|
2025
|
G/S
|
Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
|
|
G/S
|
Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
|
2024
|
Invention
|
Thermal deformation compensation in charged-particle beam apparatus. A component for mounting a l... |
|
|
G/S
|
Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
|
|
Invention
|
Leed and ptychography based surface profile determination and inspection. In low-energy-electron ... |
|
|
Invention
|
Charged particle-optical arrangement for a charged particle beam apparatus. A charged particle-op... |
|
|
Invention
|
Readout circuit design for charged particle detection applications. An electron counting detector... |
|
|
Invention
|
Systems and methods for voltage contrast defect detection.
Systems and methods of providing a pr... |
|
|
Invention
|
Vessel configured to receive a radiation beam with an internal structure configured to be cooled ... |
|
|
Invention
|
Method of pellicle detection, and computer program for pellicle monitoring. A method of pellicle ... |
|
|
Invention
|
High-voltage discharge detection in a charged particle system. An improved technology for detecti... |
|
|
Invention
|
System and method for die bonding with radiation release. A method comprising: providing a semico... |
|
|
Invention
|
Internal light source, lithographic apparatus, metrology systems, and method thereof. A system in... |
|
|
Invention
|
System and method for overlay metrology with reduced coherence and speckle contrast. An infinite ... |
|
|
Invention
|
Lithographic apparatus and device manufacturing method with preventing contaminant particles from... |
|
|
Invention
|
High pressure and deep vacuum electrical feedthrough. A detection system is configured for a targ... |
|
|
Invention
|
Optical amplifier and components therefor. An optical amplifier (200) comprising a flow passagewa... |
|
|
Invention
|
Method and system for multi channel mask prediction. A method and system for generating a mask pa... |
|
|
Invention
|
Charged particle-optical module, charged particle-optical device, and a method of using a charged... |
|
|
Invention
|
Vacuum exposure apparatus and assessment system. The present invention provides a vacuum exposure... |
|
|
Invention
|
Extreme ultraviolet light generation sequence for an extreme ultraviolet light source. A method f... |
|
|
Invention
|
Conversion layers to block outgassing in hydrogen plasma. A component for EUV lithographic appara... |
|
|
Invention
|
Systems and methods for signal-based defect classification in transient inspection. Systems, meth... |
|
|
Invention
|
Metrology accuracy improvement using reference geometric parameter. Improved methods and apparatu... |
|
|
Invention
|
Control of laser of euv source of a lithographic apparatus. Disclosed herein is a lithographic ap... |
|
|
Invention
|
Sensor and method for qualification of a topography of a surface of a die for die bonding. A syst... |
|
|
Invention
|
System and method for stress release in die bonding. A system comprising: a targeted emission sys... |
|
|
Invention
|
Apparatus and method for multi-stage die bonding. An apparatus and method of operating said appar... |
|
|
Invention
|
Metrology method for a digital holographic microscope and associated computer program. A method o... |
|
|
Invention
|
Method of forming a patterned layer of material, method of forming an electronic device, apparatu... |
|
|
Invention
|
Contour-based framework for monitoring and evaluating process quality and variation. A method of ... |
|
|
Invention
|
Systems and methods of laser-to-droplet positioning with tilt range keep assist during extreme ul... |
|
|
Invention
|
Illumination module and associated methods and metrology apparatus.
Disclosed is an illumination... |
|
|
Invention
|
System and methods for offline calibration of reticle, optical element and substrate thermal heat... |
|
|
Invention
|
Method and apparatus for power supply synchronization. A method is disclosed for controlling powe... |
|
|
Invention
|
Multi-beam charged-particle apparatus for uniform probe current. A charged-particle beam apparatu... |
|
|
Invention
|
Actuator using phase-change material. An actuator for positioning a motion stage, the actuator co... |
|
|
Invention
|
Method of lithography and associated apparatus. Disclosed is a method for exposing structures ont... |
|
|
Invention
|
Method of monitoring process drift in a semiconductor manufacturing process. Described is a metho... |
|
|
Invention
|
Method and system for primitive-based mask prediction. Described herein is a method and system fo... |
|
|
Invention
|
Holistic calibration. A method is provided for measuring a characteristic feature or property of ... |
|
|
Invention
|
Method and apparatus for assessing a sample surface, method of scanning a sample surface, and cha... |
|
|
Invention
|
Charging particle-optical device, charged particle-optical module, method of projecting a plurali... |
|
|
Invention
|
Module and charged particle-optical device. The present disclosure relates to a module for a char... |
|
|
Invention
|
Non-centrosymmetric fringe-based metrology targets and methods. There is provided a method of met... |
|
|
Invention
|
Charged particle-optical apparatus and method of processing a sample. A charged particle-optical ... |
|
|
Invention
|
A color selection module for filtering a selectable wavelength band. This application provides a ... |
|
|
Invention
|
Apparatus and process for reduced deposition in light source. A process for generating EUV radiat... |
|
|
G/S
|
Semi-conductor lithographic machines, and their parts and fittings. |
|
|
G/S
|
Semi-conductor lithographic machines, and their parts and
fittings. |
|
|
G/S
|
Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
|
|
G/S
|
Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
|
|
G/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
|
|
G/S
|
Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
|
2023
|
G/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
|
|
G/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
|
|
Invention
|
Method of wafer grounding utilizing wafer edge backside coating exclusion area.
Systems and meth... |
|
|
Invention
|
Methods of metrology and associated devices.
A method of inferring second metrology data relatin... |
|
|
Invention
|
Methods related to an autoencoder model or similar for manufacturing process parameter estimation... |
|
|
Invention
|
A method for determining a vertical position of a structure on a substrate and associated apparat... |
|
|
Invention
|
Illumination arrangement for a metrology device and associated method.
Disclosed is an illuminat... |
|
|
G/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
G/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
2022
|
G/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
G/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
|
2021
|
G/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
|
2020
|
G/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
G/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
G/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
G/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
G/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
G/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
G/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
G/S
|
[ Grinding, cutting, polishing and coating of glass and other optical surfaces ] Micro-lithograp... |
|
2016
|
G/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
G/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
G/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
G/S
|
Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
|
|
G/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
|
G/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
|
2014
|
G/S
|
Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
G/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
G/S
|
Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
|
G/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
|
2012
|
G/S
|
Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
|
|
G/S
|
testing and inspection in the field of quality control of semiconductor wafers and reticles |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
|
G/S
|
Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
|
|
G/S
|
[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
