|
2024
|
Invention
|
Novel alkoxyaminosilylamine compound, preparation method therefor, silicon-containing thin film d... |
|
|
Invention
|
Method for manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufa... |
|
|
Invention
|
Composition for depositing antimony-containing thin film, and method for manufacturing antimony-c... |
|
|
Invention
|
Novel aminoalkoxysilylamine compound, preparation method therefor, and silicon-containing thin fi... |
|
|
Invention
|
Fluorodisilazane compound, composition comprising same for depositing silicon-containing thin fil... |
|
|
Invention
|
Composition for depositing silicon-containing thin film and silicon-containing thin film manufact... |
|
|
Invention
|
Cyclodisilazane compound, composition for depositing silicon-containing thin film comprising same... |
|
|
Invention
|
Method for preparing ruthenium-containing thin film. 222333. |
|
2023
|
Invention
|
Composition for depositing thin film containing metal compound, method for manufacturing metal-co... |
|
|
Invention
|
Silicon-bearing encapsulation film composition including silazane compound and method for manufac... |
|
|
Invention
|
Indium compound, indium-containing thin film deposition composition comprising same, and indium-c... |
|
|
Invention
|
Method for manufacturing pellicle with metal silicide capping layer and pellicle manufactured the... |
|
|
Invention
|
Silicon precursor having a heterocyclic group, composition for depositing a silicon-containing la... |
|
|
Invention
|
Composition for depositing a silicon-containing layer and method of depositing a silicon-containi... |
|
|
Invention
|
Iodine-containing metal compound and composition for depositing thin film including the same.
Pr... |
|
|
Invention
|
Method for manufacturing euv pellicle on basis of multilayer membrane structure containing cappin... |
|
2022
|
Invention
|
Indium compound, method of producing the same, composition for depositing indium-containing thin ... |
|
|
Invention
|
Composition for depositing antimony-containing thin film and method for manufacturing antimony-co... |
|
|
Invention
|
Molybdenum compound, method for preparing same, and method for manufacturing thin film comprising... |
|
|
Invention
|
Molybdenum compound, method for preparing same, and composition comprising same for thin film dep... |
|
|
Invention
|
Composition for depositing silicon-containing thin film and method for manufacturing silicon-cont... |
|
|
Invention
|
Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine comp... |
|
2021
|
Invention
|
Atomic layer etching method and semiconductor device manufacturing method using the same. An atom... |
|
2020
|
Invention
|
Novel silylcyclodisilazane compound and method for manufacturing silicon-containing thin film usi... |
|
|
Invention
|
Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufact... |
|
2019
|
Invention
|
Method for manufacturing molybdenum-containing thin film and molybdenum-containing thin film manu... |
|
|
Invention
|
Tin compound, tin precursor compound for forming a tin-containing layer, and methods of forming a... |
|
|
Invention
|
Organometallic precursors, methods of forming a layer using the same and methods of manufacturing... |
|
|
Invention
|
Method of forming tin-containing material film and method of synthesizing a tin compound. A tin c... |
|
2018
|
Invention
|
Composition for depositing silicon-containing thin film and method for producing silicon-containi... |
|
|
Invention
|
Composition for deposition of silicon-containing thin film, and method for manufacturing silicon-... |
|
|
Invention
|
Method of manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufac... |
|
|
Invention
|
Method for producing ruthenium-containing thin film, and ruthenium-containing thin film produced ... |
|
|
Invention
|
Metal triamine compound, method for preparing the same, and composition for depositing metal-cont... |
|
|
Invention
|
Metal triamine compound, method for preparing same, and composition containing same for depositin... |
|
|
Invention
|
Disilylamine compound, method for preparing the same, and composition for depositing silicon-cont... |
|
|
Invention
|
Composition for depositing silicon-containing thin film including disilylamine compound and metho... |
|
|
Invention
|
Disilylamine compound, method for preparing same and silicon-containing thin film deposition comp... |
|
|
Invention
|
Silicon-containing thin film deposition composition comprising disilylamine compound and method f... |
|
|
Invention
|
Silylamine compound, composition for depositing silicon-containing thin film containing the same,... |
|
|
Invention
|
Method of manufacturing a cobalt containing thin film. The present invention relates to a method ... |
|
2017
|
Invention
|
Method for manufacturing silicon nitride thin film using plasma atomic layer deposition.
The pre... |
|
|
Invention
|
Transition metal compound, preparation method therefor, and composition for depositing transition... |
