- All sections
- G - Physics
- G01L - Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure
- G01L 21/30 - Vacuum gauges by making use of ionisation effects
Patent holdings for IPC class G01L 21/30
Total number of patents in this class: 142
10-year publication summary
|
12
|
9
|
4
|
3
|
2
|
1
|
2
|
1
|
4
|
0
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| MKS Instruments, Inc. | 684 |
18 |
| Tokyo Electron Limited | 12115 |
16 |
| Lam Research Corporation | 5001 |
11 |
| Applied Materials, Inc. | 17745 |
10 |
| Canon Anelva Corporation | 682 |
5 |
| Hitachi High-Tech Corporation | 5050 |
5 |
| Hon Hai Precision Industry Co., Ltd. | 4043 |
4 |
| Tsinghua University | 5705 |
4 |
| Samsung Electronics Co., Ltd. | 139001 |
3 |
| Edwards Limited | 800 |
3 |
| INFICON AG | 23 |
3 |
| Sony Corporation | 31541 |
2 |
| Micron Technology, Inc. | 25824 |
2 |
| Texas Instruments Incorporated | 19432 |
2 |
| Renesas Electronics Corporation | 6148 |
2 |
| Brooks Automation, Inc. | 175 |
2 |
| INFICON GmbH | 44 |
2 |
| INFICON GmbH | 216 |
2 |
| INFICON Holding AG | 185 |
2 |
| Tel Manufacturing and Engineering of America, Inc. | 145 |
2 |
| Other owners | 42 |