- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 14/28 - Vacuum evaporation by wave energy or particle radiation
Patent holdings for IPC class C23C 14/28
Total number of patents in this class: 495
10-year publication summary
|
44
|
55
|
31
|
45
|
39
|
29
|
37
|
35
|
36
|
2
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V. | 1744 |
34 |
| Picodeon Ltd Oy | 38 |
26 |
| Applied Materials, Inc. | 17745 |
15 |
| Lam Research Corporation | 5001 |
10 |
| Pulsedeon Oy | 12 |
9 |
| Solmates B.V. | 8 |
8 |
| National Institute of Advanced Industrial Science and Technology | 3736 |
7 |
| Nederlandse Organisatie voor Toegepast-natuurwetenschappelijk Onderzoek TNO | 2378 |
7 |
| Orbotech Ltd. | 202 |
6 |
| Microsoft Technology Licensing, LLC | 52886 |
5 |
| Boe Technology Group Co., Ltd. | 38881 |
5 |
| JX Nippon Mining & Metals Corporation | 1524 |
5 |
| Mycronic AB | 155 |
5 |
| University of Copenhagen | 388 |
5 |
| Rtx Corporation | 9109 |
5 |
| TDK Corporation | 6539 |
4 |
| East China Normal University | 173 |
4 |
| North Carolina State University | 1529 |
4 |
| Chongqing Institute of East China Normal University | 49 |
4 |
| ROI Optoelectronics Technology CO, LTD. | 35 |
4 |
| Other owners | 323 |