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2026
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G/S
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Computer software for computational lithography, including software for lithography simulation, s... |
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G/S
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Machines for lithography; machines for patterning substrates; machines for use in the fields of e... |
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Invention
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Contour extraction method from inspection image in multiple charged-particle beam inspection.
An... |
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G/S
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Fittings and accessories for lithographic machines, included in this class. Electronic and optica... |
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Invention
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Self-regulated thermal management system for electrical devices. A thermal management system for ... |
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Invention
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Coating for a component. A component of an apparatus comprising an electron-optical device, where... |
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Invention
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Hybrid lithographic systems. An optical system includes a radiation source that generates radiati... |
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Invention
|
Substrate alignment measurement. A method of measuring substrate alignment, the method comprising... |
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Invention
|
Method and system for artificial intelligence-based layout retargeting command generation. Descri... |
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Invention
|
Metrology method, system and lithographic apparatus. Disclosed is a method of determining a posit... |
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Invention
|
Euv source with vibration-decoupled exhaust module. A radiation source includes: a vessel; an exh... |
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Invention
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Broadband radiation generation. A broadband light source device comprising a radiation source for... |
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Invention
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Substrate holder. A substrate holder for a bonding tool that is configured to bond a first substr... |
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Invention
|
Electromagnetic linear motor. Embodiments relate to an electromagnetic linear motor comprising a ... |
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Invention
|
Processing system, incremental position measurement system, positioning system, exposure apparatu... |
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Invention
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A method for image distortion correction. A non-transitory computer-readable medium stores a set ... |
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Invention
|
Method for enhanced defective die classification and early wafer yield detection. A method to gen... |
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Invention
|
Computational lithography simulation using a vector scatter model. A non-transitory computer-read... |
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Invention
|
Device and method for adjusting flow dynamic in a radiation source system. Systems and methods fo... |
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Invention
|
Model-based automatic defect classification during wafer inspection. A non-transitory computer re... |
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Invention
|
Linkage for an actuator. A linkage for an actuator is disclosed, which comprises: a first portion... |
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G/S
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Optical alignment sensors and measuring instruments for determining semiconductor wafer position,... |
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G/S
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Optical alignment sensors and measuring instruments for
determining semiconductor wafer position... |
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Invention
|
A substrate support assembly, exposure appartus comprising a substrate support assembly, and meth... |
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2025
|
G/S
|
Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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G/S
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Testing apparatus using electron beam for inspection of semiconductor materials, devices and prod... |
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G/S
|
Electronic testing apparatus, data processors, computer
hardware and software for defect inspect... |
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G/S
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Testing apparatus using electron beam for inspection of
semiconductor materials, devices and pro... |
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G/S
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Electric and electronic process control apparatus for the production of semiconductor components,... |
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G/S
|
Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
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G/S
|
Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
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G/S
|
Downloadable computer software for use in processing semiconductor wafers; Recorded computer soft... |
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2024
|
G/S
|
Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
|
|
G/S
|
Semi-conductor lithographic machines, and their parts and fittings. |
|
|
G/S
|
Semi-conductor lithographic machines, and their parts and
fittings. |
|
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G/S
|
Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
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Invention
|
Method to stabilize a wavelength of a tunable laser device, tunable laser device, and position me... |
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G/S
|
Electron beam tool for inspecting semiconductor materials, devices and processes |
|
|
G/S
|
Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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|
G/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
|
|
Invention
|
Euv radiation energy sensor.
A sensor for measuring energy of EUV radiation from combined radiat... |
|
|
Invention
|
Electrostatic clamp arrangement.
An electrostatic clamp arrangement including a clamp member com... |
|
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Invention
|
System and method for robot calibration.
A method of calibrating a substrate handler, the handle... |
|
|
Invention
|
Method of manufacturing an electrode for an object holder.
A method of manufacturing an electrod... |
|
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Invention
|
Damper, method for damping, and apparatus including a damper.
The present disclosure provides a ... |
|
|
Invention
|
Inspection or qualification apparatus.
An apparatus for determining one or more characteristics ... |
|
|
Invention
|
Metrology method and apparatus and computer program background.
Disclosed is a method of metrolo... |
|
|
Invention
|
Lithographic apparatus and associated methods.
A lithographic method includes forming an image o... |
|
|
Invention
|
Substrate processing.
A method for processing a substrate, the method including: providing a sub... |
|
|
Invention
|
Systems and methods for clamping a patterning device in a lithography apparatus.
A patterning de... |
|
|
Invention
|
Image positioning control method and system.
A method of controlling an image positioning error ... |
|
|
Invention
|
Method for efficient dynamic sampling plan generation and accurate probe die loss projection.
A ... |
|
|
Invention
|
Overlay metrology based on a fringe pattern.
Measuring overlay using a microscope-based sensor, ... |
|
|
Invention
|
System and method for calibration of inspection tools.
Systems, apparatuses, and methods for cal... |
|
|
Invention
|
Fluid handling system and method, and method of manufacturing devices.
A fluid handling system f... |
|
|
Invention
|
A method to monitor the cgi model performance without ground truth information.
An apparatus to ... |
|
|
Invention
|
Gas mixture for hollow core fiber used in generating broadband radiation.
A hollow core fiber an... |
|
2023
|
Invention
|
Alignment method and associated alignment and lithographic apparatuses.
Disclosed is a method fo... |
|
|
Invention
|
System and method for image disturbance compensation.
Systems, apparatuses, and methods include ... |
|
|
Invention
|
Readout design for charged particle counting detectors.
A charged particle beam detector may inc... |
|
|
Invention
|
Method for configuring a field of view of an inspection apparatus.
A method for configuring a fi... |
|
|
Invention
|
Region-density based misalignment index for image alignment.
An improved method and system for i... |
|
|
Invention
|
Switch matrix configuration for improved bandwidth performance.
A charged particle detector incl... |
|
|
Invention
|
Superconductive magnet assembly, planar motor and lithographic apparatus.
There is provided a su... |
|
|
Invention
|
Suppressing specular reflection of mask absorber and on- resolution field stitching.
A method an... |
|
|
Invention
|
Dynamic switching of a detector switch matrix.
A charged particle detector includes an array of ... |
|
|
Invention
|
Semiconductor charged particle detector and methods thereof.
Systems and methods for charged par... |
|
|
Invention
|
Apparatus for broadband radiation generation.
An apparatus for broadband radiation generation in... |
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|
G/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
|
|
G/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
|
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Invention
|
Reticle stage.
A reticle stage for a lithographic apparatus is disclosed. The reticle stage comp... |
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|
G/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
G/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
2022
|
Invention
|
Method and computer program for grouping pattern features of a substantially irregular pattern la... |
|
|
G/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
G/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
|
2021
|
G/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
|
2020
|
G/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
G/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
G/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
G/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
G/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
G/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
G/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
G/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
2016
|
G/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
G/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
G/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
G/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
|
G/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
