|
2025
|
Invention
|
Jig device and method of mounting focus ring using the same.
Disclosed are a jig device and a me... |
|
|
Invention
|
Substrate transfer apparatus and substrate processing apparatus.
A substrate transferring appara... |
|
|
Invention
|
Substrate processing method and substrate processing apparatus.
Disclosed is a substrate process... |
|
|
Invention
|
Substrate processing apparatus.
Provided is an apparatus for processing a substrate. The apparat... |
|
|
Invention
|
Substrate processing appartus.
A substrate processing apparatus includes: a process chamber; and... |
|
|
Invention
|
Sealed shutter apparatus and substrate processing apparatus including the same.
Provided is a se... |
|
|
Invention
|
Substrate processing apparatus.
Disclosed is A substrate processing apparatus. The apparatus inc... |
|
|
Invention
|
Substrate processing method and substrate processing apparatus.
Provided is an apparatus for pro... |
|
|
Invention
|
Chemical liquid supply apparatus and chemical liquid exchange method.
Disclosed is a liquid exch... |
|
|
Invention
|
Substrate processing method and apparatus.
Provided is a substrate processing method and apparat... |
|
|
Invention
|
Substrate processing apparatus.
The substrate processing apparatus includes: a chamber body havi... |
|
|
Invention
|
Substrate processing apparatus.
Provided is an apparatus for processing a substrate, the apparat... |
|
|
Invention
|
Optical module and substrate processing apparatus including same.
Disclosed are an optical modul... |
|
|
Invention
|
Apparatus for inspecting component and method of inspecting component.
Disclosed are a component... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
Disclosed is a method of process... |
|
|
Invention
|
Substrate processing apparatus.
The apparatus features a plurality of treating chambers arranged... |
|
|
Invention
|
Method and system for processing substrate.
Disclosed is a method and system for processing a su... |
|
|
Invention
|
Substrate processing apparatus including electromagnet unit.
Disclosed is a substrate processing... |
|
|
Invention
|
Substrate processing apparatus including ultrasonic nozzle and method for driving the same.
A su... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
Disclosed is an apparatus of pro... |
|
|
Invention
|
Plasma chamber dome attachment and detachment jig.
Disclosed relates to a jig for attaching and ... |
|
|
Invention
|
Process chamber and substrate processing apparatus.
Provided is a process chamber. The process c... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
An apparatus for processing a su... |
|
|
Invention
|
Substrate support unit and substrate processing apparatus.
Disclosed is a substrate support unit... |
|
|
Invention
|
Semiconductor manufacturing equipment and semiconductor manufacturing method.
Disclosed relates ... |
|
|
Invention
|
Semiconductor manufacturing equipment and substrate processing method using same.
Disclosed rela... |
|
|
Invention
|
Substrate processing apparatus and substrate processing method.
Provided is an apparatus for pro... |
|
|
Invention
|
Chemical supply apparatus and maintenance method for liquid treating apparatus.
Disclosed is a t... |
|
|
Invention
|
Substrate support unit and substrate processing apparatus including the same.
Disclosed are a su... |
|
|
Invention
|
Support unit and substrate treating apparatus.
The present disclosure provides a support unit an... |
|
|
Invention
|
Stocker and article transfer system.
A stocker including a main frame, and a plurality of storag... |
|
|
Invention
|
Apparatus and method for conveying substrate.
A substrate conveyance apparatus includes a hand s... |
|
|
Invention
|
Liquid supply unit and substrate processing apparatus including liquid supply unit.
A liquid sup... |
|
|
Invention
|
Substrate processing device.
A substrate processing device includes an application module applyi... |
|
|
Invention
|
Vacuum pipe assembly, support unit, and substrate treating apparatus.
The present disclosure pro... |
|
|
Invention
|
Substrate processing apparatus and method.
There is provided a substrate processing apparatus in... |
|
|
Invention
|
Apparatus and method for processing substrate.
A substrate processing apparatus includes an inde... |
|
|
Invention
|
Multi-axis stage apparatus, wafer bonding method, and wafer bonding apparatus using the same.
Th... |
|
|
Invention
|
Substrate treatment apparatus and substrate treatment method.
A substrate treatment apparatus in... |
|
|
Invention
|
Treatment container and substrate treatment apparatus including treatment container.
A substrate... |
|
|
Invention
|
Apparatus for processing substrate.
An apparatus for processing a substrate is provided, the app... |
|
|
Invention
|
Home port and apparatus for processing substrate with the same.
In the present disclosure, provi... |
|
|
Invention
|
Transfer robot and container storage facility including the same.
There is provided a transfer r... |
|
|
Invention
|
Apparatus and method for bonding substrates.
The present disclosure provides an apparatus for bo... |
|
|
Invention
|
Substrate processing apparatus.
The present disclosure provides a substrate processing apparatus... |
|
|
Invention
|
Transfer module and substrate processing apparatus including the same.
A transfer module include... |
|
|
Invention
|
Liquid supply apparatus and monitoring apparatus thereof.
A liquid supply apparatus includes a n... |
|
|
Invention
|
Semiconductor processing apparatus.
A semiconductor processing apparatus includes a storage cont... |
|
|
Invention
|
Substrate treating apparatus.
A substrate treating apparatus is provided. The substrate treating... |
|
2021
|
P/S
|
apparatus for processing substrate; deposition apparatus for processing substrate; cleaning appar... |
|
2013
|
P/S
|
Machines for automatically cutting and sorting semiconductor elements; [ machines for automatical... |
|
2012
|
P/S
|
Machines for processing substrate, machines for manufacturing substrates, [ machines for etching... |
|
|
P/S
|
Machines for processing substrate; machines for manufacturing substrates; machines for developing... |
|
|
P/S
|
Machines for processing substrate, [ machines for manufacturing substrates, machines for depositi... |
