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2026
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P/S
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Optical alignment sensors and measuring instruments for determining semiconductor wafer position,... |
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P/S
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Optical alignment sensors and measuring instruments for
determining semiconductor wafer position... |
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2025
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Invention
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Systems and methods for focusing charged-particle beams.
Systems and methods for irradiating a s... |
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Invention
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Charged particle assessment tool, inspection method.
A charged-particle assessment tool comprisi... |
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Invention
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Method for training or using a process model for determining a pattern in a patterning process.
... |
|
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Invention
|
Object table, stage apparatus, holding method and lithographic apparatus.
An object table includ... |
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Invention
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Method and apparatus to determine a patterning process parameter.
A method including: obtaining ... |
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Invention
|
Method of controlling a patterning process, device manufacturing method.
Methods of controlling ... |
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Invention
|
Method for evaluating measurement values of an aberration of a projection lens.
A method for eva... |
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Invention
|
Pellicle membrane for a lithographic apparatus.
A pellicle membrane for a lithographic apparatus... |
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Invention
|
Optical measurement system. An optical measurement system for measuring a topology of a surface o... |
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P/S
|
Semiconductor manufacturing machines and semiconductor
machinery. Electronic imaging hardware an... |
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P/S
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Testing apparatus using electron beam for inspection of semiconductor materials, devices and prod... |
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P/S
|
Electronic testing apparatus, data processors, computer
hardware and software for defect inspect... |
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P/S
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Testing apparatus using electron beam for inspection of
semiconductor materials, devices and pro... |
|
|
Invention
|
Systems, methods, and software for model-based focus and dose metrology with stack monitoring. Di... |
|
|
Invention
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Systems and methods for debris mitigation in euv light sources. Systems and methods for debris mi... |
|
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Invention
|
Optical assembly. An optical assembly for a topography measurement system, the optical assembly i... |
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Invention
|
System and method for debris removal in radiation source. A light source includes a vessel having... |
|
|
Invention
|
Pressure measurement apparatus. An apparatus includes one or more measurement devices. Each measu... |
|
|
Invention
|
Field splitting optical configuration for level sensing systems and methods. A level sensor is an... |
|
|
Invention
|
Dose measurement system for a lithographic apparatus. The present disclosure relates to a dose me... |
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Invention
|
Measuring height or distange using chirped pulses of light. An apparatus for measuring properties... |
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P/S
|
Electric and electronic process control apparatus for the production of semiconductor components,... |
|
|
Invention
|
Metrology tool. An optical metrology system for measuring a periodic target. The system comprises... |
|
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Invention
|
System and methods for debris reduction. An extreme ultraviolet (EUV) light source includes a ves... |
|
|
Invention
|
Systems and methods for refurbishing and qualifying a material receptacle for an euv radiation so... |
|
|
Invention
|
Systems and methods of etching in light source. A light source includes a vessel containing a fir... |
|
|
Invention
|
Systems and methods for measuring resistance and capacitance using voltage contrast. Systems and ... |
|
|
Invention
|
Reticle gripper, reticle exchange device, exposure apparatus and reticle gripping method. Embodim... |
|
|
Invention
|
Systems and assemblies for mitigating arcing energy in charged particle systems. Systems and asse... |
|
|
Invention
|
Systems and methods for image alignment for inspection and metrology. Systems and methods for ima... |
|
|
Invention
|
Detection arrangement for a level sensor. Disclosed is a detection arrangement for a level sensor... |
|
|
Invention
|
Measurement system and method of use. Illuminating a patterning device with radiation, the patter... |
|
|
Invention
|
Method and apparatus for monitoring substrate bonding. There is provided a substrate bonding appa... |
|
|
Invention
|
Level sensor. Disclosed is a sensor, comprising: at least one phase modulating projection grating... |
|
|
Invention
|
Magnetic field leakage cancelation in a charged-particle beam system. The disclosed embodiments i... |
|
|
Invention
|
Method and system for pattern coverage determination and pattern selection using diffusion model.... |
|
|
Invention
|
Diffusion models for parameter inference with application to wafer metrology. A generative networ... |
|
|
Invention
|
Alignment system and lithographic apparatus. Disclosed is a sensor arrangement for a metrology de... |
|
|
Invention
|
Process independent integrated optics for wafer alignment sensors. A system is disclosed for dete... |
|
|
Invention
|
Catalytic arrangement for a laser system, in particular configured to provide a drive laser in an... |
|
|
Invention
|
Level sensing systems and methods. A level sensor is an optical sensor that measures the height o... |
|
|
Invention
|
Metrology method and associated metrology and exposure apparatuses. Disclosed is a method of metr... |
|
|
Invention
|
Stacked full bridge inverter. Disclosed is a stacked full-bridge inverter for driving an n-phase ... |
|
|
Invention
|
Semiconductor detector and method of fabricating same.
