- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/28 - Vacuum evaporation by wave energy or particle radiation
Patent holdings for IPC class C23C 14/28
Total number of patents in this class: 521
10-year publication summary
|
55
|
31
|
45
|
39
|
29
|
39
|
37
|
37
|
20
|
24
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V. | 1878 |
42 |
| Applied Materials, Inc. | 20694 |
14 |
| Lam Research Corporation | 5747 |
12 |
| Picodeon Ltd Oy | 16 |
12 |
| Pulsedeon Oy | 12 |
9 |
| Orbotech Ltd. | 263 |
8 |
| Solmates B.V. | 8 |
8 |
| Nederlandse Organisatie voor Toegepast-natuurwetenschappelijk Onderzoek TNO | 2467 |
7 |
| Microsoft Technology Licensing, LLC | 54719 |
5 |
| National Institute of Advanced Industrial Science and Technology | 3793 |
5 |
| Boe Technology Group Co., Ltd. | 44802 |
5 |
| JX Nippon Mining & Metals Corporation | 1451 |
5 |
| Mycronic AB | 171 |
5 |
| University of Copenhagen | 447 |
5 |
| Rtx Corporation | 10264 |
5 |
| TDK Corporation | 7038 |
4 |
| Carl Zeiss SMT GmbH | 3386 |
4 |
| East China Normal University | 204 |
4 |
| North Carolina State University | 1607 |
4 |
| Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | 6109 |
4 |
| Other owners | 354 |