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2020
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Invention
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Method and system for enhancing target features of a pattern imaged onto a substrate. Enhancing t... |
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2016
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Invention
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Lithographic apparatus and method. A method of controlling output of a radiation source, the meth... |
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2012
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Invention
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Method of and apparatus for in-situ repair of reflective optic.
Method of and apparatus for repa... |
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Invention
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Coherency reduction for bandwidth measurement.
A method includes directing a portion of a laser ... |
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2011
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Invention
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Multi-pass optical apparatus. An apparatus includes a first plurality of concave reflecting surfa... |
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Invention
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Oscillator-amplifier drive laser with seed protection for an euv light source. As disclosed herei... |
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Invention
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Method for lpp drive laser output during euv non-output periods. A device is disclosed, herein wh... |
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Invention
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Alignment of light source focus. An extreme ultraviolet light system includes a steering system t... |
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Invention
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Master oscillator-power amplifier drive laser with pre-pulse for euv light source. A device is de... |
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Invention
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Line narrowing module. An apparatus is disclosed which may comprise a grating receiving light, a ... |
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Invention
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Systems and methods for cooling an optic. Devices are described herein which may comprise an opti... |
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Invention
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Method and apparatus for controlling light bandwidth. An apparatus includes a light source that p... |
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Invention
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Extreme ultraviolet light source. An apparatus includes a light source having a gain medium for p... |
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Invention
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Systems and method for target material delivery protection in a laser produced plasma euv light s... |
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Invention
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Laser produced plasma euv light source. A device is disclosed herein which may include a plasma g... |
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Invention
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High power high pulse repetition rate gas discharge laser system.
A method of line narrowing for... |
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2010
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Invention
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Metrology for extreme ultraviolet light source. An extreme ultraviolet light system includes a dr... |
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Invention
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Beam transport system for extreme ultraviolet light source. An extreme ultraviolet light system i... |
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Invention
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Advanced laser wavelength control. Laser light wavelength control is provided by periodically pre... |
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Invention
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Active spectral control of duv laser light source. According to aspects of an embodiment of the d... |
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Invention
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Source collector apparatus, lithographic apparatus and device manufacturing method. An EUV lithog... |
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Invention
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Active spectral control of optical source. A method of controlling a spectral property of a light... |
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Invention
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Multi-chamber gas discharge laser bandwidth control through discharge timing. A method and appara... |
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Invention
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Alignment laser. A method for producing extreme ultraviolet light includes producing a target mat... |
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Invention
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System, method and apparatus for droplet catcher for prevention of backsplash in a euv generation... |
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Invention
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System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls... |
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Invention
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System, method and apparatus for aligning and synchronizing target material for optimum extreme u... |
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Invention
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Systems and methods for protecting an euv light source chamber from high pressure source material... |
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Invention
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Regenerative ring resonator. A laser includes a regenerative ring resonator that includes a disch... |
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Invention
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Gas management system for a laser-produced-plasma euv light source. Devices and corresponding met... |
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Invention
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Laser produced plasma euv light source. A device is disclosed which may comprise a system generat... |
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2009
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Invention
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Extreme ultraviolet light source.
An apparatus for generating EUV radiation is disclosed which m... |
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Invention
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Line narrowing module.
An apparatus is disclosed which may comprise a grating receiving light, a... |
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Invention
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Immersion lithography laser light source with pulse stretcher.
An apparatus and method are discl... |
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Invention
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Systems and methods for drive laser beam delivery in an euv light source. An EUV light source dev... |
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Invention
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System method and apparatus for selecting and controlling light source bandwidth. A mechanism for... |
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Invention
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Very high power laser chamber optical improvements. An aspect of the disclosed subject matter inc... |
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Invention
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Method and apparatus for laser control in a two chamber gas discharge laser. A laser control syst... |
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Invention
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Laser produced plasma euv light source.
An EUV light source is disclosed that may include a lase... |
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Invention
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High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier. An ... |
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Invention
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6k pulse repetition rate and above gas discharge laser system solid state pulse power system impr... |
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Invention
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Systems and methods for filtering out-of-band radiation in euv exposure tools. In a first aspect,... |
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Invention
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System and methods for filtering out-of-band radiation in euv exposure tools.
In a first aspect,... |
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Invention
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System and methods for target material delivery in a laser produced plasma euv light source. Devi... |
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Invention
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Drive laser delivery systems for euv light source. An LPP EUV light source is disclosed having an... |
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Invention
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Illuminating apparatus and method for controlling energy of a laser source. The invention refers ... |
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2008
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Invention
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Drive laser for euv light source. A device is described herein which may comprise an oscillator h... |
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Invention
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Euv light source components and methods for producing, using and refurbishing same. A method is d... |
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Invention
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Lpp euv light source drive laser system. 2 laser. The drive laser redirecting mechanism may compr... |
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2007
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Invention
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Laser system.
A method and apparatus may comprise a laser light source system which may comprise... |
