Patent holdings for IPC class G03F 9/02

Total number of patents in this class: 14

10-year publication summary

1
2
0
1
1
0
0
1
2
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Nikon Corporation
7237
2
TERA-print, LLC
11
2
FUJIFILM Corporation
30206
1
Cymer, LLC
405
1
ASML Netherlands B.V.
7710
1
Fujikura Ltd.
3037
1
Northwestern University
3503
1
Intevac, Inc.
131
1
NuFlare Technology, Inc.
907
1
Screen Holdings Co., Ltd.
3086
1
Shanghai Micro Electronics Equipment Co., Ltd.
54
1
Shanghai Micro Electronics Equipment (Group) Co., Ltd.
191
1
Other owners 0