The present disclosure describes a detect... |
|
|
P/S
|
Computer software for use in processing semiconductor wafers; computer software, recorded; semi-c... |
|
|
P/S
|
Computer software for use in processing semiconductor
wafers; computer software, recorded; semi-... |
|
|
P/S
|
Downloadable computer software for use in processing semiconductor wafers; Recorded computer soft... |
|
2024
|
P/S
|
Semiconductor manufacturing machines and semiconductor machinery.. Electronic imaging hardware an... |
|
|
P/S
|
Semi-conductor lithographic machines, and their parts and fittings. |
|
|
P/S
|
Semi-conductor lithographic machines, and their parts and
fittings. |
|
|
P/S
|
Semiconductor manufacturing machines and semiconductor machinery. Electronic imaging hardware in ... |
|
|
P/S
|
Electron beam tool for inspecting semiconductor materials, devices and processes |
|
|
P/S
|
Inspection tool using an electron beam for inspection of
semiconductor materials, devices and pr... |
|
|
P/S
|
Inspection tool using an electron beam for inspection of semiconductor materials, devices and pro... |
|
2023
|
Invention
|
Extreme ultraviolet light source obscuration bar and methods.
An extreme ultraviolet (EUV) sourc... |
|
|
Invention
|
An illumination module for a metrology device.
Disclosed is an illumination configuration module... |
|
|
Invention
|
Mirror layer and mirror for a lithographic apparatus.
A mirror layer for a lithographic apparatu... |
|
|
Invention
|
Particle transfer apparatus and methods.
A particle transfer system, including: a particle trap ... |
|
|
Invention
|
Electrostatic clamp with a structured electrode by post bond structuring.
Disclosed herein are e... |
|
|
Invention
|
Inspection systems using metasurface and integrated optical systems for lithography.
An inspecti... |
|
|
Invention
|
Lithographic apparatus and method.
A lithographic apparatus including a reflector for reflecting... |
|
|
Invention
|
A patterning device voltage biasing system for use in euv lithography.
A patterning device volta... |
|
|
Invention
|
Method and apparatus for controlling a lithographic apparatus, and a lithographic apparatus.
A c... |
|
|
Invention
|
Lithographic apparatus, metrology systems for controlling optical aberrations, and method thereof... |
|
|
Invention
|
Systems and methods for predicting post-etch stochastic variation.
A method for predicting post-... |
|
|
P/S
|
Machines for micro lithography and machines for use in the manufacture, fabrication and treatment... |
|
|
P/S
|
Machines for micro lithography and machines for use in the
fields of integrated circuits, semico... |
|
|
P/S
|
Registered software, namely, recorded software for the storage, processing and generation of data... |
|
|
P/S
|
Software, especially software for the storage, processing
and generation of data and graphics. |
|
2022
|
P/S
|
Software, especially software for the storage, processing and generation of data and graphics. |
|
|
P/S
|
Micro-lithography apparatus and instruments for use in the electronics, micro-lithography, semi-c... |
|
2021
|
P/S
|
Recorded software, in particular software for the storage, processing, and generation of data and... |
|
2020
|
P/S
|
Maintenance and repair services in connection with machines for use in microlithography and in th... |
|
|
P/S
|
Maintenance and repair services in connection with machines for use in the electronics, micro-lit... |
|
|
P/S
|
Maintenance and repair services in connection with machines
for use in the electronics, micro-li... |
|
2018
|
P/S
|
Computer hardware and software for the design and manufacture of semiconductor wafers and masks; ... |
|
|
P/S
|
Computer hardware and software for the design and
manufacture of semiconductor wafers and masks;... |
|
2017
|
P/S
|
Semiconductor lithographic machines, namely, lithographic machines used to manufacture semiconduc... |
|
|
P/S
|
Computer hardware for improving lithography manufacturing
processes; computer software for impro... |
|
|
P/S
|
Micro-lithography machines, namely, machines for manufacturing electronic components, integrated ... |
|
2016
|
P/S
|
Micro-lithography equipment; machines for use in the manufacture by micro-lithography, especially... |
|
2015
|
P/S
|
Exposure units being optical instruments and their parts, for use in lithographic machines, namel... |
|
|
P/S
|
Exposure units [optical instruments] and their parts, for
use in lithographic machines. |
|
|
P/S
|
Electronic inspection devices, data processors, computer hardware and software for defect inspect... |
|
|
P/S
|
[ Electronic inspection devices and ] computer software for inspection of semiconductor materials... |
|
2014
|
P/S
|
Process control equipment for semiconductor wafer production, namely particle beam emitter in the... |
|
|
P/S
|
Optical measuring apparatus and instruments for measuring test wafers for the manufacture of elec... |
|
|
P/S
|
Optical measuring apparatus and instruments for measuring
test wafers for the manufacture of ele... |
|
2013
|
P/S
|
Electronic imaging platforms in the field of inspection of semiconductor materials, namely, semic... |
|
|
P/S
|
Technology supervision and inspection in the field of quality control of semiconductor wafers and... |
