- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/28 - Vacuum evaporation by wave energy or particle radiation
Patent holdings for IPC class C23C 14/28
Total number of patents in this class: 518
10-year publication summary
|
53
|
31
|
44
|
39
|
29
|
38
|
37
|
36
|
20
|
2
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V. | 1824 |
37 |
| Picodeon Ltd Oy | 35 |
24 |
| Applied Materials, Inc. | 19628 |
14 |
| Lam Research Corporation | 5433 |
10 |
| Pulsedeon Oy | 12 |
9 |
| Solmates B.V. | 8 |
8 |
| Nederlandse Organisatie voor Toegepast-natuurwetenschappelijk Onderzoek TNO | 2400 |
7 |
| National Institute of Advanced Industrial Science and Technology | 3799 |
6 |
| Orbotech Ltd. | 244 |
6 |
| Microsoft Technology Licensing, LLC | 54197 |
5 |
| Boe Technology Group Co., Ltd. | 42451 |
5 |
| JX Nippon Mining & Metals Corporation | 1473 |
5 |
| Mycronic AB | 163 |
5 |
| University of Copenhagen | 428 |
5 |
| Rtx Corporation | 9746 |
5 |
| TDK Corporation | 6775 |
4 |
| East China Normal University | 189 |
4 |
| North Carolina State University | 1584 |
4 |
| Chongqing Institute of East China Normal University | 49 |
4 |
| ROI Optoelectronics Technology CO, LTD. | 35 |
4 |
| Other owners | 347 |