- All sections
- G - Physics
- G01L - Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure
- G01L 21/30 - Vacuum gauges by making use of ionisation effects
Patent holdings for IPC class G01L 21/30
Total number of patents in this class: 138
10-year publication summary
|
9
|
4
|
3
|
2
|
1
|
2
|
1
|
4
|
2
|
0
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| MKS Instruments, Inc. | 578 |
18 |
| Tokyo Electron Limited | 13410 |
15 |
| Lam Research Corporation | 5452 |
11 |
| Applied Materials, Inc. | 19717 |
10 |
| Canon Anelva Corporation | 688 |
5 |
| Hitachi High-Tech Corporation | 5578 |
5 |
| Hon Hai Precision Industry Co., Ltd. | 4005 |
4 |
| Tsinghua University | 6071 |
4 |
| Edwards Limited | 790 |
4 |
| INFICON AG | 26 |
4 |
| Samsung Electronics Co., Ltd. | 151726 |
3 |
| Micron Technology, Inc. | 27170 |
2 |
| Texas Instruments Incorporated | 19547 |
2 |
| Renesas Electronics Corporation | 5884 |
2 |
| Brooks Automation, Inc. | 154 |
2 |
| INFICON GmbH | 216 |
2 |
| INFICON Holding AG | 179 |
2 |
| Tel Manufacturing and Engineering of America, Inc. | 139 |
2 |
| Sony Corporation | 30578 |
1 |
| Panasonic Corporation | 19867 |
1 |
| Other owners | 39 |