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2024
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P/S
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Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
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P/S
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Semi-conductor lithographic machines, and their parts and fittings. |
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P/S
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Semi-conductor lithographic machines, and their parts and
fittings. |
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P/S
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Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware and... |
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P/S
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Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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Invention
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Metrology method and method for training a data structure for use in metrology.
Disclosed is a m... |
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Invention
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Charged particle apparatus and method.
A charged particle device projects charged-particle beams... |
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P/S
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Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
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P/S
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Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
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Invention
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Object holder, object table, optical element and method of controlling the flatness of a surface,... |
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Invention
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Systems and methods for defect inspection in charged-particle systems. Systems and methods for de... |
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Invention
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Electrostatic clamp arrangement. The present disclosure relates to an electrostatic clamp arrange... |
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Invention
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System and method for exposing a substrate edge and lithographic apparatus including the system. ... |
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Invention
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Lithographic apparatus, uniformity sensor for use therein with a plurality of sensing elements, m... |
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Invention
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A sealing system and a system for sealing an opening in a vacuum system. The present invention pr... |
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Invention
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Metrology method and data processing method applicable to metrology. Disclosed is a method of met... |
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Invention
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Lithographic apparatus and associated method. A lithographic apparatus comprising an illumination... |
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Invention
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Method and apparatus for improving accuracy of soft x-ray metrology. A method for improving accur... |
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Invention
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Optical measurement mark, optical measurement system and lithographic apparatus. An optical measu... |
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Invention
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An illumination configuration module for a metrology device. Disclosed is a radiation modulation ... |
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Invention
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Integrated photonic chip for interference based alignment sensing. A photonic integrated circuit ... |
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Invention
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Polishing tool and associated methods. A new polishing tool comprises: a main support member; a p... |
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Invention
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Stage and tool for heterogeneous integration of variably sized die. A support structure for die c... |
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Invention
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Metrology apparatus. There is provided a metrology apparatus for a lithographic system comprising... |
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Invention
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Methods of metrology related to overlay. A metrology method comprises obtaining a first absolute ... |
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Invention
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Electrostatic clamp arrangement. An electrostatic clamp arrangement comprising: a clamp member co... |
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Invention
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Track interface and substrate processing apparatus. A track interface for exchanging substrates b... |
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Invention
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Reticle conditioning for lithography applications. A method for conditioning a reticle includes d... |
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Invention
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Method of identifying service actions on a machine such as an exposure apparatus. Disclosed is a ... |
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Invention
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Object holder, object table, method of controlling the shape of a surface, method of manufacturin... |
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Invention
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Reluctance actuator, positioning device, stage apparatus, lithographic apparatus. The invention p... |
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Invention
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System and method for robot calibration. The disclosure provides a method of calibrating a substr... |
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Invention
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Pellicle membrane, pellicle, and method for manufacturing the same. There is provided a pellicle ... |
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Invention
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In-vacuum, in-situ wafer temperature measuring method and apparatus. An improved particle beam in... |
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Invention
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Method of predicting a response of an electromagnetic system to illumination electromagnetic radi... |
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Invention
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System and method for substrate alignment, and an apparatus including the system. The present dis... |
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Invention
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Anti-reflective nanostructures for semiconductor lithography, metrology, and inspection systems. ... |
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Invention
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Substrate support. Disclosed herein is a substrate support (200) configured to support a substrat... |
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Invention
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Bearing. A bearing comprises: a support and a plurality of bearing surfaces. The bearing surfaces... |
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Invention
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Metrology target. Disclosed is a method of metrology, comprising: obtaining metrology data relati... |
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Invention
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Method of manufacturing an electrode for an object holder. A method of manufacturing an electrode... |
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2023
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P/S
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Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
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P/S
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Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
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P/S
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Registered software, namely, recorded software for the storage, processing and generation of data... |
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P/S
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Software, especially software for the storage, processing
and generation of data and graphics. |
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2022
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Invention
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An assembly for a laser-operated light source and method of use.
An optical assembly includes a ... |
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Invention
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Surrounding pattern and process aware metrology.
A method and system for designing a mark for us... |
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Invention
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Apparatus for supplying liquid target material to a radiation source.
The present invention rela... |
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Invention
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Metrology calibration method.
A method of calibrating a model for inferring a value for a parame... |
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Invention
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Pellicles and membranes for use in a lithographic apparatus.
A method for forming a pellicle for... |
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Invention
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Systems and methods for reducing pattern shift in a lithographic apparatus.
A method for improvi... |
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Invention
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Obtaining a parameter characterizing a fabrication process.
A measurement process is performed f... |
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Invention
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Systems and structures for venting and flow conditioning operations in inspection systems.
Syste... |
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Invention
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Determining an etch effect based on an etch bias direction.
An etch bias direction is determined... |
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Invention
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Inspection apparatus, polarization-maintaining rotatable beam displacer, and method.
An inspecti... |
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Invention
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Utility stage for photolithographic apparatus and method.
Disclosed is an apparatus for and meth... |
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Invention
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Method and system of reducing chamber vibration.
Systems, apparatuses, and methods for reducing ... |
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Invention
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Methods and systems to calibrate reticle thermal effects.
A method of reducing effects of heatin... |
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Invention
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Hollow-core photonic crystal fiber based broadband radiation generator.
A broadband radiation so... |
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P/S
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Software, especially software for the storage, processing and generation of data and graphics. |
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P/S
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Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
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Invention
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Overlay measurement using balanced capacity targets.
A method of determining an overlay measurem... |
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Invention
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Systems and methods for lithographic tools with increased tolerances.
A method of use for a lith... |
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2021
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P/S
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Recorded software, in particular software for the storage, processing, and generation of data and... |
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2020
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P/S
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Maintenance and repair services in connection with machines for use in microlithography and in th... |
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P/S
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Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
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P/S
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Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
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2018
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P/S
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Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
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P/S
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Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
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2017
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P/S
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Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
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P/S
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Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
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P/S
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Maintenance and repair services in connection with machines, apparatus and instruments for use in... |
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2016
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P/S
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Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
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2015
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P/S
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Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
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P/S
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Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
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P/S
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Machine tool for mounting, demounting and remounting a
pellicle to a reticle in lithographic equ... |
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P/S
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Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
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P/S
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[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
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2014
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P/S
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Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
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P/S
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Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
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P/S
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Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
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2013
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P/S
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Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
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P/S
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Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
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2012
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P/S
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Machinery maintenance and repair in the field of semiconductor industry; installation of semicond... |
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P/S
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testing and inspection in the field of quality control of semiconductor wafers and reticles |
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P/S
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Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
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P/S
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Micro-lithography machines; machines for use in the
electronics, integrated circuit, semi-conduc... |
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P/S
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[ Cutting, polishing and heat treatment and coating of glass and other optical surfaces, namely, ... |
