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2025
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Invention
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Moncrystalline coatings for reactor parts suitable for the epitaxial deposition of semiconductor ... |
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Invention
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Reactor casing assembly.
The present invention relates to a casing assembly of a reactor for the... |
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2024
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Invention
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Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, r... |
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Invention
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Automation system for a removable reaction unit of an epitaxial reactor.
The present invention r... |
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Invention
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Reactor with removable reaction unit.
The present invention relates to a reaction chamber compri... |
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Invention
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Multi-chamber assembly for handling removable epitaxial reaction units.
The present invention re... |
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Invention
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Fast cooling of reactor from high temperatures.
The present invention relates to a reactor suita... |
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Invention
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Two-chamber reactor for epitaxial deposition of semiconductor material on substrates.
The innova... |
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Invention
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Angular speed measurement system for substrates used in epitaxial deposition reactors.
The prese... |
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Invention
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Apparatus for manufacturing semiconductor devices.
Apparatus for manufacturing semiconductor dev... |
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Invention
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Wafer cassette loading and unloading system for an epitaxial reaction and an epitaxial reactor. ... |
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Invention
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Reactor for epitaxial deposition of semiconductor material on substrates with sliding sledge for ... |
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Invention
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Wafer loading and unloading system for an epitaxial reactor and an epitaxial reactor.
A system f... |
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Invention
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Process for growing active layers in sequence.
The present invention describes a process for pro... |
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Invention
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Method for removing layers of silicon carbide, as well as process and apparatus for cleaning epit... |
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2022
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Invention
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Reaction chamber with covering system and epitaxial reactor.
The reaction chamber (100) comprise... |
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Invention
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Reaction chamber with covering system and epitaxial reactor. The reaction chamber (100) comprises... |
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2021
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Invention
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Method for cvd deposition of n-type doped silicon carbide and epitaxial reactor. The method serve... |
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Invention
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Reactor for epitaxial deposition with a heating inductor with movable turns. The present inventio... |
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Invention
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Tool for handling substrates with overhead screen and relevant handling methods and epitaxial rea... |
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2020
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Invention
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Treating arrangement with loading/unloading group and epitaxial reactor.
The treating arrangemen... |
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Invention
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Treating arrangement with storage chamber and epitaxial reactor.
The treating arrangement (900) ... |
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Invention
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Treating arrangement with transfer chamber and epitaxial reactor.
The treating arrangement (900)... |
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Invention
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Treating arrangement with transfer chamber and epitaxial reactor. The treating arrangement (900) ... |
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Invention
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Treating arrangement with loading/unloading group and epitaxial reactor. The treating arrangement... |
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Invention
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Treating arrangement with storage chamber and epitaxial reactor. The treating arrangement (900) f... |
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G/S
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Equipment for semiconductor manufacturing including but not
limited to: CVD (chemical vapor depo... |
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G/S
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Equipment for semiconductor manufacturing, namely, CVD (Chemical Vapor Deposition) and MOCVD (Met... |
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G/S
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Semiconductor manufacturing equipment, including but not limited to: CVD (chemical vapour deposit... |
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G/S
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Equipment for semiconductor manufacturing including CVD
(chemical vapor deposition) and MOCVD (m... |
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Invention
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Reaction chamber for a deposition reactor with interspace and lower closing element and reactor. ... |
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Invention
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Reaction chamber comprising a rotating element for the deposition of a semiconductor material. Th... |
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2019
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Invention
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Deposition reactor with inductors and electromagnetic shields.
The reactor (100) for deposition ... |
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Invention
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Deposition reactor with inductors and electromagnetic shields. The reactor (100) for deposition o... |
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Invention
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Reaction chamber for an epitaxial reactor of semiconductor material with non-uniform longitudinal... |
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2017
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Invention
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Heating method for a reactor for epitaxial deposition and reactor for epitaxial deposition.
The ... |
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Invention
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Heating method for a reactor for epitaxial deposition and reactor for epitaxial deposition. The p... |
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Invention
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Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method o... |
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Invention
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Susceptor with substrate clamped by underpressure, and reactor for epitaxial deposition. The susc... |
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Invention
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Inductively heatable susceptor and epitaxial deposition reactor.
The present invention concerns ... |
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Invention
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Inductively heatable susceptor and epitaxial deposition reactor. The present invention concerns a... |
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2016
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Invention
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Tool for manipulating substrates, manipulation method and epitaxial reactor. The tool (1) for man... |
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Invention
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Susceptor with asymmetric recesses, reactor for epitaxial deposition and production method.
This... |
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2014
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Invention
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Reaction chamber for epitaxial growth with a loading/unloading device and reactor. A reaction cha... |
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2003
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G/S
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Epitaxial reactors and components thereof, operational
software for epitaxial reactors. |
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G/S
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EPITAXIAL REACTORS AND PARTS THEREFORE FOR USE IN DEPOSITING LAYERS OF SEMICONDUCTOR MATERIAL ONT... |
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2001
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G/S
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Epitaxial reactors, operational software. |
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G/S
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Epitaxial reactors, operational software therefore |
