• All sections
• G - Physics
• G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devicesmaterials therefororiginals thereforapparatus specially adapted therefor
• G03F 1/64 - Pellicles or pellicle assemblies, e.g. having membrane on support framePreparation thereof characterised by the frames, e.g. structure or material thereof

Patent holdings for IPC class G03F 1/64

Total number of patents in this class: 540

10-year publication summary

Principal owners for this class