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2025
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Invention
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Method of manufacturing sacrificial layer and method of manufacturing semiconductor device by usi... |
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Invention
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Method for preparing diiodosilane.
Provided is a method for preparing diiodosilane including: re... |
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Invention
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Composition for low-dielectric film, low-dielectric film and manufacturing method thereof.
A com... |
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Invention
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Silicon compound and method of producing silicon-containing thin film using the same.
Provided a... |
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Invention
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Cyclosilazane compound and method of producing silicon-containing thin film using the same.
A cy... |
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Invention
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Trisilylamine compound, composition for depositing silicon-containing thin film including the sam... |
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Invention
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Silicon compounds and methods of manufacturing integrated circuit device using the same.
Silicon... |
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2024
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Invention
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Thin-film forming composition including aluminum compound, method of forming thin film by using t... |
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Invention
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Novel alkoxyaminosilylamine compound, preparation method therefor, silicon-containing thin film d... |
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Invention
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Method for manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufa... |
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Invention
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Composition for depositing antimony-containing thin film, and method for manufacturing antimony-c... |
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Invention
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Novel aminoalkoxysilylamine compound, preparation method therefor, and silicon-containing thin fi... |
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Invention
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Fluorodisilazane compound, composition comprising same for depositing silicon-containing thin fil... |
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Invention
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Composition for depositing silicon-containing thin film and silicon-containing thin film manufact... |
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Invention
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Cyclodisilazane compound, composition for depositing silicon-containing thin film comprising same... |
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Invention
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Method for preparing ruthenium-containing thin film. 222333. |
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2023
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Invention
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Composition for depositing thin film containing metal compound, method for manufacturing metal-co... |
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Invention
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Silicon-bearing encapsulation film composition including silazane compound and method for manufac... |
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Invention
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Indium compound, indium-containing thin film deposition composition comprising same, and indium-c... |
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Invention
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Method for manufacturing pellicle for forming metal silicide capping layer and pellicle manufactu... |
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Invention
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Method for manufacturing pellicle with metal silicide capping layer and pellicle manufactured the... |
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Invention
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Composition for depositing a silicon-containing layer and method of depositing a silicon-containi... |
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Invention
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Iodine-containing metal compound and composition for depositing thin film including the same. Pro... |
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Invention
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Method for manufacturing euv pellicle on basis of multilayer membrane structure containing cappin... |
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2022
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Invention
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Indium compound, method of producing the same, composition for depositing indium-containing thin ... |
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Invention
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Composition for depositing antimony-containing thin film and method for manufacturing antimony-co... |
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|
Invention
|
Molybdenum compound, method for preparing same, and method for manufacturing thin film comprising... |
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Invention
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Molybdenum compound, method for preparing same, and composition comprising same for thin film dep... |
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Invention
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Composition for depositing silicon-containing thin film and method for manufacturing silicon-cont... |
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Invention
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Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine comp... |
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2021
|
Invention
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Atomic layer etching method and semiconductor device manufacturing method using the same. An atom... |
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2020
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Invention
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Silylcyclodisilazane compound and method for manufacturing silicon-containing thin film using the... |
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Invention
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Novel silylcyclodisilazane compound and method for manufacturing silicon-containing thin film usi... |
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Invention
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Silicon metal oxide encapsulation film comprising metal or metal oxide in thin film, and manufact... |
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2019
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Invention
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Method for manufacturing molybdenum-containing thin film and molybdenum-containing thin film manu... |
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Invention
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Tin compound, tin precursor compound for forming a tin-containing layer, and methods of forming a... |
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Invention
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Organometallic precursors, methods of forming a layer using the same and methods of manufacturing... |
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2018
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Invention
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Composition for depositing silicon-containing thin film and method for producing silicon-containi... |
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Invention
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Method of manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufac... |
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Invention
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Metal triamine compound, method for preparing the same, and composition for depositing metal-cont... |
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Invention
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Disilylamine compound, method for preparing the same, and composition for depositing silicon-cont... |
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Invention
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Composition for depositing silicon-containing thin film including disilylamine compound and metho... |
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Invention
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Silylamine compound, composition for depositing silicon-containing thin film containing the same,... |
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2017
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Invention
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Method for manufacturing silicon nitride thin film using plasma atomic layer deposition.
The pre... |
