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2025
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P/S
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Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
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Invention
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Method for preventing line bending during metal fill process.
Provided herein are methods and ap... |
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Invention
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Electrostatic edge ring mounting system for substrate processing.
An edge ring system comprising... |
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Invention
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Large spot spectral sensing to control spatial setpoints.
A large beam spot spectral reflectomet... |
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P/S
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Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
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Invention
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Underlayer for photoresist adhesion and dose reduction.
This disclosure relates generally to a p... |
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Invention
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Molybdenum deposition.
Provided are methods of filling patterned features with molybdenum (Mo). ... |
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P/S
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Recorded computer simulation software for modeling
semiconductor manufacturing; recorded compute... |
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Invention
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Semiconductor processing techniques configured for use of a flexible and malleable temperature pr... |
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Invention
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Edge ring carriers for semiconductor processing. Ring storage carrier and ring storage buffers fo... |
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Invention
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Remote plasma-based deposition. Epitaxial techniques for forming films using radical-assisted rem... |
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Invention
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Oxidizing plasma-free silicon oxide deposition. Methods and apparatuses for depositing silicon-co... |
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Invention
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Methods to enhance glass substrate handling in semiconductor processing. Certain embodiments pert... |
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Invention
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Electrostatic chuck with multi-component ceramic coating applied to baseplate. An electrostatic c... |
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Invention
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Edge ring for high temperature tolerance in substrate processing systems. An edge ring is configu... |
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Invention
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Method for isolating vertical conductive lines in high aspect ratio features. A method for isolat... |
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Invention
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Etching using a carbon-containing film precursor. Examples are disclosed that relate to etching c... |
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Invention
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Isonitrile inhibitors in ald. Methods and apparatuses for using molecules having a carbon-nitroge... |
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Invention
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Edge ring compensation monitoring and adjustment during plasma processing. A system includes a su... |
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Invention
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Dielectric etch with reduced distortion. A method for etching features in a stack is provided. A ... |
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Invention
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Analyzed-image liquid-level sensor. In one embodiment, the disclosed subject-matter is a method f... |
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Invention
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Dry development simulation methods for photoresist films. Dry development models of a dry develop... |
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Invention
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Temporal switching to achieve geometric selective deposition of carbon in patterned features. Exa... |
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Invention
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Control of spatial density of plasma with process stations by return path reactance tuning. Discl... |
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Invention
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Virtual experimentation platform for photolithography process flow. A digital twin of an EUV phot... |
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Invention
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Two-piece cooling plate for a showerhead of a substrate processing system. A cooling plate for a ... |
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Invention
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Cryogenic chuck for narrow ion angular spread in substrate processing systems. An example substra... |
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Invention
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Silicon oxide etch with nitrogen containing etch component. A method of etching recessed features... |
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Invention
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Gas distribution assembly for semiconductor processing chamber with aluminum nitride layer. A gas... |
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Invention
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In-situ cleaning of a vacuum transfer module end effector. Disclosed is a method and apparatus co... |
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Invention
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Leak detection for a separated anode chamber. A method for detecting a leak in an electrodepositi... |
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Invention
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Mixed mode atomic layer deposition/chemical vapor deposition. Methods and apparatuses for forming... |
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Invention
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Debubbler component |
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P/S
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Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
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2024
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P/S
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Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
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P/S
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Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
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P/S
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Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
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2023
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P/S
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Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
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P/S
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Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
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P/S
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Consultation services in the field of software for designing
and manufacturing semiconductors an... |
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P/S
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Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
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Invention
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Improved pedestals for substrate processing systems.
A substrate support includes at least three... |
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Invention
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High-efficiency led substrate heater for deposition applications.
An optical array arranged in a... |
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P/S
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Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
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P/S
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Recorded virtual reality and augmented reality software for the design, development, manufacture,... |
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P/S
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Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
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P/S
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Recorded computer software for designing and manufacturing semiconductors and micro-electro- mech... |
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P/S
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Consultation services in the field of software for designing and manufacturing semiconductors and... |
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Invention
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Customizing etch selectivity and high aspect ratio feature loading through multi-level pulsing sc... |
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Invention
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In situ treatment of molybdenum oxyhalide byproducts in semiconductor processing equipment.
Prov... |
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Invention
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High modulus carbon doped silicon oxide film for mold stack scaling solutions in advanced memory ... |
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Invention
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Ion energy distribution control over substrate edge with non-sinusoidal voltage source.
A bias v... |
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Invention
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Hardmask for high aspect ratio dielectric etch at cryo and elevated temperatures.
Various embodi... |
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Invention
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Virtual semiconductor fab environment.
Examples are disclosed that relate to virtual semiconduct... |
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Invention
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Edge ring system and corresponding middle, edge, moving, static and bottom rings.
An edge ring s... |
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Invention
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Multi-path helical mixer for asymmetric wafer bow compensation.
An apparatus includes a stem bod... |
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Invention
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Multi-zone gas distribution for asymmetric wafer bow compensation.
An apparatus includes a main ... |
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Invention
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Water-based pretreatment for photoresist scum removal.
Described herein are methods, apparatus, ... |
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Invention
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Simultaneous dielectric etch with metal passivation.
A method for selectively etching at least o... |
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Invention
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Underlayer with bonded dopants for photolithography.
Examples are disclosed that relate to use o... |
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Invention
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Multi-modal electrostatic chucking.
Multi-modal electrostatic chuck (ESC) apparatus, and systems... |
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Invention
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Gas supply line arrangements.
In some examples, a gas supply line arrangement is provided for in... |
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Invention
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Conformal copper deposition on thin liner layer.
Various embodiments described herein relate to ... |
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Invention
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Hydrogen reduction in amorphous carbon films.
Provided herein are examples of methods and relate... |
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Invention
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Selective oxide etch using liquid precursor.
Embodiments herein relate to methods and apparatus ... |
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P/S
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Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
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2022
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P/S
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Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
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Invention
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Threaded nozzle insert |
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P/S
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Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
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2021
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P/S
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Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
