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2024
|
Invention
|
Tungsten feature fill with nucleation inhibition.
Described herein are methods of filling featur... |
|
2023
|
Invention
|
Conformal deposition of silicon carbide films. Disclosed are methods and systems for providing si... |
|
|
Invention
|
Plasma-enhanced deposition of film stacks. A method of depositing a film stack including films of... |
|
2022
|
Invention
|
Lipseals and contact elements for semiconductor electroplating apparatuses. Disclosed are cup ass... |
|
|
Invention
|
Tungsten feature fill with nucleation inhibition. Described herein are methods of filling feature... |
|
|
Invention
|
Films of desired composition and film properties. Provided are methods and systems for providing ... |
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2021
|
Invention
|
Films of desired composition and film properties.
Provided are methods and systems for providing... |
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|
Invention
|
Suppression of parasitic deposition in a substrate processing system by suppressing precursor flo... |
|
|
Invention
|
Tungsten feature fill.
Described herein are methods of filling features with tungsten and relate... |
|
|
Invention
|
Electroplating apparatus for tailored uniformity profile. An electroplating apparatus for electro... |
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2019
|
Invention
|
Cleaning electroplating substrate holders using reverse current deplating. Provided are cleaning ... |
|
|
Invention
|
Method to obtain sic class of films of desired composition and film properties.
Provided are met... |
|
|
Invention
|
Systems and methods for determining film thickness using dc self-bias voltage. A controller for a... |
|
|
Invention
|
Radical source design for remote plasma atomic layer deposition. A radical source for supplying r... |
|
|
Invention
|
Ultrahigh selective polysilicon etch with high throughput.
Provided are methods and apparatuses ... |
|
|
Invention
|
Temperature controlled showerhead. A temperature controlled showerhead for chemical vapor deposit... |
|
2018
|
Invention
|
Pecvd apparatus for in-situ deposition of film stacks. An apparatus for depositing film stacks in... |
|
|
Invention
|
Low copper electroplating solutions for fill and defect control.
Certain embodiments herein rela... |
|
|
Invention
|
Tungsten feature fill. Described herein are methods of filling features with tungsten and related... |
|
|
Invention
|
Protecting anodes from passivation in alloy plating systems. An apparatus for continuous simultan... |
|
|
Invention
|
Method and apparatuses for reducing porogen accumulation from a uv-cure chamber. Porogen accumula... |
|
|
Invention
|
Electroplating apparatus for tailored uniformity profile. Methods of electroplating metal on a su... |
|
|
Invention
|
Methods for depositing films on sensitive substrates. Methods and apparatus to form films on sens... |
|
|
Invention
|
Electroplating apparatus and process for wafer level packaging. An apparatus for continuous simul... |
|
|
Invention
|
Soft landing nanolaminates for advanced patterning. Methods for depositing nanolaminate protectiv... |
|
2017
|
Invention
|
Wetting pretreatment for enhanced damascene metal filling. Disclosed are pre-wetting apparatus de... |
|
|
Invention
|
Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating. Metho... |
|
|
Invention
|
Dynamic current distribution control apparatus and method for wafer electroplating. Methods, syst... |
|
|
Invention
|
Configuration and method of operation of an electrodeposition system for improved process stabili... |
|
|
Invention
|
Method and apparatus for electroplating semiconductor wafer when controlling cations in electroly... |
|
|
Invention
|
Methods and apparatus for wetting pretreatment for through resist metal plating. Disclosed are pr... |
|
|
Invention
|
Wafer chuck with aerodynamic design for turbulence reduction. A rotatable wafer chuck includes ch... |
|
|
Invention
|
Cross flow manifold for electroplating apparatus. The embodiments herein relate to methods and ap... |
|
|
Invention
|
Plasma activated conformal dielectric film deposition. Methods of depositing a film on a substrat... |
|
2009
|
G/S
|
Technical consultancy in relation to the production of semiconductors; designing of semiconductor... |
|
2008
|
G/S
|
Machines for manufacturing semiconductors, and parts for such machines. Computer software for int... |
|
|
G/S
|
Machines for removing light-sensitive organic polymers from semiconductor chips during the manufa... |
|
2004
|
Invention
|
Tensile dielectric films using uv curing. 2. Other dielectric capping layer film materials show s... |
|
2000
|
G/S
|
Machines for manufacturing semiconductors and parts for such machines in class 7. |
|
1998
|
G/S
|
MACHINES FOR MANUFACTURING SEMICONDUCTORS AND PARTS FOR SUCH MACHINES |
