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2023
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Invention
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Conformal deposition of silicon carbide films.
Disclosed are methods and systems for providing s... |
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Invention
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Pecvd apparatus for in-situ deposition of film stacks.
An apparatus for depositing film stacks i... |
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2022
|
Invention
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Lipseals and contact elements for semiconductor electroplating apparatuses. Disclosed are cup ass... |
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Invention
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Tungsten feature fill with nucleation inhibition.
Described herein are methods of filling featur... |
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Invention
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Films of desired composition and film properties. Provided are methods and systems for providing ... |
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Invention
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Conformal deposition of silicon carbide films. Disclosed are methods and systems for providing si... |
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2021
|
Invention
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Films of desired composition and film properties.
Provided are methods and systems for providing... |
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Invention
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Suppression of parasitic deposition in a substrate processing system by suppressing precursor flo... |
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Invention
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Tungsten feature fill.
Described herein are methods of filling features with tungsten and relate... |
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Invention
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Electroplating apparatus for tailored uniformity profile. An electroplating apparatus for electro... |
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2019
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Invention
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Cleaning electroplating substrate holders using reverse current deplating. Provided are cleaning ... |
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Invention
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Method to obtain sic class of films of desired composition and film properties.
Provided are met... |
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Invention
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Systems and methods for determining film thickness using dc self-bias voltage. A controller for a... |
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Invention
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Tungsten feature fill with nucleation inhibition. Described herein are methods of filling feature... |
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Invention
|
Radical source design for remote plasma atomic layer deposition. A radical source for supplying r... |
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|
Invention
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Ultrahigh selective polysilicon etch with high throughput.
Provided are methods and apparatuses ... |
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Invention
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Temperature controlled showerhead. A temperature controlled showerhead for chemical vapor deposit... |
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2018
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Invention
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Pecvd apparatus for in-situ deposition of film stacks. An apparatus for depositing film stacks in... |
|
|
Invention
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Low copper electroplating solutions for fill and defect control.
Certain embodiments herein rela... |
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Invention
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Tungsten feature fill. Described herein are methods of filling features with tungsten and related... |
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|
Invention
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Protecting anodes from passivation in alloy plating systems. An apparatus for continuous simultan... |
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Invention
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Method and apparatuses for reducing porogen accumulation from a uv-cure chamber. Porogen accumula... |
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|
Invention
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Electroplating apparatus for tailored uniformity profile. Methods of electroplating metal on a su... |
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Invention
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Methods for depositing films on sensitive substrates. Methods and apparatus to form films on sens... |
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|
Invention
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Electroplating apparatus and process for wafer level packaging. An apparatus for continuous simul... |
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Invention
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Soft landing nanolaminates for advanced patterning. Methods for depositing nanolaminate protectiv... |
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2017
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Invention
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Wetting pretreatment for enhanced damascene metal filling. Disclosed are pre-wetting apparatus de... |
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Invention
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Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating. Metho... |
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Invention
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Dynamic current distribution control apparatus and method for wafer electroplating. Methods, syst... |
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|
Invention
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Configuration and method of operation of an electrodeposition system for improved process stabili... |
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|
Invention
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Method and apparatus for electroplating semiconductor wafer when controlling cations in electroly... |
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Invention
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Methods and apparatus for wetting pretreatment for through resist metal plating. Disclosed are pr... |
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Invention
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Wafer chuck with aerodynamic design for turbulence reduction. A rotatable wafer chuck includes ch... |
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|
Invention
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Cross flow manifold for electroplating apparatus. The embodiments herein relate to methods and ap... |
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|
Invention
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Plasma activated conformal dielectric film deposition. Methods of depositing a film on a substrat... |
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Invention
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Wetting wave front control for reduced air entrapment during wafer entry into electroplating bath... |
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2009
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P/S
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Technical consultancy in relation to the production of semiconductors; designing of semiconductor... |
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2008
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P/S
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Machines for manufacturing semiconductors, and parts for such machines. Computer software for int... |
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P/S
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Machines for removing light-sensitive organic polymers from semiconductor chips during the manufa... |
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2004
|
Invention
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Tensile dielectric films using uv curing. 2. Other dielectric capping layer film materials show s... |
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2000
|
P/S
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Machines for manufacturing semiconductors and parts for such machines in class 7. |
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1998
|
P/S
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MACHINES FOR MANUFACTURING SEMICONDUCTORS AND PARTS FOR SUCH MACHINES |
