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2025
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G/S
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Electric and electronic process control apparatus for the production of semiconductor components,... |
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Invention
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Apparatus for and method of controlling droplet generator performance.
Apparatus for and method ... |
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Invention
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Substrate holder for use in a lithographic apparatus.
A substrate holder, for a lithographic app... |
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Invention
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Hollow-core photonic crystal fiber based optical component for broadband radiation generation.
O... |
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Invention
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Methods and apparatus for obtaining diagnostic information relating to an industrial process.
In... |
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Invention
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Charged particle-optical apparatus.
An electron-optical projection device for projecting a plura... |
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Invention
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Charged particle detector for microscopy.
A method of configuring a detector of a charged partic... |
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G/S
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Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
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G/S
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Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
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Invention
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Forming a reference irradiance pattern on a detector. Described herein is a method comprising: il... |
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Invention
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Interferometer system and lithographic apparatus. An interferometer system comprises: - first and... |
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Invention
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Metrology method and associated metrology device. Disclosed is a metrology apparatus and method. ... |
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Invention
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Apparatus for use in a metrology tool. An apparatus for use in a metrology apparatus comprises: s... |
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Invention
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Collector mirror and collector mirror assembly for lithography. A collector mirror (21) for litho... |
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Invention
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Method of monitoring an exposure process. Disclosed is a method of monitoring an exposure process... |
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Invention
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Systems and methods of energy-based filtering and detection of charged particles. Systems and met... |
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Invention
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An illumination and detection arrangement and a method for a metrology arrangement. Disclosed is ... |
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Invention
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Maintaining an optical focus of an optical element for improving performance of a metrology syste... |
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Invention
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Exposure apparatus and method with reduction of an overlay error. An exposure apparatus comprisin... |
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Invention
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Machine learning assisted pupil metrology. Disclosed is a method of determining at least one bond... |
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Invention
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Lithographic apparatus and method with fast alignment measurements using deformation prediction m... |
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Invention
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Apparatus and method for securing a die for die bonding. An apparatus and method for securing an ... |
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Invention
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Interferometer system without walk-off, method for using an interferometer system. The present di... |
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Invention
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Improvements to lithographic methods and apparatus. A new (lithographic) method of forming a feat... |
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Invention
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Metrology method and associated metrology device. Disclosed is a metrology method comprising: obt... |
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Invention
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Deformable optical component actuation and modulation in a metrology system. A metrology apparatu... |
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Invention
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Image position measurement method. A method of performing image position measurements. The method... |
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Invention
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Dosage-controlled voltage contrast inspection in charged-particle beam systems and methods thereo... |
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Invention
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Systems and methods for guided template matching in metrology systems. Systems and methods for gu... |
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Invention
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Time-division multiplexing wafer z tilt-height sensor for charged particle beam focusing. A metho... |
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2024
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Invention
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Improved reticle stage thermal overlay. A method of managing overlay impact caused by deformation... |
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G/S
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Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
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G/S
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Semi-conductor lithographic machines, and their parts and fittings. |
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G/S
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Semi-conductor lithographic machines, and their parts and
fittings. |
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G/S
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Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
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G/S
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Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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G/S
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Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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G/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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2023
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Invention
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Contamination measurement.
A method of determining contamination of an optical sensor in a litho... |
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Invention
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Stochastic-aware source mask optimization based on edge placement probability distribution.
A me... |
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Invention
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Transient defect inspection using an inspection image.
An improved method and system for transie... |
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Invention
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Metrology target and associated metrology method.
A substrate including a target. The target inc... |
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Invention
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Mirror assembly for micromirror array.
An assembly for movably supporting a mirror comprises: a ... |
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Invention
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Device and method for measuring contaminiation and lithographic apparatus provided with said devi... |
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Invention
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Diffraction-based pupil determination for optimization of lithographic processes.
Methods, appar... |
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Invention
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Systems, methods, and software for multilayer metrology.
Methods, apparatuses, and software are ... |
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Invention
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Illumination mode selector and associated optical metrology tool.
An illumination mode selector ... |
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Invention
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Method of optimizing maintenance of a lithographic apparatus.
A method of optimizing maintenance... |
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Invention
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A lithographic apparatus, an inspection system, and a detector having a square-core fiber.
An ap... |
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G/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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G/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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Invention
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Thermally actuated cooling system.
Systems, apparatuses, and methods are provided for manufactur... |
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Invention
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Method of filtering false positives for a pixelated electron detector.
A method for filtering fa... |
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Invention
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Pellicle membrane for a lithographic apparatus.
A pellicle membrane including emissive crystals ... |
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Invention
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Charged-particle beam apparatus with large field-of-view and methods thereof.
Systems and method... |
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Invention
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Method of spatially aligning a patterning device and a substrate.
A method of spatially aligning... |
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Invention
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Hollow-core optical fiber based radiation source.
A broadband radiation device, comprising: a pu... |
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Invention
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Methods of metrology and associated devices.
Disclosed is a method of updating of a first model ... |
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Invention
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Setup and control methods for a lithographic process and associated apparatuses.
A method for pe... |
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G/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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G/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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2022
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Invention
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Fuel droplet nozzle assembly.
A fuel droplet nozzle assembly comprises a first hollow body and a... |
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Invention
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Energy band-pass filtering for improved high landing energy backscattered charged particle image ... |
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G/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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G/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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2021
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G/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
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G/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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G/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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G/S
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Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
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G/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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G/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
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Invention
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Lithographic apparatus, device manufacturing method, and method of correcting a mask. A lithograp... |
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2017
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G/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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G/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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G/S
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[ Grinding, cutting, polishing and coating of glass and other optical surfaces ] Micro-lithograp... |
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2016
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G/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
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G/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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G/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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G/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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G/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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G/S
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[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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2014
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G/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
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G/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
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G/S
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Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
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2013
|
G/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
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G/S
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Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
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2012
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G/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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G/S
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testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
G/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
