invention
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Methods for reducing the metal content in the device layer of soi structures and soi structures p... |
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2011
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Invention
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Measuring a crystal growth feature using multiple cameras. Three-dimensional measurement of a cry... |
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Invention
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Systems and methods for particle size determination and control in a fluidized bed reactor for us... |
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Invention
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Systems and methods for particle size determination and control in a fluidized bed reactor. Syste... |
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Invention
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Production of polycrystalline silicon in substantially closed-loop processes that involve disprop... |
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Invention
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Methods and systems for producing silane. Methods and systems for producing silane that use elect... |
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Invention
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Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidiz... |
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Invention
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Process for annealing semiconductor wafers with flat dopant depth profiles. A process is disclose... |
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Invention
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Wafer transport cart.
Systems and methods are disclosed for transporting wafers to a processing ... |
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Invention
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Method to delineate crystal related defects. Process for detecting grown -in -defects in a semico... |
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Invention
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Production of polycrystalline silicon by the thermal decomposition of trichlorosilane in a fluidi... |
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Invention
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Production of polycrystalline silicon in substantially closed-loop processes and systems. Product... |
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Invention
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Adapter ring for silicon electrode. Method and systems are provided for retrofitting wafer etchin... |
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Invention
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Semiconductor and solar wafers and method for processing same. A method for manufacturing a silic... |
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Invention
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Semiconductor and solar wafers. A silicon-on-insulator or bonded wafer includes an upper portion ... |
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Invention
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Grinding tool for trapezoid grinding of a wafer. A grinding tool for trapezoid grinding of a wafe... |
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Invention
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Methods for in-situ passivation of silicon-on-insulator wafers. Methods and systems are disclosed... |
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Invention
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Epitaxial wafer having a heavily doped substrate and process for the preparation thereof.
This i... |
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Invention
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Trichlorosilane vaporization system. A heat exchanger for vaporizing a liquid and a method of usi... |
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Invention
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Angle of repose valve. An angle of repose valve for controlling the flow of granules and a method... |
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Invention
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Methods for monitoring the amount of metal contamination imparted into wafers during a semiconduc... |
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Invention
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Methods for detecting metal precipitates in a semiconductor wafer.
Methods are disclosed for mon... |
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Invention
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Wafer support ring. A wafer support ring and a method of using the same are disclosed herein. The... |
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Invention
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Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder. Systems and meth... |
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Invention
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Methods for reducing the width of the unbonded region in soi structures and wafers and soi struct... |
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Invention
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Suppression of oxygen precipitation in heavily doped single crystal silicon substrates.
This inv... |
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2010
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Invention
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Methods for reducing the deposition of silicon on reactor walls using peripheral silicon tetrachl... |
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Invention
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Methods for processing silicon on insulator wafers. Methods are provided for etching and/or depos... |
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Invention
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Method for the preparation of a multi-layered crystalline structure. This invention generally rel... |
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Invention
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Methods for producing aluminum trifluoride. Methods for producing aluminum trifluoride by acid di... |
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Invention
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Production of polycrystalline silicon in substantially closed-loop processes.
Production of poly... |
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Invention
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Grinding tool for trapezoid grinding of a wafer.
A grinding tool for trapezoid grinding of a waf... |
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Invention
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Angle of repose valve.
An angle of repose valve for controlling the flow of granules and a metho... |
