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2025
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P/S
|
Semiconductor manufacturing machines |
|
2023
|
P/S
|
Semiconductor wafer processing equipment |
|
2022
|
Invention
|
Charged particle beam axial calibration.
In described examples, a method of operating a charged ... |
|
2017
|
Invention
|
Secure intra-chip hardware micro-segmentation using charged particle beam processing. Methods, sy... |
|
2016
|
Invention
|
Secure permanent integrated circuit personalization. Methods, systems and devices for using charg... |
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2015
|
Invention
|
Precision material modification using miniature-column charged particle beam arrays. Methods, dev... |
|
|
Invention
|
Precision deposition using miniature-column charged particle beam arrays. Methods, devices and sy... |
|
|
Invention
|
Charged particle beam substrate inspection using both vector and raster scanning. The present app... |
|
|
Invention
|
Precision substrate material removal using miniature-column charged particle beam arrays. Methods... |
|
|
Invention
|
Automatic optimization of etch process for accelerated yield ramp with matched charged particle m... |
|
|
Invention
|
Matched multiple charged particle beam systems for lithographic patterning, inspection, and accel... |
|
2014
|
Invention
|
Alignment and registration targets for multiple-column charged particle beam lithography and insp... |
|
2013
|
Invention
|
Charged particle beam deflection method with separate stage tracking and stage positional error s... |
|
2008
|
Invention
|
Electron beam lithography apparatus and design method of patterned beam-defining aperture.
A cur... |
|
|
Invention
|
Variable-ratio double-deflection beam blanker. The invention provides methods for conjugate blank... |
|
|
Invention
|
Charged particle optics with azimuthally-varying third-order aberrations for generation of shaped... |
|
2006
|
Invention
|
Flat panel display substrate testing system. A flat panel display substrate (FPDS) testing system... |
|
|
Invention
|
Detector optics for multiple electron beam test system. A detector optics system for collecting s... |
|
2005
|
Invention
|
Apparatus and method for inspection and testing of flat panel display substrates. A charged parti... |
|
|
Invention
|
Dual detector optics for simultaneous collection of secondary and backscattered electrons. A dete... |
|
2004
|
Invention
|
Optics for generation of high current density patterned charged particle beams. A direct-write el... |
|
|
Invention
|
Multi-column charged particle optics assembly. A multi-column charged particle optics assembly co... |
|
|
Invention
|
Detector optics for charged particle beam inspection system. A charged particle beam column for s... |
|
2003
|
Invention
|
Multi-beam multi-column electron beam inspection system. A multi-column electron beam inspection ... |
|
2002
|
Invention
|
Multi-beam multi-column electron beam inspection system. An electron optics assembly for a multi-... |
|
|
Invention
|
Detector optics for electron beam inspection system. An electron beam column incorporating an asy... |
|
|
Invention
|
Image processing system for multi-beam inspection. An image processing system for use in semicond... |
|
|
Invention
|
Platform positioning system. A system for precisely positioning and moving a platform relative to... |
